Spectroscopy of small gas components of a nonequilibrium low-temperature plasma

The state of the art and prospects for the development of quantitative optical spectroscopy methods for analyzing the composition of small chemically active components of a nonequilibrium plasma are discussed. The capabilities of the methods are considered in combination with the conditions of applicability, both for fundamental research in the fields of plasma physics and chemistry, and for monitoring the technological processes in reactors for the benefit of the energy sector, micro- and nano-electronics, medicine, the creation of optical coatings, and generating active radicals and excited particles.

Keywords: spectroscopy, plasma, equilibrium
PACS: 29.30.−h, 52.25.Os, 52.70.−m (all)
DOI: 10.3367/UFNe.2021.07.039026
URL: https://ufn.ru/en/articles/2022/10/d/
Web of Science

001112536300004
Scopus

2-s2.0-85182907351
ADS NASA

2022PhyU...65.1071O
Citation: Ochkin V N "Spectroscopy of small gas components of a nonequilibrium low-temperature plasma" Phys. Usp. 65 1071–1103 (2022)

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Received: 4th, June 2021, revised: 22nd, July 2021, accepted: 23rd, July 2021

Оригинал: Очкин В Н «Спектроскопия малых газовых составляющих неравновесной низкотемпературной плазмы» УФН 192 1145–1178 (2022); DOI: 10.3367/UFNr.2021.07.039026

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