Issues

 / 

2013

 / 

October

  

From the current literature


Transport mechanisms of electrons and holes in dielectric films

 a,  b
a Institute of Automation and Electrometry, Siberian Branch of the Russian Academy of Sciences, prosp. akad. Koptyuga 1, Novosibirsk, 630090, Russian Federation
b Rzhanov Institute of Semiconductor Physics, Siberian Branch of the Russian Academy of Sciences, prosp. Lavrent'eva 13, Novosibirsk, 630090, Russian Federation

Electron and hole transport mechanisms in amorphous silicon oxide, silicon nitride and aluminum oxide, dielectric materials of high relevance to silicon device technology, are reviewed. It is established that the widely accepted Frenkel model provides a formal description of transport in trap-containing insulators, but to obtain quantitative agreement, nonphysical model parameters should be introduced. It is shown that the multiphonon ionization of traps is a good model to consistently describe charge transport in insulators with traps.

Fulltext pdf (740 KB)
Fulltext is also available at DOI: 10.3367/UFNe.0183.201310h.1099
PACS: 72.20.Ht, 72.20.Jv, 72.80.Sk, 73.40.Sx (all)
DOI: 10.3367/UFNe.0183.201310h.1099
URL: https://ufn.ru/en/articles/2013/10/c/
000329313100003
2013PhyU...56..999N
Citation: Nasyrov K A, Gritsenko V A "Transport mechanisms of electrons and holes in dielectric films" Phys. Usp. 56 999–1012 (2013)
BibTexBibNote ® (generic)BibNote ® (RIS)MedlineRefWorks

Received: 4th, March 2013, 11th, June 2013

Оригинал: Насыров К А, Гриценко В А «Механизмы переноса электронов и дырок в диэлектрических плёнках» УФН 183 1099–1114 (2013); DOI: 10.3367/UFNr.0183.201310h.1099

References (80) ↓ Cited by (60) Similar articles (3)

