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Reviews of topical problems


Stopping and scattering of keV-energy atoms in matter

† , ‡ , § 
Ioffe Institute, ul. Polytekhnicheskaya 26, St. Petersburg, 194021, Russian Federation

Significant progress in understanding the stopping and scattering of atomic particles with energies less than 100 keV in matter is discussed. Stemming from a comparison of experimental data with the results of computer modeling, it refers to the selection of the potential employed to describe the scattering of particles and refinement of the concepts of nuclear and electronic stopping power. Considered is the dominant role in the formation of electronic losses of the mechanism related to the excitation of autoionization states during the rearrangement of molecular shells in collisions. The contribution of fast electron emission to the electronic loss cross section is found to be significant. The influence of collision parameters on scattering, sputtering, and channeling is analyzed.

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Fulltext is also available at DOI: 10.3367/UFNe.2024.03.039666
Keywords: atomic collisions, atomic interaction potential, nuclear and electronic stopping losses, excitation of autoionization states, ionization of atoms, electron emission, scattering, sputtering, channeling
PACS: 32.80.Zb, 34.20.−b, 34.35.+a, 34.50.−s, 34.50.Bw, 34.80.Dp, 52.20.Hv, 61.85.+p (all)
DOI: 10.3367/UFNe.2024.03.039666
URL: https://ufn.ru/en/articles/2024/10/c/
2-s2.0-85211482637
Citation: Babenko P Yu, Zinoviev A N, Shergin A P "Stopping and scattering of keV-energy atoms in matter" Phys. Usp. 67 1000–1021 (2024)
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Received: 15th, November 2023, revised: 7th, March 2024, 20th, March 2024

Оригинал: Бабенко П Ю, Зиновьев А Н, Шергин А П «О торможении и рассеянии в веществе атомов с энергиями порядка килоэлектронвольт» УФН 194 1059–1081 (2024); DOI: 10.3367/UFNr.2024.03.039666

References (176) ↓ Similar articles (20)

  1. Avakyan S V et al Collision Processes And Excitation Of UV Emission From Planetary Atmospheric Gases (New York: Gordon and Breach, 1998); Avakyan S V et al Secheniya Protsessov Ionizatsii I Vozbuzhdeniya UF Izluchenuiya Pri Stolknoveniyakh Elektronov, Ionov I Fotonov S Atomami I Molekulami Atmosfernykh Gazov (Cross Sections Of Ionization And Excitation Of UV Radiation In Collisions Of Electrons, Ions, And Photons With Molecules Of Atmospheric Gases) (St. Petersburg: GOI, 2000)
  2. Ryssel H, Ruge I Ion Implantation (Chichester: Wiley, 1986); Translated into Russian, Ryssel H, Ruge I Ionnaya Implantatsiya (Moscow: Nauka, 1983)
