Functional principles, state of the art, and issues of multilayer X-ray optics are reviewed. Methods to optimize planar multilayer interference structures and multilayer diffraction gratings and their application in academic research and technology are discussed.

Keywords: multilayer systems, diffraction gratings, X-rays, X-ray optics, diffraction, interference, spectral resolution PACS: 07.85.−m, 41.50.+h, 42.79.Dj, 42.88.+h, 61.05.cp, 78.20.Bh, 78.67.Pt, 95.55.Ka (all) DOI: 10.3367/UFNe.2018.10.038439 URL: https://ufn.ru/en/articles/2019/11/a/ 000518757700001 2-s2.0-85083341825 Citation: Lider V V "Multilayer X-ray interference structures" Phys. Usp. 62 1063–1095 (2019) BibTexBibNote ® (generic)BibNote ® (RIS)MedlineRefWorks Received: 12th, July 2018, revised: 24th, September 2018, accepted: 4th, October 2018 Оригинал: Лидер В В «Многослойные рентгеновские интерференционные структуры» УФН 189 1137–1171 (2019); DOI: 10.3367/UFNr.2018.10.038439