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Reviews of topical problems


Inelastic sputtering of solids by ions

,  a, ,
a Institute of Nuclear Fusion, Russian Research Centre Kurchatov Institute, pl. Kurchatova 46, Moscow, 123182, Russian Federation

A review is given of both theoretical and experimental investigations of the sputtering as a result of strong excitation of the electron subsystem of a solid by fast and multiply charged ions. A systematic account is given of the main experimentally established relationships governing inelastic sputtering. An analysis is made of the dependences of the inelastic sputtering coefficient on the energy and charge of the incident ions and on the target structure, and of the differential characteristics of the sputtered particles. Theoretical investigations of the electron-excitation region and its relaxation, of the transfer of the electron energy to the target atoms, and of the inelastic sputtering models are discussed. A brief account is given of the history of the topic, of possible practical applications of inelastic sputtering, and of its relationship to other phenomena.

Fulltext pdf (756 KB)
Fulltext is also available at DOI: 10.1070/PU1988v031n11ABEH005646
PACS: 68.49.Sf
DOI: 10.1070/PU1988v031n11ABEH005646
URL: https://ufn.ru/en/articles/1988/11/c/
Citation: Baranov I A, Martynenko Yu V, Tsepelevich S O, Yavlinskii Yu N "Inelastic sputtering of solids by ions" Sov. Phys. Usp. 31 1015–1034 (1988)
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Оригинал: Баранов И А, Мартыненко Ю В, Цепелевич С О, Явлинский Ю Н «Неупругое распыление твердых тел ионами» УФН 156 477–511 (1988); DOI: 10.3367/UFNr.0156.198811c.0477

References (106) Cited by (119) ↓ Similar articles (20)

  1. Shabelnikova Ya L, Suvorova E I Radiation Physics And Chemistry 229 112463 (2025)
  2. Semeniuk V F, Gabovich A M et al Journal of Applied Physics 138 (13) (2025)
  3. Medvedev N, Voronkov R, Volkov A E Nuclear Instruments And Methods In Physics Research Section B: Beam Interactions With Materials And Atoms 547 165218 (2024)
  4. Tsaturyan A, Kachan E et al Npj Comput Mater 10 (1) (2024)
  5. Lin Ju, Grygiel C et al Nuclear Instruments And Methods In Physics Research Section B: Beam Interactions With Materials And Atoms 556 165512 (2024)
  6. Liu Y, Han X et al Nanomaterials 12 (22) 4028 (2022)
  7. Xiao T P, Bennett Ch H et al IEEE Trans. Nucl. Sci. 69 (3) 406 (2022)
  8. Ghosh S, Karmakar P Nuclear Instruments And Methods In Physics Research Section B: Beam Interactions With Materials And Atoms 516 1 (2022)
  9. Wiss T, Benedetti A, De Bona E Comprehensive Nuclear Materials (2020) p. 125
  10. Lang M, Djurabekova F et al Comprehensive Nuclear Materials (2020) p. 485
  11. Frolova S V, Vlokh G V et al Phys. Atom. Nuclei 83 (8) 1200 (2020)
  12. Dalkarov O  D, Negodaev M  A et al Phys. Rev. Accel. Beams 22 (3) (2019)
  13. Komarov F F Uspekhi Fizicheskikh Nauk 187 (05) 465 (2017) [Komarov F F Phys.-Usp. 60 (5) 435 (2017)]
  14. Kazanskiy N L, Kolpakov V A et al Instrum Exp Tech 60 (5) 748 (2017)
  15. Dufour Ch, Toulemonde M Springer Series In Surface Sciences Vol. Ion Beam Modification of SolidsModels for the Description of Track Formation61 Chapter 2 (2016) p. 63
  16. Zhang K, Hu Zh et al Applied Surface Science 390 941 (2016)
  17. Khara G S, Murphy S T et al J. Phys.: Condens. Matter 28 (39) 395201 (2016)
  18. Wesch W, Schnohr C S Springer Series In Surface Sciences Vol. Ion Beam Modification of SolidsSwift Heavy Ion Irradiation of Crystalline Semiconductors61 Chapter 9 (2016) p. 365
