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1976

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Annealing of Ion-Implanted Layers Under the Action of Laser Radiation

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Fulltext pdf (224 KB)
Fulltext is also available at DOI: 10.1070/PU1976v019n12ABEH005380
PACS: 01.10.Fv
DOI: 10.1070/PU1976v019n12ABEH005380
URL: https://ufn.ru/en/articles/1976/12/j/
Citation: Zaripov M M, Khaybullin I B, Shtyrkov E I "Annealing of Ion-Implanted Layers Under the Action of Laser Radiation" Sov. Phys. Usp. 19 1032–1033 (1976)
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Оригинал: Зарипов М М, Хайбуллин И Б, Штырков Е И «Отжиг ионно-легированных слоев под действием лазерного излучения» УФН 120 706–708 (1976); DOI: 10.3367/UFNr.0120.197612n.0706

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