Surface analysis by low-energy ion scattering spectroscopy

A.B. Tolstoguzov^†^a, b, c, P.Yu. Babenko^d, A.N. Zinoviev^d
^aRyazan State Radio Engineering University named after V.F. Utkin, Gagarina Street 59/1, Ryazan, 390005, Russian Federation
^bZhuhai Tsinghua University Research Institute Innovation Center, Zhuhai, China
^cCentre for Physics and Technological Research, Universidade Nova de Lisboa, Campus da Caparica, Caparica, 2829-516, Portugal
^dIoffe Institute, ul. Polytekhnicheskaya 26, St. Petersburg, 194021, Russian Federation

The physical processes underlying the technique that uses low-energy (0.5—5 keV) backscattered ions of noble gases (Low Energy Ion Scattering, LEIS) and its hardware implementation are reviewed. The specific features of LEIS surface diagnostics, including the interpretation of energy spectra, quantitative elemental analysis, and options for studying the surface structure, the particle—surface interaction potential, and the presence of clusters in solid solutions, are discussed. Software codes for computer modeling of ion—surface interaction processes are presented. The advantages of energy-mass analysis of scattered ions are considered; the application of ion scattering in state-of-the-art ion microscopes is discussed, and the scattering of noble gas ions in the hyperthermal energy range is examined. The main areas of LEIS application for the analysis of the surface and near-surface layers of various materials and devices are overviewed, and the prospects for further development of low-energy ion scattering spectroscopy are assessed.

Keywords: surface diagnostics, ion scattering, neutralization, sputtering, fast ionized recoil atoms, energy-mass analysis, hyperthermal energy, ion microscopes
PACS: 34.35.+a, 68.49.Sf, 79.20.Rf (all)
DOI: 10.3367/UFNe.2025.09.040043
URL: https://ufn.ru/en/articles/2026/1/d/
Citation: Tolstoguzov A B, Babenko P Yu, Zinoviev A N "Surface analysis by low-energy ion scattering spectroscopy" Phys. Usp. 69 42–73 (2026)

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Received: 13th, January 2025, revised: 23rd, September 2025, accepted: 24th, September 2025

Оригинал: Толстогузов А Б, Бабенко П Ю, Зиновьев А Н «Диагностика поверхности методом спектроскопии обратно рассеянных ионов низких энергий» УФН 196 48–82 (2026); DOI: 10.3367/UFNr.2025.09.040043

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