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Instruments and methods of investigation


Spectroscopy of small gas components of a nonequilibrium low-temperature plasma

† 
Lebedev Physical Institute, Russian Academy of Sciences, Leninsky prosp. 53, Moscow, 119991, Russian Federation

The state of the art and prospects for the development of quantitative optical spectroscopy methods for analyzing the composition of small chemically active components of a nonequilibrium plasma are discussed. The capabilities of the methods are considered in combination with the conditions of applicability, both for fundamental research in the fields of plasma physics and chemistry, and for monitoring the technological processes in reactors for the benefit of the energy sector, micro- and nano-electronics, medicine, the creation of optical coatings, and generating active radicals and excited particles.

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Fulltext is also available at DOI: 10.3367/UFNe.2021.07.039026
Keywords: spectroscopy, plasma, equilibrium
PACS: 29.30.−h, 52.25.Os, 52.70.−m (all)
DOI: 10.3367/UFNe.2021.07.039026
URL: https://ufn.ru/en/articles/2022/10/d/
001112536300004
2-s2.0-85182907351
2022PhyU...65.1071O
Citation: Ochkin V N "Spectroscopy of small gas components of a nonequilibrium low-temperature plasma" Phys. Usp. 65 1071–1103 (2022)
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Received: 4th, June 2021, revised: 22nd, July 2021, 23rd, July 2021

Оригинал: Очкин В Н «Спектроскопия малых газовых составляющих неравновесной низкотемпературной плазмы» УФН 192 1145–1178 (2022); DOI: 10.3367/UFNr.2021.07.039026

References (281) ↓ Cited by (6) Similar articles (12)

  1. Fortov V E (Ed.-in-Chief), Ochkin V N (Exec. Ed.) Entsiklopediya Nizkotemperaturnoi Plazmy Ser. B Spravochnye Prilozheniya, Bazy I Banki Dannykh (Encyclopedia Of Low-Temperature Plasma Ser. B Reference Applications, Databases And Databanks) Vol. 3-2 Termodinamicheskie, Opticheskie I Transportnye Svoistva Nizkotemperaturnoi Plazmy (Thermodynamic, Optical And Transport Properties Of Low-Temperature Plasma) Pt. 1 Opticheskie Svoistva Nizkotemperaturnoi Plazmy (Optical Properties Of Low-Temperature Plasma) (Moscow: Yanus-K, 2008) p. 1
  2. Lochte-Holtgreven W (Ed.) Plasma Diagnostics (Amsterdam: North-Holland, 1968)
  3. Prokhorov A M (Ed.-in-Chief) Fizicheskii Entsiklopedicheskii Slovar’ (Physical Encyclopedic Dictionary) (Moscow: Sov. Entsiklopediya, 1984)
  4. Artsimovich L A, Sagdeev R Z Fizika Plazmy Dlya Fizikov (Plasma Physics For Physicists) (Moscow: Atomizdat, 1979)
  5. Bernatskiy A V, Kochetov I V, Ochkin V N Plasma Phys. Rep. 46 874 (2020); Bernatskiy A V, Kochetov I V, Ochkin V N Fiz. Plazmy 46 783 (2020)
  6. Griem H R Plasma Spectroscopy (New York: McGraw-Hill, 1964)
  7. Thorne A, Litzén U, Johansson S Spectrophysics: Principles And Applications (Berlin: Springer, 1999)
  8. Fujimoto T Plasma Spectroscopy (Oxford: Clarendon Press, 2004)
