PT Journal Article
TI Physics and technology of submicron structures
AU Idlis B G
FAU Idlis BG
DP 10 Sep, 1989
TA Phys. Usp.
VI 32
IP 9
PG 834-834
RX 10.1070/PU1989v032n09ABEH002763
URL https://ufn.ru/en/articles/1989/9/i/
SO Phys. Usp. 1989 Sep 10;32(9):834-834