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Reviews of topical problems


Inelastic sputtering of solids by ions

,  a, ,
a Institute of Nuclear Fusion, Russian Research Centre Kurchatov Institute, pl. Kurchatova 46, Moscow, 123182, Russian Federation

A review is given of both theoretical and experimental investigations of the sputtering as a result of strong excitation of the electron subsystem of a solid by fast and multiply charged ions. A systematic account is given of the main experimentally established relationships governing inelastic sputtering. An analysis is made of the dependences of the inelastic sputtering coefficient on the energy and charge of the incident ions and on the target structure, and of the differential characteristics of the sputtered particles. Theoretical investigations of the electron-excitation region and its relaxation, of the transfer of the electron energy to the target atoms, and of the inelastic sputtering models are discussed. A brief account is given of the history of the topic, of possible practical applications of inelastic sputtering, and of its relationship to other phenomena.

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Fulltext is also available at DOI: 10.1070/PU1988v031n11ABEH005646
PACS: 68.49.Sf
DOI: 10.1070/PU1988v031n11ABEH005646
URL: https://ufn.ru/en/articles/1988/11/c/
Citation: Baranov I A, Martynenko Yu V, Tsepelevich S O, Yavlinskii Yu N "Inelastic sputtering of solids by ions" Sov. Phys. Usp. 31 1015–1034 (1988)
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Оригинал: Баранов И А, Мартыненко Ю В, Цепелевич С О, Явлинский Ю Н «Неупругое распыление твердых тел ионами» УФН 156 477–511 (1988); DOI: 10.3367/UFNr.0156.198811c.0477

References (106) ↓ Cited by (116) Similar articles (20)

  1. R. Behrisch (ed.) Sputtering By Particle Bombardment. I (Springer Verlag, Berlin, 1981); R. Behrisch (ed.) Topics In Applied Physics Vol. Vol. 47; Russ. transl., R. Behrisch (ed.) Sputtering By Particle Bombardment (Mir, M., 1984)
  2. B. M. Aleksandrov, I. A. Baranov, A. S. Krivokhatski&ibreve;, and G. A. Tutin At. Energ. 33 821 (1972); B. M. Aleksandrov, I. A. Baranov, A. S. Krivokhatski&ibreve;, and G. A. Tutin Sov. At. Energ. 33 941 (1972)
  3. B. M. Aleksandrov, N. V. Babadzhanyants, I. A. Baranov, A. S. Krivokhatski&ibreve;, L. M. Krizhanski&ibreve;, and V. V. Obnorski&ibreve; Preprint No. RI-24 [in Russian] (Khlopin Radium Institute, Academy of Sciences of the USSR, Leningrad, 1974)
  4. F. S. Lapteva and B. V. Ershler At. Energ. 1 (No. 4) 63 (1956); F. S. Lapteva and B. V. Ershler Sov. J. At. Energ. 1 513 (1956)
  5. T. U. Arifov, E. K. Vasil’eva, D. D. Grinch, S. F. Kovalenko, and S. M. Morozov Izv. Akad. Nauk SSSR Ser. Fiz. 40 2621 (1976); T. U. Arifov, E. K. Vasil’eva, D. D. Grinch, S. F. Kovalenko, and S. M. Morozov Bull Acad. Sci. USSR Ser. Fiz. 40 (No. 12) 150 (1976)