  3. Behrisch R (Ed.) Sputtering By Particle Bombardmen Vol. 1 Physical Sputtering Of Single-Element Solids (Topics in Applied Physics) Vol. 47 (Berlin: Springer-Verlag, 1981); Translated into Russian, Behrisch R (Ed.) Raspylenie Tverdykh Tel Ionnoi Bombardirovkoi Issue 1. Fizicheskoe Raspylenie Odnoelementnykh Tverdykh Tel (Moscow: Mir, 1984)
  4. Behrisch R (Ed.) Sputtering By Particle Bombardmen Vol. 2 Sputtering Of Alloys And Compounds, Electron And Neutron Sputtering, Surface Topography (Topics in Applied Physics) Vol. 52 (Berlin: Springer-Verlag, 1983); Translated into Russian, Behrisch R (Ed.) Raspylenie Tverdykh Tel Ionnoi Bombardirovkoi Issue 2. Raspylenie Splavov I Soedinenii, Raspylenie Pod Deistviem Elektronov I Neitronov, Rel’ef Poverkhnosti (Moscow: Mir, 1986)
  5. Behrisch R (Ed.) Sputtering By Particle Bombardmen Vol. 3 Characteristics Of Sputtered Particles, Technical Applications (Topics in Applied Physics) Vol. 64 (Berlin: Springer-Verlag, 1991); Translated into Russian, Behrisch R (Ed.) Raspylenie Tverdykh Tel Ionnoi Bombardirovkoi Issue 3. Kharakteristiki Raspylennykh Chastits, Primeneniya V Tekhnike (Moscow: Mir, 1998)
  6. Behrisch R, Eckstein W (Eds) Sputtering By Particle Bombardment: Experiments And Computer Calculations From Threshold To MeV Energies (Topics in Applied Physics) Vol. 110 (Berlin: Springer, 2007)
  7. Sigmund P Phys. Rev. 184 383 (1969)
  8. Mashkova E S, Molchanov V A Medium-energy Ion Reflection From Solids (Amsterdam: North-Holland, 1985); Translated from Russian, Mashkova E S, Molchanov V A Rasseyanie Ionov Srednikh Energii Poverkhnostyami Tverdykh Tel (Moscow: Atomizdat, 1980)
  9. Parilis E S et al Teoriya Rasseyaniya Atomov Srednikh Energii Poverkhnost’yu Tverdogo Tela (Theory Of Reflection Of Medium-energy Atoms By The Surface Of A Solid Body) (Tashkent: FAN, 1987)
  10. Kurnaev V A, Mashkova E S, Molchanov V A Otrazhenie Legkikh Ionov Ot Poverkhnosti Tverdogo Tela (Reflection Of Light Ions From The Surface Of A Solid Body) (Moscow: Energoatomizdat, 1985)
  11. Gott Yu V Vzaimodeistvie Chastits S Veshchestvom V Plazmennykh Issledovaniyakh (Particle-Matter Interactions In Plasma Research) (Moscow: Atomizdat, 1978)
  12. Gott Yu V Vzaimodeistvie Medlennykh Chastits S Veshchestvom I Diagnostika Plazmy (Interaction Of Slow Particles With Matter And Plasma Diagnostics) (Moscow: Atomizdat, 1973)
  13. Ma B M Nuclear Reactor Materials And Applications (New York: Van Nostrand Reinhold Co., 1983); Translated into Russian, Ma B M Materialy Yadernykh Energeticheskikh Ustanovok (Moscow: Energoatomizdat, 1987)
  14. Hoffelner W Materials For Nuclear Plants (London: Springer, 2013)
  15. Klenov G I, Khoroshkov V S Phys. Usp. 59 807 (2016); Klenov G I, Khoroshkov V S Usp. Fiz. Nauk 186 891 (2016)
  16. Sigmund P Particle Penetration And Radiation Effects (London: Springer, 2014)