  9. Frish S E (Exec. Ed.) Spektroskopiya Gazorazryadnoi Plazmy (Spectroscopy Of Gas-Discharge Plasma) (Leningrad: Nauka, 1970)
  10. Slovetskii D I Mekhanizmy Khimicheskikh Reaktsii V Neravnovesnoi Plazme (Mechanisms Of Chemical Reactions In Nonequilibrium Plasma) (Moscow: Nauka, 1980)
  11. Ochkin V N Spectroscopy Of Low Temperature Plasma (Weinheim: Wiley-VCH Verlag, 2009)
  12. Fantz U Plasma Sources Sci. Technol. 137 (2006)
  13. Chen F F, Chang J P Lecture Notes On Principles Of Plasma Processing (New York: Kluwer Acad., Plenum Publ., 2003)
  14. Engeln R, Klarenaar B, Guaitella O Plasma Sources Sci. Technol. 29 063001 (2020)
  15. Peverall R, Ritchie G A D Plasma Sources Sci. Technol. 28 073002 (2019)
  16. Lange H, Bussiahn R Proc. SPIE 4460 177 (2002)
  17. Reuter S et al Plasma Sources Sci. Technol. 24 054001 (2015)
  18. Lu X et al Phys. Rep. 630 1 (2016)
  19. Reuter S, von Woedtke T, Weltmann K-D J. Phys. D 51 233001 (2018)
  20. Iseki S et al Appl. Phys. Express 4 116201 (2011)
  21. Zhang K et al Crit. Rev. Food Sci. Nutr. 59 812 (2019)
  22. R&oum;pcke J et al Plasma Sources Sci. Technol. 15 S148 (2006)
  23. Hori M, Goto T Appl. Surf. Sci. 192 135 (2002)
  24. Podmar’kov Yu P, Raspopov N A, Frolov M P Proc. SPIE 4460 188 (2002)
  25. Wang C J. Anal. At. Spectrom. 22 1347 (2007)
  26. Maity A, Maithani S, Pradhan M Anal. Chem. 93 388 (2021)
  27. Ochkin V N et al IEEE Trans. Plasma Sci. 26 1502 (1998)
  28. Kiefer J, Ewart P Prog. Energy Combust. Sci. 37 525 (2011)
  29. Wiese W L, Smith M W, Miles B M Atomic Transition Probabilities Vol. 2 Sodium Through Calcium. A Critical Data Compilation (NSRDS-NBS, 22) (Washington, DC: US Department of Commerce, National Bureau of Standards, 22)
  30. Ochkin V N, Savinov S Yu, Sobolev N N Electron-Excited Molecules In Nonequilibrium Plasma (Eds N N Sobolev) (Commack, NY: Nova Science Publ., 1989) p. 7
  31. Herzberg G Molecular Spectra And Molecular Structure 1. Spectra Of Diatomic Molecules (New York: Van Nostrand, 1951)
  32. Herzberg G Molecular Spectra And Molecular Structure Vol. 2 Infrared And Raman Spectra Of Polyatomic Molecules (New York: Prentice-Hall, 1945); Translated into Russian, Herzberg G Kolebatel’nye I Vrashchatel’nye Spektry Mnogoatomnykh Molekul (Vibrational And Rotational Spectra Of Polyatomic Molecules) (Moscow: IL, 1949)
  33. Glushko V P (Exec. Ed.) Termodinamicheskie Svoistva Individual’nykh Veshchestv (Thermodynamic Properties Of Individual Substances) (Moscow: Nauka, 1978)
  34. Mikaberidze A A, Ochkin V N, Sobolev N N J. Quant. Spectrosc. Radiat. Transf. 12 169 (1972)
  35. Letokhov V S (Exec. Ed.) Lazernaya Analiticheskaya Spektroskopiya (Laser Analytical Spectroscopy) (Moscow: Nauka, 1986)
  36. Kopylov S M et al Perestraivaemye Lazery Na Krasitelyakh I Ikh Primeneniya (Tunable Dye Lasers And Their Applications) (Moscow: Radio i Svyaz’, 1991)
  37. Witteman W J Detection And Signal Processing: Technical Realization (Berlin: Springer, 2006)
  38. Ochkin V N Plasma Phys. Rep. 41 350 (2015); Ochkin V N Fiz. Plazmy 41 381 (2015)
