PACS: 61.16.Ch, 68.35.−p, 78.50.-w DOI:10.1070/PU2000v043n05ABEH000756 URL: https://ufn.ru/en/articles/2000/5/j/ 000165080500009 Citation: Maslova N S, Panov V I, Savinov S V "Tunneling spectroscopy of the localized states of individual impurity atoms on a semiconductor surface" Phys. Usp.43 531–533 (2000)