Physics and technology of submicron structures

PACS: 01.30.Vv, 85.30.−z (all)
DOI: 10.1070/PU1989v032n09ABEH002763
URL: https://ufn.ru/en/articles/1989/9/i/
Citation: Idlis B G "Physics and technology of submicron structures" Sov. Phys. Usp. 32 834–834 (1989)

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TY JOUR
TI Physics and technology of submicron structures
AU Idlis, B. G.
PB Physics-Uspekhi
PY 1989
JO Physics-Uspekhi
JF Physics-Uspekhi
JA Phys. Usp.
VL 32
IS 9
SP 834-834
UR https://ufn.ru/en/articles/1989/9/i/
ER https://doi.org/10.1070/PU1989v032n09ABEH002763

Оригинал: Идлис Б Г «Физика и технология субмикронных структур» УФН 159 188–189 (1989); DOI: 10.3367/UFNr.0159.198909j.0188