  17. Pleshivtsev N V, Bazhin A I Fizika Vozdeistviya Ionnykh Puchkov Na Materialy (Physics Of The Effect Of Ion Beams On Materials) (Moscow: Vuzovskaya Kniga, 1998)
  18. Eckstein W Computer Simulation Of Ion-Solid Interactions (Berlin: Springer, 1991); Translated into Russian, Eckstein W Komp’yuternoe Modelirovanie Vzaimodeistviya Chastits S Poverkhnost’yu Tverdogo Tela (Moscow: Mir, 1995)
  19. SRIM - The Stopping and Range of Ions in Matter - code, http://srim.org/
  20. Lindhard J, Scharff M Phys. Rev. 124 128 (1961)
  21. Robinson M T, Oen O S Phys. Rev. 132 2385 (1963)
  22. Mutzke A et al SDTrimSP Version 6.00. IPP 2019-02 (Garching: IPP, 2019)
  23. Biersack J P, Steinbauer E, Bauer P Nucl. Instrum. Meth. Phys. Res. B 61 77 (1991)
  24. Babenko P Yu, Zinoviev A N, Shergin A P JETP Lett. 101 840 (2015); Babenko P Yu, Zinoviev A N, Shergin A P Pis’ma Zh. Eksp. Teor. Fiz. 101 940 (2015)
  25. Babenko P Yu et al J. Exp. Theor. Phys. 128 523 (2019); Babenko P Yu et al Zh. Eksp. Teor. Fiz. 155 612 (2019)
  26. Torrens I M Interatomic Potentials (New York: Academic Press, 1972)
  27. Robinson M T, Torrens I M Phys. Rev. B 9 5008 (1974)
  28. Gaydaenko V I, Nikulin V K Chem. Phys. Lett. 7 360 (1970)
  29. Ziegler J F, Biersack J P, Littmark U The Stopping And Range Of Ions In Solids Vol. 1 (New York: Pergamon Press, 1983)
  30. Connor D J O, Biersack J E Nucl. Instrum. Meth. Phys. Res. B 15 14 (1986)
  31. Lane G H, Everhart E Phys. Rev. 120 2064 (1960)
  32. Afrosimov V V, Gordeev Yu S, Zinoviev A N Sov. Phys. JETP 39 950 (1974); Afrosimov V V, Gordeev Yu S, Zinoviev A N Zh. Eksp. Teor. Fiz. 66 1933 (1974)
  33. Firsov O B Zh. Eksp. Teor. Fiz. 24 279 (1953)
  34. Firsov O B Sov. Phys. JETP 6 534 (1958); Firsov O B Zh. Eksp. Teor. Fiz. 33 696 (1957)
  35. Moliere G Z. Naturforsch. A 2 133 (1949)
  36. Jensen H Z. Phys. B 77 722 (1932)
  37. Wilson W D, Haggmark L G, Biersack J P Phys. Rev. B 15 2458 (1977)
  38. Zinoviev A N Nucl. Instrum. Meth. Phys. Res. B 406 465 (2017)
  39. Zinoviev A N J. Surf. Invest. X-Ray, Synchrotron Neutron Tech. 12 554 (2018); Zinoviev A N Poverkhnost’. Rentgen. Sinkhrotron. Neitron. Issled. (6) 43 (2018)
  40. Lu C C et al At. Data Nucl. Data Tables 3 1 (1971)
  41. Zinoviev A N Tech. Phys. 53 13 (2008); Zinoviev A N Zh. Tekh. Fiz. 78 15 (2008)
  42. Norlund K, Runeberg N, Sundholm D Nucl. Instrum. Meth. Phys. Res. B 132 45 (1997)
  43. Zinoviev A N, Norlund K Nucl. Instrum. Meth. Phys. Res. B 406 511 (2017)
  44. Meluzova D S et al Nucl. Instrum. Meth. Phys. Res. B 460 4 (2019)
  45. Luo Y-R Comprehensive Handbook Of Chemical Bond Energies (Boca Raton, FL: CRC Press, 2007)
  46. Zinoviev A N, Babenko P Yu, Nordlund K Nucl. Instrum. Meth. Phys. Res. B 508 10 (2021)
  47. Bjorkas C et al J. Phys. Condens. Matter 21 445002 (2009)
