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Stopping and scattering of atoms with keV energies in matter

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Ioffe Institute, ul. Polytekhnicheskaya 26, St. Petersburg, 194021, Russian Federation

A significant refinement of the concepts of stopping and scattering of atomic particles with energies less than 100 keV in matter is discussed, which arose when comparing currently available experimental data with the results of computer modeling: the problem of choosing a potential to describe the scattering of particles, clarifying the concepts of nuclear and electronic stopping. The dominant role in the formation of electronic losses of the mechanism associated with the excitation of autoionization states during the rearrangement of molecular shells during collisions is considered. A significant contribution of fast electron emission to the electron loss cross section has been established. The influence of collision parameters on the processes of scattering, sputtering and channeling is analyzed.

Keywords: atomic collisions, atomic interaction potential, nuclear and electronic stopping losses, excitation of autoionization states, ionization of atoms, electron emission, scattering, sputtering, channeling
PACS: 32.80.Dz, 34.20.−b, 34.50.Bw, 34.50.−s, 34.80.Dp, 34.50.Dy, 52.20.Hv, 61.85.+p, 68.49.Sf (all)
DOI: 10.3367/UFNe.2024.03.039666
Citation: Babenko P Yu, Zinov’ev A N, Shergin A P "Stopping and scattering of atoms with keV energies in matter" Phys. Usp., accepted

Received: 15th, November 2023, revised: 7th, March 2024, 20th, March 2024

Оригинал: Бабенко П Ю, Зиновьев А Н, Шергин А П «О торможении и рассеянии в веществе атомов с энергиями порядка килоэлектронвольт» УФН, принята к публикации; DOI: 10.3367/UFNr.2024.03.039666

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