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RT Journal T1 Physics and technology of submicron structures A1 Idlis,B.G. PB Physics-Uspekhi PY 1989 FD 10 Sep, 1989 JF Physics-Uspekhi JO Phys. Usp. VO 32 IS 9 SP 834-834 DO 10.1070/PU1989v032n09ABEH002763 LK https://ufn.ru/en/articles/1989/9/i/
Оригинал: Идлис Б Г «Физика и технология субмикронных структур» УФН 159 188–189 (1989); DOI: 10.3367/UFNr.0159.198909j.0188