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| Issue 11, 2024 |
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PACS numbers
81.16.Nd Micro- and nanolithography
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P. Mazarov, V.G. Dudnikov, A.B. Tolstoguzov “Electrohydrodynamic emitters of ion beams” Phys. Usp. 63 1219–1255 (2020)
29.25.Ni, 41.75.−i, 81.16.Nd () -
G.N. Makarov “Laser applications in nanotechnology: nanofabrication using laser ablation and laser nanolithography” Phys. Usp. 56 643–682 (2013)
36.40.−c, 42.62.Fi, 61.46.−w, 81.05.ue, 81.07.−b, 81.16.−c, 81.16.Nd ()
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