  39. Mitchell A C G, Zemansky M W Resonance Radiation And Excited Atoms (Cambridge: The Univ. Press, 1934); Translated into Russian, Mitchell A C G, Zemansky M W Rezonansnoe Izluchenie I Vozbuzhdennye Atomy (Moscow: GTTL, 1937)
  40. Gerasimov G N et al Sov. Phys. Usp. 35 400 (1992); Gerasimov G N et al Usp. Fiz. Nauk 162 (5) 123 (1992)
  41. Lebedeva V V Entsiklopediya Nizkotemperaturnoi Plazmy Ser. B Spravochnye Prilozheniya, Bazy I Banki Dannykh (Encyclopedia Of Low-Temperature Plasma Ser. B Reference Applications, Databases And Databanks) Vol. 3-2 Termodinamicheskie, Opticheskie I Transportnye Svoistva Nizkotemperaturnoi Plazmy (Thermodynamic, Optical And Transport Properties Of Low-Temperature Plasma) Pt. 1 Opticheskie Svoistva Nizkotemperaturnoi Plazmy (Optical Properties Of Low-Temperature Plasma, Ed.-in-Chief V E Fortov, Exec. Ed. V N Ochkin) (Moscow: Yanus-K, 2008) p. 469
  42. Lomaev M I et al Phys. Usp. 46 193 (2003); Lomaev M I et al Usp. Fiz. Nauk 173 201 (2003)
  43. Hori M, Kondo H, Hiramatsu M J. Phys. D 44 174027 (2011)
  44. Sousa J S, Puech V J. Phys. D 46 464005 (2013)
  45. Ogurtsova N N, Podmoshenskii I V Nizkotemperaturnaya Plazma. Trudy Mezhdunarodnogo Simpoziuma Po Svoistvam I Primeneniyu Nizkotemperaturnoi Plazmy Pri XX Mezhdunarodnom Kongresse Po Teoreticheskoi I Prikladnoi Khimii, Moskva, Iyul’ 15 - 17, 1965 (Low-Temperature Plasma. Proc. Of The Intern. Symp. On Properties And Applications Of Low-Temperature Plasma At The 20th Intern. Congress Of Theoretical And Applied Chemistry, Moscow, July 15-17, 1965, Ed. A E Sheindlin) (Moscow: Mir, 1965) p. 432
  46. Mit’ko S V et al Kr. Soobshch. Fiz. FIAN (11) 47 (1989)
  47. Wang H et al J. Phys. D 51 035203 (2018)
  48. Kern C et al Appl. Opt. 45 2077 (2006)
  49. Ternov I M Phys. Usp. 38 409 (1995); Ternov I M Usp. Fiz. Nauk 165 429 (1995)
  50. Dedrick J et al J. Phys. D 50 455204 (2017)
  51. Hall J L Rev. Mod. Phys. 78 1279 (2006)
  52. Udem Th, Holzwarth R, Hänsch T W Nature 416 233 (2002)
  53. Zheltikov A M Phys. Usp. 49 605 (2006); Zheltikov A M Usp. Fiz. Nauk 176 623 (2006)
  54. Bagaev S N, Chebotaev V P Sov. Phys. Usp. 29 82 (1986); Bagaev S N, Chebotaev V P Usp. Fiz. Nauk 148 143 (1986)
  55. Adler F et al Annu. Rev. Anal. Chem. 3 175 (2010)
  56. Gotti R et al J. Chem. Phys. 148 054202 (2018)
  57. Picqué N, Hänsch T W Nat. Photon. 13 146 (2019)
  58. Griffiths P R, de Haseth J A Fourier Transform Infrared Spectrometry (Hoboken, NJ: Wiley-Interscience, 2007)
  59. Telle H R et al Appl. Phys. B 69 327 (1999)
  60. Zimmermann M et al Opt. Lett. 29 310 (2004)
  61. Dianov E M Kryukov P G Quantum Electron. 31 877 (2001); Dianov E M Kryukov P G Kvantovaya Elektron. 31 877 (2001)
  62. Schliesser A, Picqué N, Hänsch T W Nat. Photon. 6 440 (2012)
  63. Weichman M L et al J. Mol. Spectrosc. 355 66 (2019)
  64. Link S M et al Science 356 1164 (2017)
  65. Shelton R K et al Science 293 1286 (2001)
  66. Niermann B et al J. Phys. D 45 245202 (2012)
  67. Golkowski M et al IEEE Trans. Plasma Sci. 40 1984 (2012)