  6. T. U. Arifov, D. D. Grinch, and S. M. Morozov Proc. Fifth All-Union Conf. on Interaction of Atomic Particles with Solids [in Russian], Part 1 (Radio Engineering Institute, Minsk, 1978) p. 200
  7. V. L. Auslender, I. A. Baranov, B. N. Belyaev, et al Preprint No. RI-56 (1976), [in Russian], Khlopin Radium Institute, Academy of Sciences of the USSR, Leningrad
  8. R. Behrisch (ed.) Sputtering By Particle Bombardment II (Springer Verlag, Berlin, 1983); R. Behrisch (ed.) Topics In Applied Physics Vol. Vol. 52 (Russ. transl., Mir, M., 1986) p. 198
  9. B. A. Trubnikov and Yu. N. Yavlinski&ibreve; Zh. Eksp. Teor. Fiz. 48 253 (1965); B. A. Trubnikov and Yu. N. Yavlinski&ibreve; Sov. Phys. JETP 21 167 (1965)
  10. Yu. V. Martynenko and Yu. N. Yavlinski&ibreve; At. Energ. 62 80 (1987); Yu. V. Martynenko and Yu. N. Yavlinski&ibreve; Sov. At. Energ. 62 93 (1987)
  11. A. A. Dorozhkin and N. N. Petrov Ion Auger Spectroscopy [in Russian] (Kalinin Polytechnic Institute, Leningrad, 1983)
  12. I. G. Kaplan and A. M. Miterev Dokl. Akad. Nauk SSSR 280 127 (1985); I. G. Kaplan and A. M. Miterev Dokl. Phys. Chem. (1985)
  13. I. A. Baranov and V. V. Obnorski&ibreve; Vopr. At. Nauki Tekh. Ser. Fiz. Radiats. PovrezhdeniT Radiats. Materialoved. (No. 5 (28)) 50 (1983), [in Russian]
  14. I. A. Baranov and V. V. Obnorski&ibreve; Problems In Materials Science Of The Thermal Power Equipment Of Atomic Power Stations [in Russian] (Kalinin Polytechnic Institute, Leningrad, 1984) p. 33
  15. S. O. Tsepelevich and I. A. Baranov Abstracts of Papers presented at Thirty-Seventh Conf. on Nuclear Spectroscopy and Structure, Leningrad (1987); in Russian, S. O. Tsepelevich and I. A. Baranov Abstracts of Papers presented at Thirty-Seventh Conf. on Nuclear Spectroscopy and Structure, Leningrad (Nauka, L., 1987) p. 594
  16. J. E. Griffith, R. A. Weller, L. E. Seiberling, and T. A. Tombrello Radiat. Eff. 51 223 (1980)
  17. L. E. Seiberling, C. K. Meins, B. H. Cooper, J. E. Griffith, M. H. Mendenhall, and T. A. Tombrello Nucl. Instrum. Methods Phys. Res. 198 17 (1982)
  18. P. Hakansson and B. Sundqvist Radiat. Eff. 61 179 (1982)
  19. P. Hakansson, I. Kamensky, and B. Sundqvist Nucl. Instrum. Methds Phys. Res. 198 43 (1982)
  20. W. Knippelberg, O. Becker, and K. Wien Nucl. Instrum. Methods Phys. Res. 198 59 (1982)
  21. A. Albers, K. Wien, P. Duck, W. Treu, and H. Voit Nucl. Instrum. Methods Phys. Res. 198 69 (1982)
  22. O. Becker, S. Della-Negra, Y. Le Beyec, and K. Wien Nucl. Instrum. Methods Phys. Res. Sect. B 16 321 (1986)
  23. B. B. Cooper and T. A. Tombrello Radiat. Eff. 80 203 (1984)
  24. J. Bottiger, J. A. Davies, J. L’Ecuyer, N. Matsunami, and R. Ollerhead Radiat. Eff. 49 119 (1980)
