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TY JOUR
TI Annealing of Ion-Implanted Layers Under the Action of Laser Radiation
AU Zaripov, M. M.
AU Khaybullin, I. B.
AU Shtyrkov, E. I.
PB Physics-Uspekhi
PY 1976
JO Physics-Uspekhi
JF Physics-Uspekhi
JA Phys. Usp.
VL 19
IS 12
SP 1032-1033
UR https://ufn.ru/en/articles/1976/12/j/
ER https://doi.org/10.1070/PU1976v019n12ABEH005380
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