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%0 Journal Article %T Physics and technology of submicron structures %A B. G. Idlis %I Physics-Uspekhi %D 1989 %J Phys. Usp. %V 32 %N 9 %P 834-834 %U https://ufn.ru/en/articles/1989/9/i/ %U https://doi.org/10.1070/PU1989v032n09ABEH002763
Оригинал: Идлис Б Г «Физика и технология субмикронных структур» УФН 159 188–189 (1989); DOI: 10.3367/UFNr.0159.198909j.0188