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1985

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February

  

Physics of our days


Some physical aspects of ion implantation


Lebedev Physical Institute, Russian Academy of Sciences, Leninsky prosp. 53, Moscow, 119991, Russian Federation
PACS: 81.15.Cd, 68.55.Ln, 68.55.Nq, 78.55.−m, 78.60.Hk, 78.66.Jg (all)
DOI: 10.1070/PU1985v028n02ABEH003854
URL: https://ufn.ru/en/articles/1985/2/e/
Citation: Vavilov V S "Some physical aspects of ion implantation" Sov. Phys. Usp. 28 196–206 (1985)
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Оригинал: Вавилов В С «Некоторые физические аспекты ионной имплантации» УФН 145 329–346 (1985); DOI: 10.3367/UFNr.0145.198502e.0329

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  4. Guseva M I, Koryukin V A, Obrezumov V P At Energy 72 167 (1992)
  5. Verner I V, Tsukanov V V Radiation Effects And Defects In Solids 111-112 461 (1989)
  6. Bychkov E A, Vlasov Yu G et al Journal Of Non-Crystalline Solids 113 203 (1989)

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