  19. Melnikov S P, Sizov A N et al Lasers with Nuclear Pumping Chapter 10 (2015) p. 373
  20. Zhang J, Toulemonde M et al J. Mater. Res. 30 (16) 2456 (2015)
  21. Matveev V I, Makarov D N, Kapustin S N Tech. Phys. Lett. 41 (8) 771 (2015)
  22. Markidonov A V, Starostenkov M D et al Phys. Solid State 57 (8) 1551 (2015)
  23. Markidonov A V, Starostenkov M D, Poletaev G M Bull. Russ. Acad. Sci. Phys. 79 (9) 1089 (2015)
  24. Sall M, Monnet I et al J Mater Sci 50 (15) 5214 (2015)
  25. Yanin S N IOP Conf. Ser.: Mater. Sci. Eng. 81 012061 (2015)
  26. Martynenko Yu V, Korshunov S N, Skorlupkin I D Jetp Lett. 98 (12) 853 (2014)
  27. Ochedowski O, Osmani O et al Nat Commun 5 (1) (2014)
  28. Rethfeld B, Rämer A et al Nuclear Instruments And Methods In Physics Research Section B: Beam Interactions With Materials And Atoms 327 78 (2014)
  29. Nakajima K, Morita Y et al Nuclear Instruments And Methods In Physics Research Section B: Beam Interactions With Materials And Atoms 332 117 (2014)
  30. Osmani O, Medvedev N et al Nuclear Instruments And Methods In Physics Research Section B: Beam Interactions With Materials And Atoms 317 72 (2013)
  31. Li W, Rodriguez M D et al Nuclear Instruments And Methods In Physics Research Section B: Beam Interactions With Materials And Atoms 302 40 (2013)
  32. Yanin S 2012 7th International Forum on Strategic Technology (IFOST), (2012) p. 1
  33. Wiss T Comprehensive Nuclear Materials (2012) p. 465
  34. Toulemonde M, Assmann W et al Nuclear Instruments And Methods In Physics Research Section B: Beam Interactions With Materials And Atoms 277 28 (2012)
  35. Osmani O, Medvedev N et al Phys. Rev. B 84 (21) (2011)
  36. Osmani O, Medvedev N et al E-J. Surf. Sci. Nanotechnol. 8 278 (2010)
  37. Huang M, Schwen D, Averback R S Journal Of Nuclear Materials 399 (2-3) 175 (2010)
  38. Osmani O, Lebius H et al Laser Part. Beams 28 (2) 229 (2010)
  39. Didyk A Yu, Khalil A S Phys. Part. Nuclei 41 (2) 230 (2010)
  40. Medvedev N, Osmani O et al Nuclear Instruments And Methods In Physics Research Section B: Beam Interactions With Materials And Atoms 268 (19) 3160 (2010)
  41. Matveev V I, Kochkin S A J. Exp. Theor. Phys. 110 (4) 722 (2010)
  42. Medvedev N A, Volkov A E et al Phys. Rev. B 82 (12) (2010)
  43. Chettah A, Kucal H et al Nuclear Instruments And Methods In Physics Research Section B: Beam Interactions With Materials And Atoms 267 (16) 2719 (2009)
  44. Amirkhanov I V, Didyk A Yu et al J. Synch. Investig. 3 (3) 402 (2009)
  45. Akcöltekin E, Akcöltekin S et al New J. Phys. 10 (5) 053007 (2008)
  46. Amirkhanov I V, Didyk A Yu et al J. Synch. Investig. 2 (3) 331 (2008)
  47. Touboul A, Carvalho A et al Defects in Microelectronic Materials and Devices (2008)
  48. Meshakin V I, Budnik A P At Energy 103 (2) 605 (2007)
  49. Assmann W, Toulemonde M, Trautmann Ch Topics In Applied Physics Vol. Sputtering by Particle BombardmentElectronic Sputtering with Swift Heavy Ions110 Chapter 7 (2007) p. 401
  50. Amirkhanov I V, Cheblukov Yu N et al Phys. Part. Nuclei 37 (6) 837 (2006)
  51. Amirkhanov I V, Didyk A Yu et al Phys. Part. Nuclei Lett. 3 (1) 37 (2006)
  52. Amirkhanov I V, Didyk A Yu et al Phys. Part. Nuclei Lett. 3 (5) 320 (2006)
  53. Kamarou A, Wesch W et al Phys. Rev. B 73 (18) (2006)
  54. Amirkhanov I V, Didyk A Yu et al Crystallogr. Rep. 51 (S1) S32 (2006)
  55. Skuratov V A, Zinkle S J et al Surface And Coatings Technology 196 (1-3) 56 (2005)
  56. Meftah A, Costantini J M et al Nuclear Instruments And Methods In Physics Research Section B: Beam Interactions With Materials And Atoms 237 (3-4) 563 (2005)