  68. Durocher-Jean A et al J. Phys. D 54 085204 (2021)
  69. Murnick D E, Peer B J Science 263 945 (1994)
  70. Chernin S M J. Mod. Opt. 48 619 (2001)
  71. Pakhomycheva L A et al JETP Lett. 12 43 (1970); Pakhomycheva L A et al Pis’ma Zh. Eksp. Teor. Fiz. 12 60 (1970)
  72. Baev V M, Latz T, Toshek P E Appl. Phys. B 69 171 (1999)
  73. Ochkin V N, Raspopov N A Entsiklopediya Nizkotemperaturnoi Plazmy. Vvodnyi Tom (Encyclopedia Of Low-Temperature Plasma. Introductory Volume) Book 2 (Ed.-in-Chief V E Fortov, Comp. Ed. A F Aleksandrov et al) (Moscow: Nauka, 2000) p. 583
  74. Crosson E R et al Anal. Chem. 74 2003 (2002)
  75. Nikolaev I V et al Spectrochim. Acta A 66 832 (2007)
  76. Lagunov V V, Nikolaev I V, Ochkin V N Spectrochim. Acta A 246 119060 (2021)
  77. Anevskii S I et al Entsiklopediya Nizkotemperaturnoi Plazmy. Vvodnyi Tom (Encyclopedia Of Low-Temperature Plasma. Introductory Volume) Book 2 (Ed.-in-Chief V E Fortov, Comp. Ed. A F Aleksandrov et al) (Moscow: Nauka, 2000) p. 532
  78. Oda T, Ono R Proc. SPIE 4460 263 (2002)
  79. Salmon J T, Laurendeau N M Appl. Opt. 26 2881 (1987)
  80. Andresen P et al Appl. Opt. 27 365 (1988)
  81. Niemi K, Schulz-von der Gathen V, Döbele H F J. Phys. D 34 2330 (2001)
  82. Doebele H F, Niemi K, Sculz-von der Gathen V Proc. of the X Intern. Conf. on Laser-Aided Plasma Diagnostics, Fukuoka, Japan, 2001 p. 71
  83. Elliott D, Scime E, Short Z Rev. Sci. Instrum. 87 11E504 (2016)
  84. Curry J J et al Proc. of the X Intern. Conf. on Laser-Aided Plasma Diagnostics, Fukuoka, Japan, 2001 p. 362
  85. Ochkin V N et al Sov. Phys. Usp. 29 260 (1986); Ochkin V N et al Usp. Fiz. Nauk 148 473 (1986)
  86. Ochkin V N, Preobrazhensky N G, Shaparev N Ya Optogalvanic Effect In Ionized Gas (London-Moscow-Amsterdam: Lebedev Physical Institute. Foundation for Intern. Scientific and Education Cooperation, distributed by Gordon and Breach, 1999)
  87. Aleksandrov N L, Napartovich A P Phys. Usp. 36 107 (1993); Aleksandrov N L, Napartovich A P Usp. Fiz. Nauk 163 (3) 1 (1993)
  88. Lebedev V S, Presnyakov L P, Sobel’man I I Phys. Usp. 46 473 (2003); Lebedev V S, Presnyakov L P, Sobel’man I I Usp. Fiz. Nauk 173 491 (2003)
  89. Shibagaki K, Sasaki K J. Phys. D 41 195204 (2008)
  90. Kim M AIP Scilight 21 (2019)
  91. Wu Y, Zhang Z Appl. Opt. 54 157 (2015)
  92. Landsberg G S Optika (Optics) (Moscow: Nauka, 1976)
  93. Kronig R de L J. Opt. Soc. Am. 12 547 (1926)
  94. Kramers H A Atti Congresso Int. Fisici, Como (Trans. Volta Centenary Congress, Como) 2 545 (1927)
  95. Kirzhnits D A Sov. Phys. Usp. 30 575 (1987); Kirzhnits D A Usp. Fiz. Nauk 152 399 (1987)
  96. Engeln R et al J. Chem. Phys. 107 4458 (1997)
  97. Westberg J, Wysocki G Appl. Phys. B 123 168 (2017)
  98. Gianella M et al J. Chem. Phys. 151 124202 (2019)
  99. Miles R B, Lempert W R, Forkey J N Meas. Sci. Technol. 12 R33 (2001)
  100. Boyd R W Nonlinear Optics (Boston: Academic Press, 1992)
