This paper reviews the current understanding of the selective removal of atoms (SRA), a technique that uses ion irradiation to controllably change the chemical composition and properties of polyatomic materials. The main effects involved and the possible mechanisms that govern the process are discussed. It is shown that SRA holds great promise for manufacturing functional nanoelements.

PACS: 79.20.Rf, 81.07.−b, 81.16.−c (all) DOI: 10.3367/UFNe.0179.200902d.0179 URL: https://ufn.ru/en/articles/2009/2/c/ 000267067000003 2-s2.0-68249138511 2009PhyU...52..165G Citation: Gurovich B A, Prikhod’ko K E "Physical mechanisms underlying the selective removal of atoms" Phys. Usp. 52 165–178 (2009) BibTexBibNote ® (generic)BibNote ® (RIS)MedlineRefWorks Оригинал: Гурович Б А, Приходько К Е «Физические механизмы, лежащие в основе процесса селективного удаления атомов» УФН 179 179–195 (2009); DOI: 10.3367/UFNr.0179.200902d.0179