  48. Prokof’ev M V, Svetukhin V V, Tikhonchev M Yu Izv. Samarsk. Nauch. Tsentra Ross. Akad. Nauk 15 1024 (2013)
  49. Granberg F, Byggmästar J, Nordlund K J. Nucl. Mater. 556 153158 (2021)
  50. Bjorkas C, Nordlund K J. Nucl. Mater. 439 174 (2013)
  51. Lyashenko A et al J. Nucl. Mater. 542 152465 (2020)
  52. Tersoff J Phys. Rev. B 37 6991 (1988)
  53. Rapaport D C The Art Of Molecular Dynamics Simulation (Cambridge: Cambridge Univ. Press, 2004)
  54. Lindhard J, Nielsen V, Scharff M Mat.-Fys. Medd. Dan. Vid. Selsk. 36 (10) 1 (1968)
  55. Winterbon K B Rad. Eff. 13 215 (1972)
  56. Littmark U, Ziegler J F Phys. Rev. A 23 64 (1981)
  57. Babenko P Yu, Zinoviev A N Tech. Phys. 69 1886 (2024); Babenko P Yu, Zinoviev A N Zh. Tekh. Fiz. 93 1272 (2023)
  58. Hartung H et al Phys. Lett. A 119 457 (1987)
  59. Hartung H et al J. Phys. B 18 L433 (1985)
  60. Gartker K, Hehl K Phys. Status Solidi B 94 231 (1979)
  61. Loftager P et al Phys. Rev. A 20 1443 (1979)
  62. Loftager P, Claussen G ICPEAC VI (Cambridge: USA, 1969) p. 518
  63. Bruckner B et al Nucl. Instrum. Meth. Phys. Res. B 470 21 (2020)
  64. Shulga V I Rad. Eff. 100 71 (1986)
  65. Babenko P Yu et al Tech. Phys. Lett. 48 50 (2022); Babenko P Yu et al Pis’ma Zh. Tekh. Fiz. 48 10 (2022)
  66. Verbeek H, Eckstein W, Bhattacharya R S J. Appl. Phys. 51 1783 (1980)
  67. Babenko P Yu, Zinoviev A N, Tensin D S Tech. Phys. 67 1416 (2022); Babenko P Yu, Zinoviev A N, Tensin D S Zh. Tekh. Fiz. 92 1643 (2022)
  68. Fama M et al Nucl. Instrum. Meth. Phys. Res. B 164 241 (2000)
  69. Archubi C et al Phys. Status Solidi B 241 2389 (2004)
  70. Babenko P Yu, Mikhailov V S, Zinoviev A N JETP Lett. 117 725 (2023); Babenko P Yu, Mikhailov V S, Zinoviev A N Pis’ma Zh. Eksp. Teor. Fiz. 117 723 (2023)
  71. Dedkov G V Phys. Usp. 38 877 (1995); Dedkov G V Usp. Fiz. Nauk 165 919 (1995)
  72. Saitoh K Rad. Eff. 82 205 (1984)
  73. Kittel C Introduction To Solid State Physics 8th ed. (New York: John Wiley and Sons, 2005)
  74. Landau L D, Lifshitz E M Quantum Mechanics: Non-Relativistic Theory (Oxford: Pergamon Press, 1977); Translated from Russian, Landau L D, Lifshitz E M Kvantovaya Mekhanika (Nerelyativistskaya Teoriya) (Moscow: Fizmatlit, 2004)
  75. Mott N F, Massey H S W Theory Of Atomic Collisions (Oxford: Oxford Univ. Press, 1965); Translated into Russian, Mott N F, Massey H S W Teoriya Atomnykh Stolknovenii (Moscow: Mir, 1969)
  76. Bethe H A Ann. Physik 5 325 (1930)
  77. Bloch F Ann. Physik 16 285 (1933)
  78. Fermi E, Teller E Phys. Rev. 72 399 (1947)
  79. Andersen H H, Ziegler J F Hydrogen Stopping Powers And Ranges In All Elements. The Stopping And Range Of Ions In Matter Vol. 3 (New York: Pergamon Press, 1977)
  80. Fink D et al Nucl. Instrum. Meth. 218 171 (1983)
  81. Fink D Nucl. Instrum. Meth. 218 817 (1983)
