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Issue 11, 2024
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PACS numbers
81.15.Cd
Deposition by sputtering
V.S. Vavilov “
Some physical aspects of ion implantation
”
Sov. Phys. Usp.
28
196–206 (1985)
81.15.Cd
,
68.55.Ln
,
68.55.Nq
,
78.55.−m
,
78.60.Hk
,
78.66.Jg
(
all
)
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