  101. Akhmanov S A, Koroteev N I Metody Nelineinoi Optiki V Spektroskopii Rasseyaniya Sveta: Aktivnaya Spektroskopiya Rasseyaniya Sveta (Nonlinear Optics Methods In Light Scattering Spectroscopy: Active Light Scattering Spectroscopy) (Moscow: Nauka, 1981)
  102. Zhivotov V K, Rusanov V D, Fridman A A Diagnostika Neravnovesnoi Khimicheski Aktivnoi Plazmy (Diagnostics Of Non-Equilibrium Chemically Active Plasma) (Moscow: Energoatomizdat, 1985)
  103. Kiefer J, Ewart P Prog. Energy Combust. Sci. 37 525 (2011)
  104. Eckbreth A C Laser Diagnostics For Combustion Temperature And Species (Amsterdam: Gordon and Breach, 1996)
  105. Schrötter H W, Klöckner H W Raman Spectroscopy Of Gases And Liquids (Topics in Current Physics) Vol. 11 (Ed. A Weber) (Berlin: Springer-Verlag, 1979) p. 123; Translated into Russian, Schrötter H W, Klöckner H W Spektroskopiya Kombinatsionnogo Rasseyaniya V Gazakh I Zhidkostyakh (Ed. A Weber) (Moscow: Mir, 1982) p. 154
  106. Regnier P R, Moya F, Taran J P E AIAA J. 12 826 (1974)
  107. Prior Y Appl. Opt. 19 1741 (1980)
  108. Nibler J W, Knighten G V Raman Spectroscopy Of Gases And Liquids (Topics in Current Physics) Vol. 11 (Ed. A Weber) (Berlin: Springer-Verlag, 1979) p. 253; Translated into Russian, Nibler J W, Knighten G V Spektroskopiya Kombinatsionnogo Rasseyaniya V Gazakh I Zhidkostyakh (Ed. A Weber) (Moscow: Mir, 1979) p. 310
  109. Massabieaux B et al J. Phys. France 48 1939 (1987)
  110. Péalat M et al J. Chem. Phys. 82 4943 (1985)
  111. Doerk T et al Opt. Commun. 118 637 (1995)
  112. Ono R J. Phys. D 49 083001 (2016)
  113. Stauffer H U et al J. Chem. Phys. 145 124308 (2016)
  114. Ochkin V N, Tskhai S N Phys. Usp. 46 1214 (2003); Ochkin V N, Tskhai S N Usp. Fiz. Nauk 173 1253 (2003)
  115. Tskhai S N et al J. Raman Spectrosc. 32 177 (2001)
  116. van der Schans M et al Plasma Sources Sci. Technol. 26 115006 (2017)
  117. Goldberg B M et al Plasma Sources Sci. Technol. 25 045008 (2016)
  118. Abrams R L, Lind R C Opt. Lett. 2 94 (1978)
  119. Lucht R P, Farrow R L, Rakestraw D J J. Opt. Soc. Am. B 10 1508 (1993)
  120. Smith A P, Astill A G Appl. Phys. B 58 459 (1994)
  121. Tsay S J et al Opt. Lett. 20 1725 (1995)
  122. Nyholm K, Kaivola M, Aminoff C G Opt. Commun. 107 406 (1994)
  123. Germann G J, Rakestraw D J Science 264 1750 (1994)
  124. Reichardt T A et al Appl. Opt. 38 6951 (1999)
  125. Mischler B et al Combust. Sci. Technol. 119 375 (1996)
  126. Williams S et al J. Am. Chem. Soc. 114 9122 (1992)
  127. Walewski J et al Phys. Rev. A 64 063816 (2001)
  128. Reichardt T A, Giancola W C, Lucht R P Appl. Opt. 39 2002 (2000)
  129. Alwahabi Z T et al Eur. Phys. J. D 42 41 (2007)
  130. Sun Z W et al Appl. Phys. B 101 423 (2010)
  131. Pikalov V V Entsiklopediya Nizkotemperaturnoi Plazmy. Vvodnyi Tom (Encyclopedia Of Low-Temperature Plasma. Introductory Volume) Book 2 (Ed.-in-Chief V E Fortov, Comp. Ed. A F Aleksandrov et al) (Moscow: Nauka, 2000) p. 563
  132. Biberman L M, Vorob’ev V S, Yakubov I T Kinetics Of Nonequilibrium Low-Temperature Plasmas (New York: Consultants Bureau, 1987); Translated from Russian, Biberman L M, Vorob’ev V S, Yakubov I T Kinetika Neravnovesnoi Nizkotemperaturnoi Plazmy (Moscow: Nauka, 1982)