  57. Baranov I, Kirillov S et al Nuclear Instruments And Methods In Physics Research Section B: Beam Interactions With Materials And Atoms 230 (1-4) 495 (2005)
  58. Matveev V I, Kochkin S A Tech. Phys. 49 (3) 345 (2004)
  59. Matveev V I, Kochkin S A Russian Physics Journal 47 (3) 235 (2004)
  60. Komarov F F Uspekhi Fizicheskikh Nauk 173 (12) 1287 (2003)
  61. Matveev V I, Kochkin S A Tech. Phys. Lett. 29 (12) 1048 (2003)
  62. Sorokin M V, Volkov A E Nuclear Instruments And Methods In Physics Research Section B: Beam Interactions With Materials And Atoms 205 746 (2003)
  63. Ghosh S, Avasthi D K et al Nuclear Instruments And Methods In Physics Research Section B: Beam Interactions With Materials And Atoms 212 431 (2003)
  64. Mieskes H D, Assmann W et al Phys. Rev. B 67 (15) (2003)
  65. Volkov A E, Korolev D N Nuclear Instruments And Methods In Physics Research Section B: Beam Interactions With Materials And Atoms 209 98 (2003)
  66. Volkov A E, Sorokin M V Nuclear Instruments And Methods In Physics Research Section B: Beam Interactions With Materials And Atoms 209 184 (2003)
  67. Awazu K, Kawazoe H Journal of Applied Physics 94 (10) 6243 (2003)
  68. Toulemonde M, Assmann W et al Nuclear Instruments And Methods In Physics Research Section B: Beam Interactions With Materials And Atoms 212 346 (2003)
  69. Matveev V I, Karpova O V Russian Physics Journal 45 (6) 539 (2002)
  70. Baranov I, Håkansson P et al Nuclear Instruments And Methods In Physics Research Section B: Beam Interactions With Materials And Atoms 193 (1-4) 798 (2002)
  71. Miterev A M Uspekhi Fizicheskikh Nauk 172 (10) 1131 (2002)
  72. Baranov I, Brunelle A et al Nuclear Instruments And Methods In Physics Research Section B: Beam Interactions With Materials And Atoms 187 (4) 451 (2002)
  73. Volkov A E Nuclear Instruments And Methods In Physics Research Section B: Beam Interactions With Materials And Atoms 193 (1-4) 376 (2002)
  74. Matveev V I Tech. Phys. 47 (6) 767 (2002)
  75. Bringa E M, Johnson R E Nuclear Instruments And Methods In Physics Research Section B: Beam Interactions With Materials And Atoms 193 (1-4) 365 (2002)
  76. Toulemonde M, Assmann W et al Phys. Rev. Lett. 88 (5) (2002)
  77. Ronchi C, Wiss T Journal of Applied Physics 92 (10) 5837 (2002)
  78. Volkov A E, Borodin V A Nuclear Instruments And Methods In Physics Research Section B: Beam Interactions With Materials And Atoms 193 (1-4) 381 (2002)
  79. Kissel R, Urbassek H M International Journal Of Mass Spectrometry 208 (1-3) 29 (2001)
  80. Matveev V I Tech. Phys. Lett. 27 (9) 761 (2001)
  81. Baranov I, Kirillov S et al Nuclear Instruments And Methods In Physics Research Section B: Beam Interactions With Materials And Atoms 183 (3-4) 232 (2001)
  82. Ghosh S, Tripathi A et al Radiation Effects And Defects In Solids 154 (2) 151 (2001)
  83. Kuanyshev V T, Belykh T A et al Radiation Measurements 33 (5) 503 (2001)
  84. Kissel R, Urbassek H M Nuclear Instruments And Methods In Physics Research Section B: Beam Interactions With Materials And Atoms 180 (1-4) 293 (2001)
  85. Toulemonde M, Dufour Ch et al Nuclear Instruments And Methods In Physics Research Section B: Beam Interactions With Materials And Atoms 166-167 903 (2000)
  86. Berthelot A, Gourbilleau F et al Nuclear Instruments And Methods In Physics Research Section B: Beam Interactions With Materials And Atoms 166-167 927 (2000)
  87. Berthelot A, Hémon S et al Philosophical Magazine A 80 (10) 2257 (2000)
  88. Yavlinskii Yu N Nuclear Instruments And Methods In Physics Research Section B: Beam Interactions With Materials And Atoms 166-167 35 (2000)
  89. Matveev V I Tech. Phys. 45 (8) 1063 (2000)
