Physics of our days

Physical limitations on miniaturization in microelectronics

 a, , ,
a Kotel'nikov Institute of Radio Engineering and Electronics, Russian Academy of Sciences, ul. Mokhovaya 11, kor. 7, Moscow, 125009, Russian Federation
Text can be downloaded in Russian. English translation is available here.
PACS: 85.40.Bh, 85.30.Tv (all)
DOI: 10.1070/PU1984v027n11ABEH004121
Citation: Gulyaev Yu V, Sandomirskii V B, Sukhanov A A, Tkach Yu Ya "Physical limitations on miniaturization in microelectronics" Sov. Phys. Usp. 27 868–880 (1984)
BibTexBibNote ® (generic)BibNote ® (RIS) MedlineRefWorks
PT Journal Article
TI Physical limitations on miniaturization in microelectronics
AU Gulyaev Yu V
FAU Gulyaev YV
AU Sandomirskii V B
FAU Sandomirskii VB
AU Sukhanov A A
FAU Sukhanov AA
AU Tkach Yu Ya
FAU Tkach YY
DP 10 Nov, 1984
TA Phys. Usp.
VI 27
IP 11
PG 868-880
RX 10.1070/PU1984v027n11ABEH004121
SO Phys. Usp. 1984 Nov 10;27(11):868-880

Оригинал: Гуляев Ю В, Сандомирский В Б, Суханов А А, Ткач Ю Я «Физические ограничения минимальных размеров элементов современной микроэлектроники» УФН 144 475–495 (1984); DOI: 10.3367/UFNr.0144.198411e.0475

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