PACS:01.10.Fv DOI:10.1070/PU1976v019n12ABEH005380 URL: https://ufn.ru/en/articles/1976/12/j/ Citation: Zaripov M M, Khaybullin I B, Shtyrkov E I "Annealing of Ion-Implanted Layers Under the Action of Laser Radiation" Sov. Phys. Usp.19 1032–1033 (1976)
%0 Journal Article
%T Annealing of Ion-Implanted Layers Under the Action of Laser Radiation
%A M. M. Zaripov
%A I. B. Khaybullin
%A E. I. Shtyrkov
%I Physics-Uspekhi
%D 1976
%J Phys. Usp.
%V 19
%N 12
%P 1032-1033
%U https://ufn.ru/en/articles/1976/12/j/
%U https://doi.org/10.1070/PU1976v019n12ABEH005380