Color-coded display of information in scanning electron microscopy

This article describes a system for color-coding of images for qualitative and quantitative analysis of information in the scanning electron microscope. The method is based on an ``intensity-color'' conversion, which matches a certain color with a certain parameter or property of the object. The video signal is quantized with respect to the color spectrum in the secondary-electron-emission, back-scattered-electron, elemental-analysis, potential-contrast, and induced-current modes in studying semiconductor structures. The potentialities of color-coding of the video signal are demonstrated experimentally in fast quality control of microelectronic parts and in determining the local distribution of chemical elements in materials under study.

PACS: 07.80.+x
DOI: 10.1070/PU1983v026n01ABEH004309
URL: https://ufn.ru/en/articles/1983/1/e/
Citation: Spivak G V, Rau E I, Sasov A Yu "Color-coded display of information in scanning electron microscopy" Sov. Phys. Usp. 26 84–86 (1983)

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Оригинал: Спивак Г В, Рау Э И, Сасов А Ю «Цветокодированное отображение информации в растровой электронной микроскопии» УФН 139 165–168 (1983); DOI: 10.3367/UFNr.0139.198301f.0165

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