  133. Lebedeva V V Tekhnika Opticheskoi Spektroskopii (Technique Of Optical Spectroscopy) (Moscow: Izd. Mosk. Univ., 1977)
  134. Pikalov V V, Mel’nikova T S Tomografiya Plazmy (Plasma Tomography) (Novosibirsk: Nauka, 1995)
  135. Fujimoto T, Kazantsev S A Plasma Phys. Control. Fusion 39 1267 (1997)
  136. Bergert R, Mitic S Plasma Sources Sci. Technol. 28 115001 (2019)
  137. Ochkin V N, Savinov S Yu, Sobolev N N Electron-Excited Molecules In Nonequilibrium Plasma (Proc. of the Lebedev Physics Institute of the Academy of Sciences of the USSR) Vol. Vol. 179, Suppl. 2 (Ed. N N Sobolev) (Commack, NY: Nova Science Publ., 1989); Translated from Russian, Ochkin V N, Savinov S Yu, Sobolev N N Elektronno-vozbuzhdennye Molekuly V Neravnovesnoi Plazme (Trudy Fizicheskogo Instituta im. P.N. Lebedeva) Vol. 157 (Exec. Ed. N N Sobolev) (Moscow: Nauka, 1985) p. 6
  138. Bernatskiy A V et al Plasma Phys. Rep. 41 705 (2015); Bernatskiy A V et al Fiz. Plazmy 41 767 (2015)
  139. Behringer K, Fantz U New J. Phys. 2 23 (2000)
  140. Wünderlich D, Fantz U Atoms 4 (4) 26 (2016)
  141. Friedl R et al Plasma Sources Sci. Technol. 29 015014 (2020)
  142. Polak L S et al Eksperimental’nye I Teoreticheskie Issledovaniya Neravnovesnykh Fiziko-khimicheskikh Protsessov (Experimental And Theoretical Study Of Non-Equilibrium Physical And Chemical Processes) Issue 2 (Exec. Ed. L S Polak) (Moscow: Inst. Neftekhim. Sinteza im. A.V. Topchieva, 1974) p. 188
  143. Polak L S Neravnovesnaya Khimicheskaya Kinetika I Ee Primenenie (Nonequilibrium Chemical Kinetics And Its Applications) (Moscow: Nauka, 1979)
  144. Coburn J W, Chen M J. Appl. Phys. 51 3134 (1980)
  145. Bernatskiy A V, Ochkin V N, Kochetov I V J. Phys. D 49 395204 (2016)
  146. Lavrov B P et al Plasma Sources Sci. Technol. 12 576 (2003)
  147. Filippov A V et al Proc. SPIE 4450 285 (2002)
  148. Takashima S et al Appl. Phys. Lett. 75 2520 (1999)
  149. Takeuchi W et al J. Appl. Phys. 105 113305 (2009)
  150. Bokor J et al Phys. Rev. A 24 612 (1981)
  151. Magee R M et al Rev. Sci. Instrum. 83 10D701 (2012)
  152. Kulatilaka W D et al Combust. Flame 137 523 (2004)
  153. Cho D G, Han J, Moon S Y Appl. Phys. 20 550 (2020)
  154. Bernatskiy A V, Ochkin V N Plasma Sources Sci. Technol. 26 015002 (2017)
  155. Elliott D et al Rev. Sci. Instrum. 87 11E506 (2016)
  156. Galante M E, Magee R M, Scime E E Phys. Plasmas 21 055704 (2014)
  157. Lopaev D V et al J. Phys. D 50 075202 (2017)
  158. Proshina O V et al Plasma Sources Sci. Technol. 26 075005 (2017)
  159. Ibbotson D E, Flamm D L, Donnelly V M J. Appl. Phys. 54 5974 (1983)
  160. Hamann S et al Plasma Sources Sci. Technol. 23 045015 (2014)
  161. Rayar M et al J. Appl. Phys. 104 033304 (2008)
  162. Ivanov V V et al Plasma Phys. Rep. 26 980 (2000); Ivanov V V et al Fiz. Plazmy 26 1046 (2000)
  163. Takeda K et al J. Phys. D 46 464006 (2013)
  164. Gessel A F H, Grootel S C, Bruggeman P J Plasma Sources Sci. Technol. 22 055010 (2013)
