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Color-coded display of information in scanning electron microscopy

This article describes a system for color-coding of images for qualitative and quantitative analysis of information in the scanning electron microscope. The method is based on an ``intensity-color'' conversion, which matches a certain color with a certain parameter or property of the object. The video signal is quantized with respect to the color spectrum in the secondary-electron-emission, back-scattered-electron, elemental-analysis, potential-contrast, and induced-current modes in studying semiconductor structures. The potentialities of color-coding of the video signal are demonstrated experimentally in fast quality control of microelectronic parts and in determining the local distribution of chemical elements in materials under study.

Fulltext pdf (128 KB)
Fulltext is also available at DOI: 10.1070/PU1983v026n01ABEH004309
PACS: 07.80.+x
DOI: 10.1070/PU1983v026n01ABEH004309
URL: https://ufn.ru/en/articles/1983/1/e/
Citation: Spivak G V, Rau E I, Sasov A Yu "Color-coded display of information in scanning electron microscopy" Sov. Phys. Usp. 26 84–86 (1983)
BibTexBibNote ® (generic)BibNote ® (RIS) MedlineRefWorks
PT Journal Article
TI Color-coded display of information in scanning electron microscopy
AU Spivak G V
FAU Spivak GV
AU Rau E I
FAU Rau EI
AU Sasov A Yu
FAU Sasov AY
DP 10 Jan, 1983
TA Phys. Usp.
VI 26
IP 1
PG 84-86
RX 10.1070/PU1983v026n01ABEH004309
URL https://ufn.ru/en/articles/1983/1/e/
SO Phys. Usp. 1983 Jan 10;26(1):84-86

Оригинал: Спивак Г В, Рау Э И, Сасов А Ю «Цветокодированное отображение информации в растровой электронной микроскопии» УФН 139 165–168 (1983); DOI: 10.3367/UFNr.0139.198301f.0165

Cited by (6)

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