  82. Firsov O B Sov. Phys. JETP 9 1076 (1959); Firsov O B Zh. Eksp. Teor. Fiz. 36 1517 (1959)
  83. Oen O S, Robinson M T Nucl. Instrum. Meth. 132 647 (1976)
  84. Akhiezer I A, Davydov L N Sov. Phys. Usp. 22 804 (1979); Akhiezer I A, Davydov L N Usp. Fiz. Nauk 129 239 (1979)
  85. Sigmund P Nucl. Instrum. Meth. Phys. Res. B 406 391 (2017)
  86. Montanari C C, Miraglia J E Phys. Rev. A 96 012707 (2017)
  87. Zinoviev A N, Babenko P Yu, Meluzova D S, Shergin A P JETP Lett. 108 633 (2018); Zinoviev A N, Babenko P Yu, Meluzova D S, Shergin A P Pis’ma Zh. Eksp. Teor. Fiz. 108 666 (2018)
  88. Zinoviev A N, Babenko P Yu, Meluzova D S, Shergin A P Nucl. Instrum. Meth. Phys. Res. B 467 140 (2020)
  89. Duvenbeck A et al Phys. Rev. B 77 245444 (2008)
  90. Fuls E N et al Phys. Rev. 107 704 (1957)
  91. Kessel Q C, Everhart E Phys. Rev. 146 16 (1966)
  92. Bierman D J, Turkenburg W C Physica 67 533 (1973)
  93. Morgan G H, Everhart E Phys. Rev. 128 667 (1962)
  94. Kessel Q C, Rose P H, Grodzins L Phys. Rev. Lett. 22 1031 (1969)
  95. Zinoviev A N, Babenko P Yu, Shergin A P J. Exp. Theor. Phys. 163 662 (2023); Zinoviev A N, Babenko P Yu, Shergin A P Zh. Eksp. Teor. Fiz. 163 744 (2023)
  96. Amme R C, Haugsjaa P O Phys. Rev. 177 230 (1969)
  97. Gilbody H B, Hasted J B Proc. R. Soc. London A 238 334 (1957)
  98. Cacak R K, Kessel Q C, Rudd M E Phys. Rev. A 2 1327 (1970)
  99. Meskhi G G "Osobennosti radiatsionnogo i Ozhe-raspada vnutrennikh vakansii, obrazuyushchikhsya v atomnykh stolknoveniyakh (Features of radiation and Auger decay of internal vacancies formed in atomic collisions)" Candidate’s Dissertation in Phys. and Math. (Leningrad: Ioffe Physical-Technical Institute, 1983)
  100. Echenique P M, Flores F, Ritchie R H Solid State Phys. 43 229 (1990)
  101. Grahmann G, Kalbitzer S Nucl. Instrum. Meth. Phys. Res. B 132 119 (1976)
  102. Zinoviev A N, Babenko P Yu, Shergin A P J. Surf. Invest. X-Ray, Synchrotron Neutron Tech. 14 1304 (2020); Zinoviev A N, Babenko P Yu, Shergin A P Poverkhnost’. Rentgen, Sinkhrotron. Neitron. Issled. (12) 64 (2020)
  103. Babenko P Yu, Zinoviev A N, Shergin A P Nucl. Instrum. Meth. Phys. Res. B 354 142 (2015)
  104. Briggs J S, Macek J J. Phys. B 5 579 (1972)
  105. Zinoviev A N, Babenko P Yu, Shergin A P JETP Lett. 114 18 (2021); Zinoviev A N, Babenko P Yu, Shergin A P Pis’ma Zh. Eksp. Teor. Fiz. 114 13 (2021)
  106. Meyerhof W E, Taulbjerg K Annu. Rev. Nucl. Sci. 27 279 (1977)
  107. Lennard W N, Mitchell I V, Forster J S Phys. Rev. A 18 1949 (1978)
  108. Foster C et al J. Phys. B 9 1943 (1976)
  109. Zinoviev A N, Ovchinnikov S Yu, Gordeev Yu S Sov. Tech. Phys. Lett. 7 139 (1981); Zinoviev A N, Ovchinnikov S Yu, Gordeev Yu S Pis’ma Zh. Tekh. Fiz. 7 139 (1981)
