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1985

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February

  

Physics of our days


Some physical aspects of ion implantation


Lebedev Physical Institute, Russian Academy of Sciences, Leninsky prosp. 53, Moscow, 119991, Russian Federation
Text can be downloaded in Russian. English translation is available here.
PACS: 81.15.Cd, 68.55.Ln, 68.55.Nq, 78.55.−m, 78.60.Hk, 78.66.Jg (all)
DOI: 10.1070/PU1985v028n02ABEH003854
URL: https://ufn.ru/en/articles/1985/2/e/
Citation: Vavilov V S "Some physical aspects of ion implantation" Sov. Phys. Usp. 28 196–206 (1985)
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Оригинал: Вавилов В С «Некоторые физические аспекты ионной имплантации» УФН 145 329–346 (1985); DOI: 10.3367/UFNr.0145.198502e.0329

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