  165. Teslja A, Dagdigian P J Chem. Phys. Lett. 400 374 (2004)
  166. Takeda K et al J. Phys. D 52 165202 (2019)
  167. Gragston M et al J. Appl. Phys. 125 203301 (2019)
  168. Reuter S et al Plasma Sources Sci. Technol. 21 024005 (2012)
  169. Sirotkin N A, Khlyustova A V, Titov V A Plasma Chem. Plasma Process. 40 187 (2020)
  170. Flikweert A J "Spectroscopy on metal-halide lamps under varying gravity conditions" PhD Thesis (Eindhoven: Technische Univ. Eindhoven, 2008)
  171. Tada S et al J. Appl. Phys. 88 1756 (2000)
  172. Mazouffre S et al Plasma Sources Sci. Technol. 10 168 (2001)
  173. Kuwano K et al J. Appl. Phys. 55 086101 (2016)
  174. Lelevkin V M, Otorbaev D K, Schram D C Physics Of Non-Equilibrium Plasmas (Amsterdam: North-Holland, 1992)
  175. Schwabedissen A et al J. Phys. D 34 1116 (2001)
  176. Kogelschatz M, Cunge G, Sadeghi N J. Phys. D 37 1954 (2004)
  177. Franzke J, Stancu D G, Niemax K Spectrochim. Acta B 58 1359 (2003)
  178. Aramaki M et al Jpn. J. Appl. Phys. 44 6759 (2005)
  179. Rousseau A, Teboul E, Sadeghi N Plasma Sources Sci. Technol. 13 166 (2004)
  180. Wu S et al Jpn. J. Appl. Phys. 52 071301 (2013)
  181. Benedikt J et al J. Appl. Phys. 94 6932 (2003)
  182. Arkhipenko V I, Simonchik L V Proc. SPIE 4450 1 (2002)
  183. Urabe K et al J. Phys. D 43 095201 (2010)
  184. Cadot G et al IEEE Trans. Plasma Sci. 42 10 (2014)
  185. Winter J et al Plasma Sources Sci. Technol. 24 025015 (2015)
  186. Niermann B et al Eur. Phys. J. D 60 489 (2010)
  187. Ferreira C M, Tatarova E Proc. SPIE 4450 99 (2002)
  188. Schroter S et al J. Phys. D 46 464009 (2013)
  189. Es-sebbar Et et al J. Appl. Phys. 126 073302 (2019)
  190. Gazeli K et al Plasma Sources Sci. Technol. 27 065003 (2018)
  191. Hoskinson A R et al J. Appl. Phys. 119 233301 (2016)
  192. Modiano S H et al Appl. Opt. 35 21 (1996)
  193. Hubner S et al J. Appl. Phys. 113 143306 (2013)
  194. Kaupe J, Coenen D, Mitic S Plasma Sources Sci. Technol. 27 105003 (2018)
  195. Penache M C "Study of high-pressure glow discharges generated by micro-structured electrode (MSE) arrays" Dissertation zur Erlangung des Doktorgrades der Naturwissenschaften (Frankfurt am Main: Univ. in Frankfurt am Main, 2002)
  196. Makabe T J. Phys. D 52 213002 (2019)
  197. Quandt E, Kraemer I, Dobele H F Europhys. Lett. 45 32 (1998)
  198. Quandt E et al Appl. Phys. Lett. 72 2394 (1998)
  199. Grangeon F et al Plasma Sources Sci. Technol. 8 448 (1999)
  200. Pandey A et al Plasma Phys. Control. Fusion 61 065003 (2019)
  201. Fantz U, Wünderlich D New J. Phys. 8 301 (2006)
  202. Agnello R et al Nucl. Fusion 60 026007 (2020)
  203. Ohkubo T et al Proc. SPIE 4450 318 (2002)
  204. Welzel S et al Plasma Sources Sci. Technol. 20 015020 (2011)
  205. Kulatilaka W D et al Opt. Lett. 31 3357 (2006)
  206. Pipa A V et al J. Phys. D 41 194011 (2008)
  207. Pipa A V et al J. Phys. D 45 085201 (2012)
  208. Smith J A et al J. Appl. Phys. 92 672 (2002)
  209. Lempert W R Combust. Flame 73 89 (1988)