  110. Ovchinnikov S Yu, Solov’ev E A JETP Lett. 64 280 (1986); Ovchinnikov S Yu, Solov’ev E A Pis’ma Zh. Eksp. Teor. Fiz. 91 477 (1986)
  111. Ogurtsov G N et al Phys. Rev. A 53 2391 (1996)
  112. Pieksma M, Ovchinnikov S Yu J. Phys. B 24 2699 (1991)
  113. Stolterfoht N Phys. Rev. A 12 1313 (1975)
  114. Zinoviev A N, Babenko P Yu J. Surf. Invest. X-Ray, Synchrotron Neutron Tech. 15 623 (2021); Zinoviev A N, Babenko P Yu Poverkhnost’. Rentgen, Sinkhrotron. Neitron. Issled. (6) 94 (2021)
  115. Zinoviev A N, Babenko P Yu Nucl. Instrum. Meth. Phys. Res. B 536 82 (2023)
  116. ALADDIN database, https://www-amdis.iaea.org/ALADDIN/
  117. NDS database, https://www-nds.iaea.org/stopping/
  118. Cabrera-Trujillo R et al Phys. Rev. Lett. 84 5300 (2000)
  119. Kirchner T, Horbatsch M, Ludde H J Phys. Rev. A 66 052719 (2002)
  120. Schiwietz G, Grande P L Phys. Rev. A 84 052703 (2011)
  121. Chowdhury M R e al. Phys. Rev. A 102 012819 (2020)
  122. Commisso M et al Nucl. Instrum. Meth. Phys. Res. B 256 474 (2007)
  123. Gassert H et al Phys. Rev. Lett. 116 073201 (2016)
  124. Gravielle M S, Miraglia J E Phys. Rev. A 65 022901 (2002)
  125. Hasan A et al Phys. Rev. A 74 032703 (2006)
  126. Kim H-K et al Phys. Rev. A 85 022707 (2012)
  127. McSherry D M et al AIP Conf. Proc. 576 168 (2001)
  128. Schultz D R et al Phys. Rev. A 65 052722 (2002)
  129. Sigmund P, Glazov L G Eur. Phys. J. D 23 211 (2003)
  130. Rudd M E, Toburen L H, Stolterfoht N At. Data Nucl. Data Tables 18 413 (1976)
  131. Rudd M E, Toburen L H, Stolterfoht N At. Data Nucl. Data Tables 23 405 (1979)
  132. Moro M V et al Nucl. Instrum. Meth. Phys. Res. B 498 1 (2021)
  133. Mery M et al Rad. Eff. Def. Solids 176 73 (2021)
  134. Fama M et al Nucl. Instrum. Meth. Phys. Res. B 193 91 (2002)
  135. Tran T T et al Phys. Rev. A 100 032705 (2019)
  136. Konac G et al Nucl. Instrum. Meth. Phys. Res. B 136 159 (1998)
  137. Moller S P et al Phys. Rev. Lett. 88 193201 (2002)
  138. Andersen H H Nucl. Instrum. Meth. Phys. Res. B 194 217 (2002)
  139. Bruckner B Nucl. Instrum. Meth. Phys. Res. B 423 82 (2018)
  140. Cantero E D et al Phys. Rev. A 80 032904 (2009)
  141. Valdes J E et al Phys. Rev. A 49 1083 (1994)
  142. Markin S N et al Phys. Rev. B 80 205105 (2009)
  143. Martínez-Tamayo G et al Phys. Rev. A 51 2285 (1995)
  144. Goebl D et al Phys. Rev. A 90 042706 (2014)
  145. Valdés J E et al Nucl. Instrum. Meth. Phys. Res. B 73 313 (1993)
  146. Goebl D, Roth D, Bauer P Phys. Rev. A 87 062903 (2013)
  147. Valdés J E et al Nucl. Instrum. Meth. Phys. Res. B 164 268 (2000)
  148. Blume R, Eckstein W, Verbeek H Nucl. Instrum. Meth. 168 57 (1980)
  149. Markin S N e al. Phys. Rev. B 78 195122 (2008)
  150. Paul H, Schinner A Phys. Scripta 69 C41 (2004)
  151. Sigmund P, Schinner A Nucl. Instrum. Meth. Phys. Res. B 410 78 (2017)
