Physics of our days

Physical limitations on miniaturization in microelectronics

 a, , ,
a Kotel'nikov Institute of Radio Engineering and Electronics, Russian Academy of Sciences, ul. Mokhovaya 11, kor. 7, Moscow, 125009, Russian Federation
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PACS: 85.40.Bh, 85.30.Tv (all)
DOI: 10.1070/PU1984v027n11ABEH004121
Citation: Gulyaev Yu V, Sandomirskii V B, Sukhanov A A, Tkach Yu Ya "Physical limitations on miniaturization in microelectronics" Sov. Phys. Usp. 27 868–880 (1984)
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RT Journal
T1 Physical limitations on miniaturization in microelectronics
A1 Gulyaev,Yu.V.
A1 Sandomirskii,V.B.
A1 Sukhanov,A.A.
A1 Tkach,Yu.Ya.
PB Physics-Uspekhi
PY 1984
FD 10 Nov, 1984
JF Physics-Uspekhi
JO Phys. Usp.
VO 27
IS 11
SP 868-880
DO 10.1070/PU1984v027n11ABEH004121

Оригинал: Гуляев Ю В, Сандомирский В Б, Суханов А А, Ткач Ю Я «Физические ограничения минимальных размеров элементов современной микроэлектроники» УФН 144 475–495 (1984); DOI: 10.3367/UFNr.0144.198411e.0475

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