  25. R. W. Ollerhead, J. Bottiger, J. A. Davies, J. L’Ecuyer, and H. K. Haugen Radiat. Eff. 49 203 (1980)
  26. W. L. Brown, W. M. Augustyniak, E. Simmons, K. J. Marcantonio, L. J. Lanzerotti, R. E. Johnson, J. W. Boring, C. T. Reimann, G. Foti, and V. Pirronello Nucl. Instrum. Methods Phys. Res. 198 1 (1982)
  27. W. L. Brown, L. J. Lanzerotti, K. J. Marcantonio, R. E. Johnson, and C. T. Reimann Nucl. Instrum. Methods Phys. Res. Sect. B 14 392 (1986)
  28. F. Besenbacher, J. Bottiger, O. Graversen, J. Hansen, and H. Sorensen Nucl. Instrum. Methods Phys. Res. 191 221 (1981)
  29. I. G. Kaplan and A. M. Miterev Khim. Vys. Energ. 19 208 (1985); I. G. Kaplan and A. M. Miterev High Energy Chem. (USSR) 19 165 (1985)
  30. P. Duck, H. Fröhlich, N. Bischof, and H. Voit Nucl. Instrum. Methods Phys. Res. 198 39 (1982)
  31. B. Nees, E. Nieschler, N. Bischof, P. Duck, H. Fröhlich, W. Tiereth, and H. Voit Radiat. Eff. 77 89 (1983)
  32. E. Nieschler, B. Nees, N. Bischof, H. Fröhlich, W. Tiereth, and H. Voit Radiat. Eff. 83 121 (1984)
  33. P. Hakansson, I. Kamensky, and B. Sundqvist Surf. Sci. 116 302 (1982)
  34. C. K. Meins, J. E. Griffith, Y. Qiu, M. H. Mendenhall, L. E. Seiberling, and T. A. Tombrello Radiat. Eff. 71 13 (1983)
  35. I. A. Baranov, A. S. Krivokhatski&ibreve;, and V. V. Obnorski&ibreve; Zh. Tekh. Fiz. 51 2457 (1981); I. A. Baranov, A. S. Krivokhatski&ibreve;, and V. V. Obnorski&ibreve; Sov. Phys. Tech. Phys. 26 1455 (1981)
  36. I. A. Baranov and V. V. Obnorski&ibreve; Vopr. At. Nauki Tekh. Ser. Fiz. Radiats. Povrezhdenii Radiats. Materialoved. No. 5 ((19)) 35 (1981)
  37. M. D. Rogers J. Nucl. Mater. 15 65 (1965); M. D. Rogers J. Nucl. Mater. 16 298 (1965)
  38. G. Nilsson J. Nucl. Mater. 20 215 (1966)
  39. M. D. Rogers J. Nucl. Mater. 22 103 (1967)
  40. B. M. Aleksandrov, I. A. Baranov, N. V. Babadzhanyants, A. S. Krivokhatski&ibreve;, and V. V. Obnorski&ibreve; At. Energ. 41 417 (1976); B. M. Aleksandrov, I. A. Baranov, N. V. Babadzhanyants, A. S. Krivokhatski&ibreve;, and V. V. Obnorski&ibreve; Sov. At. Energ. 41 1072 (1976)
  41. I. A. Baranov and V.V. Obnorski&ibreve; At. Energ. 54 184 (1983); I. A. Baranov and V.V. Obnorski&ibreve; Sov. At. Energ. 54 192 (1983)
  42. I. A. Baranov and V. V. Obnorski&ibreve; Radiat. Eff. 79 1 (1983)
  43. S. O. Tsepelevich, I. A. Baranov, V. V. Obnorski&ibreve;, and B. M. Aleksandrov Abstracts of Papers presented at Thirty-Sixth Conf. on Nuclear Spectroscopy and Structure, Leningrad (1986); [in Russian], S. O. Tsepelevich, I. A. Baranov, V. V. Obnorski&ibreve;, and B. M. Aleksandrov Abstracts of Papers presented at Thirty-Sixth Conf. on Nuclear Spectroscopy and Structure, Leningrad (Nauka, Leningrad, 1986) p. 402
