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Physical limitations on miniaturization in microelectronics

 a, , ,
a Kotel'nikov Institute of Radio Engineering and Electronics, Russian Academy of Sciences, ul. Mokhovaya 11, kor. 7, Moscow, 125009, Russian Federation
PACS: 85.40.Bh, 85.30.Tv (all)
DOI: 10.1070/PU1984v027n11ABEH004121
URL: https://ufn.ru/en/articles/1984/11/e/
Citation: Gulyaev Yu V, Sandomirskii V B, Sukhanov A A, Tkach Yu Ya "Physical limitations on miniaturization in microelectronics" Sov. Phys. Usp. 27 868–880 (1984)
BibTexBibNote ® (generic)BibNote ® (RIS)MedlineRefWorks
@article{Gulyaev:1984,
	author = {Yu. V. Gulyaev and V. B. Sandomirskii and A. A. Sukhanov and Yu. Ya. Tkach},
	title = {Physical limitations on miniaturization in microelectronics},
	publisher = {Physics-Uspekhi},
	year = {1984},
	journal = {Phys. Usp.},
	volume = {27},
	number = {11},
	pages = {868-880},
	url = {https://ufn.ru/en/articles/1984/11/e/},
	doi = {10.1070/PU1984v027n11ABEH004121}
}

Оригинал: Гуляев Ю В, Сандомирский В Б, Суханов А А, Ткач Ю Я «Физические ограничения минимальных размеров элементов современной микроэлектроники» УФН 144 475–495 (1984); DOI: 10.3367/UFNr.0144.198411e.0475

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