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Present-day Semiconductor Microelectronics and the Prospects of its Development


Institute of Physics and Technology, Russian Academy of Sciences, Nakhimovskii prosp. 34, Moscow, 117218, Russian Federation
Fulltext pdf (426 KB)
Fulltext is also available at DOI: 10.1070/PU1973v016n02ABEH005173
PACS: 85.40.−e, 85.30.−z, 73.40.Kp, 73.40.Lq (all)
DOI: 10.1070/PU1973v016n02ABEH005173
URL: https://ufn.ru/en/articles/1973/2/k/
Citation: Valiev K A "Present-day Semiconductor Microelectronics and the Prospects of its Development" Sov. Phys. Usp. 16 281–283 (1973)
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Оригинал: Валиев К А «Современная полупроводниковая микроэлектроника и перспективы ее развития» УФН 109 765–768 (1973); DOI: 10.3367/UFNr.0109.197304j.0765

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