  1. Gritsenko V A Usp. Fiz. Nauk 178 727 (2008); Gritsenko V A Phys. Usp. 51 699 (2008)
  2. Kingon A I, Maria J-P, Streiffer S K Nature 406 1032 (2000)
  3. Wilk G D, Wallace R M, Anthony J M J. Appl. Phys. 89 5243 (2001)
  4. Robertson J Eur. Phys. J. Appl. Phys. 28 265 (2004)
  5. Perevalov T V, Gritsenko V A Usp. Fiz. Nauk 180 587 (2010); Perevalov T V, Gritsenko V A Phys. Usp. 53 561 (2010)
  6. Roizin Y, Gritsenko V Dielectric Films For Advanced Microelectronics (Eds M Baklanov, M Green, K Maex) (Chichester: John Wiley & Sons, 2007) p. 251
  7. Nasyrov K A i dr. Zh. Eksp. Teor. Fiz. 129 926 (2006); Nasyrov K A et al. JETP 102 810 (2006)
  8. Gritsenko V A i dr. Dielektriki v Nanoelektronike (Otv. red. A L Aseev) (Novosibirsk: Izd-vo SO RAN, 2010)
  9. Lee C-H, Park K-C, Kim K Appl. Phys. Lett. 87 073510 (2005)
  10. Nasyrov K A, Shaimeev S S, Gritsenko V A Zh. Eksp. Teor. Fiz. 136 910 (2009); Nasyrov K A, Shaimeev S S, Gritsenko V A JETP 109 786 (2009)
  11. Goguenheim D et al. J. Non-Cryst. Solids 245 41 (1999)
  12. Endoh T et al. J. Appl. Phys. 86 2095 (1999)
  13. Maex K et al. J. Appl. Phys. 93 8793 (2003)
  14. Waser R, Aono M Nature Mater. 6 833 (2007)
  15. Strukov D B et al. Nature 453 80 (2008)
  16. Yang J J et al. Nature Nanotechnol. 3 429 (2008)
  17. Lee M-J et al. Nano Lett. 9 1476 (2009)
  18. Lee M-J et al. Adv. Functional Mater. 19 1587 (2009)
  19. Borghetti J et al. Nature 464 873 (2010)
  20. Goux L et al. Appl. Phys. Lett. 97 243509 (2010)
  21. Lee M-J et al. Nature Mater. 10 625 (2011)
  22. Shaposhnikov A V et al. Appl. Phys. Lett. 100 243506 (2012)
  23. Wang Z et al. Phys. Rev. B 85 195322 (2012)
  24. Pool H H Philos. Mag. 34 195 (1917)
  25. Frenkel’ Ya I Zh. Eksp. Teor. Fiz. 8 1292 (1938)
  26. Frenkel J Phys. Rev. 54 647 (1938)
  27. Sze S M Physics Of Semiconductor Devices (New York: Wiley, 1981)
  28. Yeh C-C et al. Appl. Phys. Lett. 91 113521 (2007)
  29. Zhu W J et al. IEEE Electron Dev. Lett. 23 97 (2002)
  30. Xu Z et al. Appl. Phys. Lett. 80 1975 (2002)
  31. Chim W K et al. J. Appl. Phys. 93 4788 (2003)
  32. Laha A, Krupanidhi S B J. Appl. Phys. 92 415 (2002)
  33. Ganichev S D et al. Phys. Rev. B 61 10361 (2000)
  34. Makram-Ebeid S, Lannoo M Phys. Rev. B 25 6406 (1982)
  35. Abakumov V N, Perel’ V I, Yasievich I N Bezyzluchatel’naya Rekombinatsiya v Poluprovodnikakh (SPb.: Izd-vo PIYaF, 1997); Abakumov V N, Perel V I, Yassievich I N Nonradiative Recombination In Semiconductors (Amsterdam: North-Holland, 1991)
  36. Hampton F L, Cricchi J R Appl. Phys. Lett. 35 802 (1979)
  37. Gritsenko V A, Meerson E E Mikroelektronika 12 580 (1983)
  38. Gritsenko V A Mikroelektronika 16 42 (1987)
  39. Gritsenko V A, Meerson E E, Morokov Yu N Phys. Rev. B 57 R2081 (1998)
  40. Nasyrov K A i dr. Pis’ma ZhETF 77 455 (2003); Nasyrov K A et al. JETP Lett. 77 385 (2003)
  41. Hielscher F H, Preier H M Solid-State Electron. 12 527 (1969)
  42. Quast W, Schiek B Electron. Lett. 5 485 (1969)
  43. Ginovker A S, Gritsenko V A, Sinitsa S P Mikroelektronika 2 283 (1973)
  44. Gritsenko V A, Meerson E E Phys. Status Solidi A 62 K131 (1980)
  45. Ginovker A S, Gritsenko V A, Sinitsa S P Phys. Status Solidi A 26 489 (1974)
  46. Fowler R H, Nordheim L Proc. R. Soc. Lond. A 119 173 (1928)
  47. Murphy E L, Good R H (Jr.) Phys. Rev. 102 1464 (1956)
  48. Lenzlinger M, Snow E H J. Appl. Phys. 40 278 (1969)
  49. Weinberg Z A, Johnson W C, Lampert M A J. Appl. Phys. 47 248 (1976)
  50. Petrin A B Zh. Eksp. Teor. Fiz. 136 369 (2009); Petrin A B JETP 109 314 (2009)
  51. Roberts G G, Polanco J I Phys. Status Solidi A 1 409 (1970)
  52. Jensen K L J. Appl. Phys. 102 024911 (2007)
  53. Houssa M et al. J. Appl. Phys. 87 8615 (2000)
  54. Nasyrov K A et al. J. Appl. Phys. 105 123709 (2009)
  55. Shklovskii B I, Efros A L Elektronnye Svoistva Legirovannykh Poluprovodnikov (M.: Nauka, 1979); Shklovskii B I, Efros A L Electronic Properties Of Doped Semiconductors (Berlin: Springer-Verlag, 1984)
  56. Vishnyakov A V et al. Solid-State Electron. 53 251 (2009)
  57. Hill R M Philos. Mag. 23 59 (1971)
  58. Ganichev S D, Yassievich I N, Prettl V Fiz. Tverd. Tela 39 1905 (1997); Ganichev S D, Prettl W, Yassievich I N Phys. Solid State 39 1703 (1997)
  59. Nasyrov K A, Gritsenko V A J. Appl. Phys. 109 093705 (2011)
  60. Nasyrov K A et al. IEEE Electron Dev. Lett. 23 336 (2002)
  61. Nasyrov K A et al. J. Appl. Phys. 96 4293 (2004)
  62. Gadiyak G V, Obrekht M A, Sinitsa S P Mikroelektronika 14 512 (1985)
  63. Svensson C M J. Appl. Phys. 48 329 (1977)
  64. Gritsenko V A, Meerson E E, Sinitsa S P Phys. Status Solidi A 48 31 (1978)
  65. Gritsenko V A Nitrid Kremniya v Elektronike (Otv. red. A V Rzhanov) (Novosibirsk: Nauka, 1982); Gritsenko V A "Electronic structure and optical properties of silicon nitride" Silicon Nitride In Electronics (Amsterdam: Elsevier, 1988) p. 138
  66. Gritsenko V A et al. Microelectron. Eng. 86 1866 (2009)
  67. Gritsenko V A Usp. Fiz. Nauk 182 531 (2012); Gritsenko V A Phys. Usp. 55 498 (2012)
  68. Park N-M et al. Phys. Rev. Lett. 86 1355 (2001)
  69. Park N-M, Kim T-S, Park S-J Appl. Phys. Lett. 78 2575 (2001)
  70. Gritsenko V A i dr. Zh. Eksp. Teor. Fiz. 125 868 (2004); Gritsenko V A et al. JETP 98 760 (2004)
  71. Voskoboinikov V V i dr. Mikroelektronika 5 369 (1976)
  72. Kolodzey J et al. IEEE Trans. Electron Dev. 47 121 (2000)
  73. Specht M et al. Appl. Phys. Lett. 84 3076 (2004)
  74. Ohta K, Hamano K Jpn. J. Appl. Phys. 11 546 (1972)
  75. Novikov Yu N, Gritsenko V A, Nasyrov K A Pis’ma ZhETF 89 599 (2009); Novikov Yu N, Gritsenko V A, Nasyrov K A JETP Lett. 89 506 (2009)
  76. Novikov Yu N et al. Microelectron. Reliability 50 207 (2010)
  77. Novikov Yu N, Gritsenko V A, Nasyrov K A Appl. Phys. Lett. 94 222904 (2009)
  78. Perevalov T V et al. J. Appl. Phys. 108 013501 (2010)
  79. Pustovarov V A i dr. Zh. Eksp. Teor. Fiz. 138 1119 (2010); Pustovarov V A et al. JETP 111 989 (2010)
  80. Pustovarov V A et al. Thin Solid Films 519 6319 (2011)

© 1918–2024 Uspekhi Fizicheskikh Nauk
Email: ufn@ufn.ru Editorial office contacts About the journal Terms and conditions