  44. B. M. Aleksandrov, N. V. Babadzhanyants, I. A. Baranov, A. S. Krivokhatski&ibreve;, L. M. Krizhanski&ibreve;, and G. A. Tutin At. Energ. 36 139 (1974); B. M. Aleksandrov, N. V. Babadzhanyants, I. A. Baranov, A. S. Krivokhatski&ibreve;, L. M. Krizhanski&ibreve;, and G. A. Tutin Sov. At. Energ. 36 171 (1974)
  45. B. M. Aleksandrov, N. V. Babadzhanyants, I. A. Baranov, A. S. Kriokhatski&ibreve;, V. V. Obnorski&ibreve;, and G. A. Firsanov Preprint No. RI-25 [in Russian] (Khlopin Radium Institute, Academy of Sciences of the USSR, Leningrad, 1974)
  46. B. M. Aleksandrov, I. A. Baranov, N. V. Babadzhanvants, A. S. Krivokhatski&ibreve;, V. V. Obnorski&ibreve;, and G. A. Firsanov Preprint No. RI-33 ([in Russian], Khlopin Radium Institute, Academy of Sciences of the USSR, Leningrad, 1975)
  47. B. M. Aleksandrov, I. A. Baranov, A. S. Krivokhatski&ibreve;, and G. A. Tutin Prikl. Yad. Fiz. No. 4 36 (1974)
  48. V. A. Bessonov, G. P. Ivanov, N. A. Grinevich, and E. A. Borisov At. Energ. 40 395 (1976); V. A. Bessonov, G. P. Ivanov, N. A. Grinevich, and E. A. Borisov Sov. At. Energ. 40 477 (1976)
  49. G. P. Ivanov, V. A. Bessonov, N. A. Grinevich, V. A. Popovichev, and E. A. Borisov At. Energ. 47 15 (1979); G. P. Ivanov, V. A. Bessonov, N. A. Grinevich, V. A. Popovichev, and E. A. Borisov Sov. At. Energ. 47 516 (1979)
  50. J. P. Biersack and E. Santner Nucl. Instrum. Methods Phys. Res. 198 29 (1982)
  51. D. Fink, J. P. Biersack, M. Stadele, K. Tjan, R. A. Haring, and A. E. de Vries Nucl. Instrum. Methods Phys. Res. Sect. B 229 275 (1984)
  52. W. L. Brown, L. J. Lanzerotti, J. M. Poate, and W. M. Augustyniak Phys. Rev. Lett. 40 1027 (1978)
  53. J. P. Biersack and E. Santner Nucl. Instrum. Methods 132 229 (1976)
  54. R. Kelly Nov. Fiz. Tverd. Tela (No. 10) 194 (1980)
  55. I. V. Vorob’eva, Ya. E. Geguzin, and V. E. Monastyrenko Poverkhnost (No. 4) 141 (1986); I. V. Vorob’eva, Ya. E. Geguzin, and V. E. Monastyrenko Phys. Chem. Mech. Surf. (1986)
  56. D. F. Torgerson, R. P. Skowronski, and R. D. Macfarlane Biochem. Biophys. Res. Commun. 60 616 (1974)
  57. R. D. Macfarlane and D. F. Torgerson Science 191 920 (1976)
  58. B. Sundqvist Nucl. Instrum. Methods Phys. Res. 218 267 (1983)
  59. P. Hakansson, I. Kamensky, M. Salehpour, B. Sundqvist, and S. Widdiyasekera Radiat. Eff. 80 141 (1984)
  60. L. E. Seiberling, J. E. Griffith, and T. A. Tombrello Radiat. Eff. 52 201 (1980)
  61. O. Becker and K. Wien Nucl. Instrum. Methods Phys. Res. Sect. B 16 456 (1956)
  62. N. Furstenau, W. Knippelberg, F. R. Krueger, G. Weiss, and K. Wien Z. Naturforsch. Teil A 32 711 (1977)
  63. S. A. Nepi&ibreve;ko Physical Properties Of Small Metal Particles [in Russian] (Naukova Dumka, Kiev, 1985) p. 146
  64. C. C. Watson and T. A. Tombrello Radiat. Eff. 89 263 (1985)
  65. S. A. Nepi&ibreve;ko Physical Properties Of Small Metal Particles [in Russian] (Naukova Dumka, Kiev, 1985) p. 146
