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Book reviews


Physics and technology of submicron structures


Lebedev Physical Institute, Russian Academy of Sciences, Leninsky prosp. 53, Moscow, 119991, Russian Federation
PACS: 01.30.Vv, 85.30.−z (all)
DOI: 10.1070/PU1989v032n09ABEH002763
URL: https://ufn.ru/en/articles/1989/9/i/
Citation: Idlis B G "Physics and technology of submicron structures" Sov. Phys. Usp. 32 834–834 (1989)
BibTex BibNote ® (generic)BibNote ® (RIS)MedlineRefWorks
%0 Journal Article
%T Physics and technology of submicron structures
%A B. G. Idlis
%I Physics-Uspekhi
%D 1989
%J Phys. Usp.
%V 32
%N 9
%P 834-834
%U https://ufn.ru/en/articles/1989/9/i/
%U https://doi.org/10.1070/PU1989v032n09ABEH002763

Оригинал: Идлис Б Г «Физика и технология субмикронных структур» УФН 159 188–189 (1989); DOI: 10.3367/UFNr.0159.198909j.0188

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