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1988

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November

  

Reviews of topical problems


Inelastic sputtering of solids by ions

,  a, ,
a Institute ofNuclear Fusion, Russian Research Centre Kurchatov Institute, pl. Kurchatova 46, Moscow, 123182, Russian Federation
PACS: 68.49.Sf
DOI: 10.1070/PU1988v031n11ABEH005646
URL: https://ufn.ru/en/articles/1988/11/c/
Citation: Baranov I A, Martynenko Yu V, Tsepelevich S O, Yavlinskii Yu N "Inelastic sputtering of solids by ions" Sov. Phys. Usp. 31 1015–1034 (1988)
BibTex BibNote ® (generic)BibNote ® (RIS)MedlineRefWorks
%0 Journal Article
%T Inelastic sputtering of solids by ions
%A I. A. Baranov
%A Yu. V. Martynenko
%A S. O. Tsepelevich
%A Yu. N. Yavlinskii
%I Physics-Uspekhi
%D 1988
%J Phys. Usp.
%V 31
%N 11
%P 1015-1034
%U https://ufn.ru/en/articles/1988/11/c/
%U https://doi.org/10.1070/PU1988v031n11ABEH005646

:   ,   ,   ,    « » 156 477–511 (1988); DOI: 10.3367/UFNr.0156.198811c.0477

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