  66. C. C. Watson and T. A. Tombrello Radiat. Eff. 89 263 (1985)
  67. A. M. Miterev, I. G. Kaplan, and E. A. Borisov Khim. Vys. Energ. 8 537 (1974); A. M. Miterev, I. G. Kaplan, and E. A. Borisov High Energy Chem. (USSR) 8 461 (1974)
  68. Yu V. Martynenko and Yu. N. Yavlinski&ibreve; Dokl. Akad. Nauk SSSR 270 88 (1983); Yu V. Martynenko and Yu. N. Yavlinski&ibreve; Sov. Phys. Dokl. 28 391 (1983)
  69. R. L. Platzman Radiat. Res. 17 419 (1962)
  70. T. A. Tombrello Nucl. Instrum. Methods Phys. Res. Sect. B 229 23 (1984)
  71. R. L. Fleischer, P. B. Price, and R. M. Walker J. Appl. Phys. 36 3645 (1965)
  72. R. Ritchie and C. Claussen Nucl. Instrum. Methods Phys. Res. 198 133 (1982)
  73. E. S. Parilis Proc. Intern. Conf. on Atomic Collision Phenomena in Solids (Brighton, England, 1969); Spubl. by, E. S. Parilis Proc. Intern. Conf. on Atomic Collision Phenomena in Solids (North-Holland, Amsterdam, 1970) p. 324
  74. I. S. Bitenski&ibreve;, M. N. Murakhmetov, and E. S. Parilis Zh. Tekh. Fiz. 49 1044 (1979); I. S. Bitenski&ibreve;, M. N. Murakhmetov, and E. S. Parilis Sov. Phys. Tech. Phys. 24 618 (1979)
  75. P. K. Haff Appl. Phys. Lett. 29 473 (1976)
  76. V. M. Agranovich, D. K. Daukeev, S. Ya. Lebedev, and E. Ya. Mikhlin Zh. Eksp. Teor. Fiz. 61 1511 (1971); V. M. Agranovich, D. K. Daukeev, S. Ya. Lebedev, and E. Ya. Mikhlin Sov. Phys. JETP 34 805 (1972)
  77. I. M. Lifshitz, M. I. Kaganov, and L. V. Tanatarov At. Energ. 6 391 (1959)
  78. V. L. Ginzburg and V. P. Shabanski&ibreve; Dokl. Akad. Nauk SSSR 100 445 (1955)
  79. M. I. Kaganov, I. M. Lifshitz, and L. V. Tanatarov Zh. Eksp. Teor. Fiz. 31 232 (1956); M. I. Kaganov, I. M. Lifshitz, and L. V. Tanatarov Sov. Phys. JETP 4 173 (1957)
  80. L. T. Chadderton, D. V. Morgan, I. McC. Torrens, and D. van Vliet Philos. Mag. 13 185 (1966)
  81. A. A. Davydov and A. I. Kalinichenko Vopr. At. Nauki Tekh. Ser. Fiz. Radiats. Povrezhdeni&ibreve; Radiats. Materialoved. (No. 3(36)) 27 (1985)
  82. Ya. E. Geguzin, M. I. Kaganov, and I. M. Lifshits Fiz. Tverd. Tela (Leningrad) 15 2425 (1973); Ya. E. Geguzin, M. I. Kaganov, and I. M. Lifshits Sov. Phys. Solid State 15 1612 (1974)
  83. L. N. Dobretsov and M. V. Gomoyumova Emission Electronics [in Russian] (Nauka, M., 1966)
  84. I. S. Bitenski&ibreve; At. Energ. 49 232 (1980); I. S. Bitenski&ibreve; Sov. At. Energ. 49 682 (1980)
  85. V. V. Katin, Yu. V. Martynenko, and Yu. N. Yavlinski&ibreve; Pis’ma Zh. Tekh. Fiz. 13 665 (1987); V. V. Katin, Yu. V. Martynenko, and Yu. N. Yavlinski&ibreve; Sov. Tech. Phys. Lett. 13 276 (1987)
  86. Yu. V. Martynenko and Yu. N. Yavlinski&ibreve; Preprint No. 4084/11 [in Russian] (Institute of Atomic Energy, M., 1985)
  87. R. L. Fleisher, P. Price and R. Walker Nuclear Tracks In Solids (University of California Press, Los Angeles., 1975)
