Physical limitations on miniaturization in microelectronics

Yu.V. Gulyaev^a, V.B. Sandomirskii, A.A. Sukhanov, Yu.Ya. Tkach
^aKotel'nikov Institute of Radio Engineering and Electronics, Russian Academy of Sciences, ul. Mokhovaya 11, kor. 7, Moscow, 125009, Russian Federation

Text can be downloaded in Russian. English translation is available here.

PACS: 85.40.Bh, 85.30.Tv (all)
DOI: 10.1070/PU1984v027n11ABEH004121
URL: https://ufn.ru/en/articles/1984/11/e/
Citation: Gulyaev Yu V, Sandomirskii V B, Sukhanov A A, Tkach Yu Ya "Physical limitations on miniaturization in microelectronics" Sov. Phys. Usp. 27 868–880 (1984)

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RT Journal
T1 Physical limitations on miniaturization in microelectronics
A1 Gulyaev,Yu.V.
A1 Sandomirskii,V.B.
A1 Sukhanov,A.A.
A1 Tkach,Yu.Ya.
PB Physics-Uspekhi
PY 1984
FD 10 Nov, 1984
JF Physics-Uspekhi
JO Phys. Usp.
VO 27
IS 11
SP 868-880
DO 10.1070/PU1984v027n11ABEH004121
LK https://ufn.ru/en/articles/1984/11/e/

Оригинал: Гуляев Ю В, Сандомирский В Б, Суханов А А, Ткач Ю Я «Физические ограничения минимальных размеров элементов современной микроэлектроники» УФН 144 475–495 (1984); DOI: 10.3367/UFNr.0144.198411e.0475