PACS: 01.30.Vv, 85.30.−z (all)
DOI: 10.1070/PU1989v032n09ABEH002763
URL: https://ufn.ru/en/articles/1989/9/i/
Citation: Idlis B G "Physics and technology of submicron structures" Sov. Phys. Usp. 32 834–834 (1989)

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@article{Idlis:1989,
	author = {B. G. Idlis},
	title = {Physics and technology of submicron structures},
	publisher = {Physics-Uspekhi},
	year = {1989},
	journal = {Phys. Usp.},
	volume = {32},
	number = {9},
	pages = {834-834},
	url = {https://ufn.ru/en/articles/1989/9/i/},
	doi = {10.1070/PU1989v032n09ABEH002763}
}

Оригинал: Идлис Б Г «Физика и технология субмикронных структур» УФН 159 188–189 (1989); DOI: 10.3367/UFNr.0159.198909j.0188