  88. K. O. Legg, R. Whaley, and E. W. Thomas Surf. Sci. 109 11 (1981)
  89. I. V. Vorob’eva, Ya. E. Geguzin, and V. E. Monastyrenko Fiz. Tverd. Tela (Leningrad) 28 163 (1986); I. V. Vorob’eva, Ya. E. Geguzin, and V. E. Monastyrenko Sov. Phys. Solid State 28 88 (1986)
  90. I. V. Vorob’eva, Ya. E. Geguzin, and V. E. Monastyrenko Izv. Akad, Nauk SSSR Ser. Fiz. 50 1597 (1986); I. V. Vorob’eva, Ya. E. Geguzin, and V. E. Monastyrenko Bull. Acad. Sci. USSR Ser. Fiz. 50 (No. 8) 134 (1986)
  91. I. P. Borin Fiz. Tverd. Tela (Leningrad) 20 2222 (1978); I. P. Borin Sov. Phys. Solid State 20 1284 (1978)
  92. G. Leibfried ""Gittertheorie der mechanischen und thermischen Eigenschaften der Kristalle"" Handbuch Der Physik Vol. Vol. 7 (ed. by S. Flügge) (Springer Verlag, Berlin, 1955) p. 104–324, Part 1; Russ. transl., G. Leibfried Handbuch Der Physik (Fizmatgiz, M., 1963)
  93. Yu. V. Martynenko and Yu. N. Yavlinski&ibreve; Zh. Tekh. Fiz. 58 1164 (1988); Yu. V. Martynenko and Yu. N. Yavlinski&ibreve; Sov. Phys. Tech. Phys. 33 683 (1988); Yu. V. Martynenko and Yu. N. Yavlinski&ibreve; Dokl. Akad. Nauk SSSR 270 88 (1983); Yu. V. Martynenko and Yu. N. Yavlinski&ibreve; Sov. Phys. Dokl. 28 391 (1983)
  94. A. A. Ivanov, V. V. Parail, and T. K. Soboleva Zh. Eksp. Teor. Fiz. 64 1245 (1973); A. A. Ivanov, V. V. Parail, and T. K. Soboleva Sov. Phys. JETP 37 (1973)
  95. Y. Hayashiuchi, Y. Kitazoe, T. Sekiya, and Y. Yamamura J. Nucl. Mater. 71 181 (1977)
  96. I. S. Bitensky and E. S. Parilis Nucl. Instrum. Methods Phys. Res. Sect. B 21 26 (1987)
  97. I. S. Bitenski&ibreve; and É. S. Parilis At. Energ. 46 269 (1979); I. S. Bitenski&ibreve; and É. S. Parilis Sov. At. Energ. 46 316 (1979)
  98. A. M. Miterev Khim. Vys. Energ. 14 483 (1980); A. M. Miterev High Energy Chem. (USSR) 14 369 (1980)
  99. R. E. Johnson and W. L. Brown Nucl. Instrum. Methods Phys. Res. 198 103 (1982)
  100. D. I. Slovetski&ibreve; Theoretical And Applied Plasma Chemistry [in Russian] (Nauka, M., 1975) p. 113
  101. I. G. Kaplan, A. M. Miterev, and L. M. Khadzhibekova Khim. Vys. Energ. 11 409 (1977); I. G. Kaplan, A. M. Miterev, and L. M. Khadzhibekova High Energy Chem. (USSR) 11 432 (1977)
  102. L. C. Northcliffe and R. F. Schilling Nucl. Data A 7 233 (1970)
  103. J. F. Ziegler (ed.) The Stopping And Ranges Of Ions In Matter (Handbook of Stopping Cross-Sections for Energetic Ions in All Elements) Vol. 5 (Pergamon Press, London, 1980)
  104. J. A. La Verne and R. H. Schuler J. Phys. Chem. 88 1200 (1984)
  105. J. Ziegler Nucl. Instrum. Methods 168 17 (1980)
  106. I. A. Baranov and S. O. Tsepelevich Vopr. At. Nauki Tekh. Ser. Fiz. Radiats. Povrezhdenil Radiats. Materialoved. (No. 1 (39)) 75 (1987)
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