PACS:85.40.Bh, 85.30.Tv (all) DOI:10.1070/PU1984v027n11ABEH004121 URL: https://ufn.ru/en/articles/1984/11/e/ Citation: Gulyaev Yu V, Sandomirskii V B, Sukhanov A A, Tkach Yu Ya "Physical limitations on miniaturization in microelectronics" Sov. Phys. Usp.27 868–880 (1984)