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Issues/1988/November |
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| Reviews of topical problems |
Inelastic sputtering of solids by ions
a Institute of Nuclear Fusion, Russian Research Centre Kurchatov Institute, pl. Kurchatova 46, Moscow, 123182, Russian Federation
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PACS: 68.49.Sf
DOI: URL: https://ufn.ru/en/articles/1988/11/c/ Citation: Baranov I A, Martynenko Yu V, Tsepelevich S O, Yavlinskii Yu N "Inelastic sputtering of solids by ions" Sov. Phys. Usp. 31 1015–1034 (1988) Оригинал: Баранов И А, Мартыненко Ю В, Цепелевич С О, Явлинский Ю Н «Неупругое распыление твердых тел ионами» УФН 156 477–511 (1988); |
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