  90. Pereira J A M, da Silveira E F Phys. Rev. Lett. 84 (25) 5904 (2000)
  91. Davydov S Yu Tech. Phys. 44 (5) 584 (1999)
  92. Akap’ev G I, Balabaev A N et al Tech. Phys. 43 (1) 120 (1998)
  93. Bouffard S, Duraud J P et al Nuclear Instruments And Methods In Physics Research Section B: Beam Interactions With Materials And Atoms 141 (1-4) 372 (1998)
  94. Volkov A E, Borodin V A Nuclear Instruments And Methods In Physics Research Section B: Beam Interactions With Materials And Atoms 146 (1-4) 137 (1998)
  95. Meftah A, Djebara M et al Nuclear Instruments And Methods In Physics Research Section B: Beam Interactions With Materials And Atoms 146 (1-4) 431 (1998)
  96. Baranov I, Bogdanov S et al Nuclear Instruments And Methods In Physics Research Section B: Beam Interactions With Materials And Atoms 122 (3) 329 (1997)
  97. Wiss T, Matzke H et al Nuclear Instruments And Methods In Physics Research Section B: Beam Interactions With Materials And Atoms 122 (3) 583 (1997)
  98. Meftah A, Costantini J M et al Nuclear Instruments And Methods In Physics Research Section B: Beam Interactions With Materials And Atoms 122 (3) 470 (1997)
  99. Miotello A, Kelly R Nuclear Instruments And Methods In Physics Research Section B: Beam Interactions With Materials And Atoms 122 (3) 458 (1997)
  100. Toulemonde M, Costantini J M et al Nuclear Instruments And Methods In Physics Research Section B: Beam Interactions With Materials And Atoms 116 (1-4) 37 (1996)
  101. Martynenko Yu V Nuclear Instruments And Methods In Physics Research Section B: Beam Interactions With Materials And Atoms 115 (1-4) 515 (1996)
  102. Gutzmann A, Klaumünzer S, Meier P Phys. Rev. Lett. 74 (12) 2256 (1995)
  103. Szenes G Phys. Rev. B 52 (9) 6154 (1995)
  104. Ryazanov A I, Volkov A E, Klaumünzer S Phys. Rev. B 51 (18) 12107 (1995)
  105. Didyk A Yu, Varichenko V S Radiation Measurements 25 (1-4) 119 (1995)
  106. Komarov F F Russ Phys J 37 (5) 423 (1994)
  107. Yassievich I N Semicond. Sci. Technol. 9 (8) 1433 (1994)
  108. Meftah A, Brisard F et al Phys. Rev. B 49 (18) 12457 (1994)
  109. Yavlinskii Yu N Nuclear Instruments And Methods In Physics Research Section B: Beam Interactions With Materials And Atoms 90 (1-4) 96 (1994)
  110. Martynenko Yu V, Umansky M V Radiation Effects And Defects In Solids 132 (1) 31 (1994)
  111. Lesueur D, Dunlop A Radiation Effects And Defects In Solids 126 (1-4) 163 (1993)
  112. Katin V V, Martynenko Yu V, Yavlinskii Yu N Radiation Effects And Defects In Solids 124 (2) 187 (1992)
  113. Vorobyova I V, Monastyrenko V E, Ter-Ovanesyan E A International Journal Of Radiation Applications And Instrumentation. Part D. Nuclear Tracks And Radiation Measurements 20 (2) 327 (1992)
  114. Baranov I, Kozlov B et al Clustering Phenomena in Atoms and Nuclei Springer Series In Nuclear And Particle Physics Chapter 53 (1992) p. 435
  115. Drapchinsky L V, Soloviev S M Nuclear Instruments And Methods In Physics Research Section A: Accelerators, Spectrometers, Detectors And Associated Equipment 303 (1) 19 (1991)
  116. Johnson R E, Pospieszalska M, Brown W L Phys. Rev. B 44 (14) 7263 (1991)
  117. Karamyan S A International Journal Of Radiation Applications And Instrumentation. Part D. Nuclear Tracks And Radiation Measurements 18 (4) 365 (1991)
  118. Baranov I A, Obnorskii V V, Tsepelevich S O Nuclear Instruments And Methods In Physics Research Section B: Beam Interactions With Materials And Atoms 52 (1) 9 (1990)
  119. Karamyan S A Nuclear Instruments And Methods In Physics Research Section B: Beam Interactions With Materials And Atoms 51 (4) 354 (1990)
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