Laser applications in nanotechnology: nanofabrication using laser ablation and laser nanolithography

The fact that nanoparticles and nanomaterials have fundamentally different properties both from their component atoms or molecules and from their bulk counterparts has stimulated a huge interest, both theoretical and practical, in nanoparticles and nanoparticle-based assemblies (functional materials), with the result that these structures have become a subject of explosive research over the last twenty years or so. A great deal of progress in this field has relied on the use of lasers. In this paper, the directions followed and results obtained in laser nanotechnology research are reviewed. The parameters, properties and applications of nanoparticles are discussed along with the physical and chemical methods for their fabrication and investigation. Nanofabrication applications of and fundamental physical principles behind laser ablation and laser nanolithography are discusses in detail. The applications of laser radiation are shown to range from fabricating, melting and evaporating nanoparticles, to changing their shape, structure, size and size distribution, to studying their dynamics and forming them into periodic arrays and various structures and assemblies. The historical development of research on nanoparticles and nanomaterials and the application of laser nanotechnology in various fields are briefly reviewed.

PACS: 36.40.−c, 42.62.Fi, 61.46.−w, 81.05.ue, 81.07.−b, 81.16.−c, 81.16.Nd (all)
DOI: 10.3367/UFNe.0183.201307a.0673
URL: https://ufn.ru/en/articles/2013/7/a/
Web of Science

000325716100001
Scopus

2-s2.0-84886049725
ADS NASA

2013PhyU...56..643M
Citation: Makarov G N "Laser applications in nanotechnology: nanofabrication using laser ablation and laser nanolithography" Phys. Usp. 56 643–682 (2013)

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Received: 25th, July 2012, revised: 17th, January 2013, accepted: 22nd, January 2013

Оригинал: Макаров Г Н «Применение лазеров в нанотехнологии: получение наночастиц и наноструктур методами лазерной абляции и лазерной нанолитографии» УФН 183 673–718 (2013); DOI: 10.3367/UFNr.0183.201307a.0673

References (529) Cited by (96) Similar articles (20) ↓

G.N. Makarov “Laser IR fragmentation of molecular clusters: the role of channels for energy input and relaxation, influence of surroundings, dynamics of fragmentation” Phys. Usp. 60 227–258 (2017)
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G.N. Makarov “Kinetic methods for measuring the temperature of clusters and nanoparticles in molecular beams” Phys. Usp. 54 351–370 (2011)
G.N. Makarov “Control of the parameters and composition of molecular and cluster beams by means of IR lasers” Phys. Usp. 61 617–644 (2018)
G.N. Makarov “The spectroscopy of clusters by intense pulses of VUV radiation from free electron lasers” Phys. Usp. 52 461–486 (2009)
P.B. Sorokin, L.A. Chernozatonskii “Graphene-based semiconductor nanostructures” Phys. Usp. 56 105–122 (2013)
A.V. Eletskii, I.M. Iskandarova et al “Graphene: fabrication methods and thermophysical properties” Phys. Usp. 54 227–258 (2011)
A.A. Ionin, S.I. Kudryashov, A.A. Samokhin “Material surface ablation produced by ultrashort laser pulses” Phys. Usp. 60 149–160 (2017)
G.N. Makarov “Low energy methods of molecular laser isotope separation” Phys. Usp. 58 670–700 (2015)
G.N. Makarov “Cluster temperature. Methods for its measurement and stabilization” Phys. Usp. 51 319–353 (2008)
P.V. Ratnikov, A.P. Silin “Two-dimensional graphene electronics: current status and prospects” Phys. Usp. 61 1139–1174 (2018)
M.V. Kharlamova “Electronic properties of pristine and modified single-walled carbon nanotubes” Phys. Usp. 56 1047–1073 (2013)
G.N. Makarov “Spectroscopy of single molecules and clusters inside helium nanodroplets. Microscopic manifestation of ⁴He superfluidity” Phys. Usp. 47 217–247 (2004)
B.M. Smirnov “Processes involving clusters and small particles in a buffer gas” Phys. Usp. 54 691–721 (2011)
A.V. Eletskii “Carbon nanotube-based electron field emitters” Phys. Usp. 53 863–892 (2010)
G.N. Makarov “Selective processes of IR excitation and dissociation of molecules in gasdynamically cooled jets and flows” Phys. Usp. 48 37–76 (2005)
V.I. Balykin “Plasmon nanolaser: current state and prospects” Phys. Usp. 61 846–870 (2018)
A.V. Eletskii, B.M. Smirnov “Fullerenes and carbon structures” Phys. Usp. 38 935–964 (1995)
M.V. Davidovich “Hyperbolic metamaterials: production, properties, applications, and prospects” Phys. Usp. 62 1173–1207 (2019)
V.P. Krainov, B.M. Smirnov, M.B. Smirnov “Femtosecond excitation of cluster beams” Phys. Usp. 50 907–931 (2007)

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