  152. Goebl D et al Phys. Rev. A 88 032901 (2013)
  153. Zinoviev A N, Babenko P Yu JETP Lett. 115 560 (2022); Zinoviev A N, Babenko P Yu Pis’ma Zh. Eksp. Teor. Fiz. 115 603 (2022)
  154. Zeb M A et al Phys. Rev. Lett. 108 225504 (2012)
  155. Babenko P Yu, Mikhailov V S, Shergin; A P, Zinoviev A N Tech. Phys. 68 662 (2023); Babenko P Yu, Mikhailov V S, Shergin A P, Zinoviev A N Zh. Tekh. Fiz. 93 709 (2023)
  156. Mikhailov V S, Babenko P Yu, Shergin A P, Zinoviev A N J. Exp. Theor. Phys. 137 413 (2023); Mikhailov V S, Babenko P Yu, Shergin A P, Zinoviev A N Zh. Eksp. Teor. Fiz. 164 478 (2023)
  157. Clark R E H Atomic And Plasma-Material Interaction Data For Fusion Vol. 7, Pt. B (Vienna: IAEA, 2001)
  158. Falcone G, Gullo F Phys. Lett. A 125 432 (1987)
  159. Falcone G Rivista Nuovo Cimento 13 1 (1990); Translated into Russian, Falcone G Usp. Fiz. Nauk 162 71 (1992)
  160. Eckstein W, Preuss R J. Nucl. Mater. 320 209 (2003)
  161. Mashkova E S, Molchanov V A Primenenie Rasseyaniya Ionov Dlya Analiza Tverdykh Tel (Application Of Ion Scattering To Solid State Analysis) (Moscow: Energoatomizdat, 1995)
  162. Mikhailov V S, Babenko P Yu, Shergin A P, Zinoviev A N Tech. Phys. 68 1425 (2023); https:journals.ioffe.ru/articles/57492//; Mikhailov V S, Babenko P Yu, Shergin A P, Zinoviev A N Zh. Tekh. Fiz. 93 1533 (2023)
  163. Eckstein W "Calculated sputtering, reflection and range values" IPP-9-132 (Garching: IPP, 2002)
  164. Eckstein W "Reflection (Backscattering)" IPP-17-12 (Garching: IPP, 2009)
  165. Meluzova D S, Babenko P Yu, Shergin A P, Zinoviev A N J. Surf. Investig. 14 738 (2020); Meluzova D S, Babenko P Yu, Shergin A P, Zinoviev A N Poverkhnost’. Rentgen., Sinkhrotron. Neitron. Issled. (7) 98 (2020)
  166. van Gorkum A A, Kornelsen E V Rad. Eff. 52 25 (1980)
  167. Borovikov V, Voter A F, Tang X-Z J. Nucl. Mater. 447 254 (2014)
  168. Robinson M T J. Nucl. Mater. 103 525 (1981)
  169. Yamamura Y Nucl. Instrum. Meth. Phys. Res. B 33 429 (1988)
  170. Robinson M T, Oen O S Appl. Phys. Lett. 2 30 (1963)
  171. Lindhard J Mat.-Fys. Medd. Dan. Vid. Selsk. 34 1 (1965)
  172. Tulinov A F Sov. Phys. Usp. 8 864 (1966); Tulinov A F Usp. Fiz. Nauk 87 585 (1965)
  173. Vantomme A Nucl. Instrum. Meth. Phys. Res. B 371 12 (2016)
  174. Tensin D S et al Nucl. Instrum. Meth. Phys. Res. B 540 33 (2023)
  175. Ohtsuki Y-H Charged Beam Interaction With Solids (London: Taylor and Francis, 1983); Translated into Russian, Ohtsuki Y-H Vzaimodeistvie Zaryazhennykh Chastits S Tverdymi Telami (Moscow: Mir, 1985)
  176. Meluzova D S, Babenko P Yu, Shergin A P, Zinoviev A N Tech. Phys. Lett. 46 235 (2020); Meluzova D S, Babenko P Yu, Shergin A P, Zinoviev A N Pis’ma Zh. Tekh. Fiz. 46 (5) 34 (2020)
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