  210. Hibert C et al J. Appl. Phys. 85 7070 (1999)
  211. Dilecce G et al J. Phys. D 45 125203 (2012)
  212. Martini L M et al Plasma Process. Polym. 11 232 (2014)
  213. Ochkin V N, Savinov S Yu, Sobolev N N J. Appl. Spectrosc. 26 647 (1977); Ochkin V N, Savinov S Yu, Sobolev N N Zh. Prikl. Spektrosk. 26 900 (1977)
  214. Verreycken T et al J. Phys. D 46 464004 (2013)
  215. Winter H T et al J. Phys. D 47 285401 (2014)
  216. Verreycken T et al Plasma Sources Sci. Technol. 22 055014 (2013)
  217. Wang C et al Appl. Spectrosc. 58 734 (2004)
  218. Kim S et al Meas. Sci. Technol. 14 1662 (2003)
  219. Li Z S et al Opt. Lett. 33 1836 (2008)
  220. Trubacheev E A Gazovye Lazery I Ikh Primenenie (Gas Lasers And Their Applications, Proc. of the Lebedev Physical Institute) Vol. 102 (Exec. Ed. N N Sobolev) (Moscow: Nauka, 1977) p. 3
  221. Hempel F et al Mol. Phys. 101 589 (2003)
  222. Luque J, Juchmann W, Jeffries J B J. Appl. Phys. 82 2072 (1997)
  223. Juchmann W, Luque J, Jeffries J B Appl. Opt. 39 3704 (2000)
  224. Wills J B et al J. Appl. Phys. 92 4213 (2002)
  225. Engeln R et al Chem. Phys. Lett. 310 405 (1999)
  226. Booth J-P et al Plasma Sources Sci. Technol. 29 115009 (2020)
  227. Busch C, Moller I, Soltwisch H Plasma Sources Sci. Technol. 10 250 (2001)
  228. Zimmermann S et al Microelectron. Eng. 88 671 (2011)
  229. Hempel F et al Plasma Sources Sci. Technol. 21 055001 (2012)
  230. Hamann S et al Plasma Sources Sci. Technol. 22 055022 (2013)
  231. Puth A et al Plasma Sources Sci. Technol. 29 035001 (2020)
  232. Susuki C, Sasaki K, Kadota K Jpn. J. Appl. Phys. 37 5763 (1998)
  233. Cunge G, Kogelschatz M, Sadeghi N Plasma Sources Sci. Technol. 13 522 (2004)
  234. Lang N et al Jpn. J. Appl. Phys. 50 08JB04 (2011)
  235. Bernatskiy A V, Lagunov V V, Ochkin V N<?tlsb> Phys. At. Nucl. 82 1382 (2019); Bernatskiy A V, Lagunov V V, Ochkin V N<?tlsb> Yad. Fiz. Inzh. 10 151 (2019)
  236. Bernatskiy A V, Lagunov V V, Ochkin V N Quantum Electron. 49 157 (2019); Bernatskiy A V, Lagunov V V, Ochkin V N Kvantovaya Elektron. 49 157 (2019)
  237. Lopatik D et al Contrib. Plasma Phys. 52 864 (2012)
  238. Vinogradov I P, Dinkelmann A, Lunk A J. Phys. D 37 3000 (2004)
  239. Hubner M et al Appl. Phys. Lett. 106 031102 (2015)
  240. Marinov D et al J. Phys. D 45 175201 (2012)
  241. Kerimkulov M A et al JETP Lett. 54 208 (1991); Kerimkulov M A et al Pis’ma Zh. Eksp. Teor. Fiz. 54 212 (1991)
  242. Hempel F et al Plasma Sources Sci. Technol. 12 S98 (2003)
  243. Ropcke J et al Plasma Chem. Plasma Process. 19 395 (1999)
  244. Lombardi G et al Plasma Sources Sci. Technol. 13 27 (2004)
  245. Mechold L et al Plasma Sources Sci. Technol. 10 52 (2001)
  246. Wu Y et al Appl. Phys. B 111 391 (2013)
  247. Sick V, Bui-Pham M N, Farrow R L Opt. Lett. 20 2036 (1995)
  248. Ouaras K, Righetti F, Cappelli M A J. Phys. D 52 195202 (2019)
  249. Penetrante B M et al Plasma Sources Sci. Technol. 6 251 (1997)
  250. Kim Y et al Appl. Phys. Lett. 87 011502 (2005)
  251. Winter J et al J. Phys. D 45 385201 (2012)
  252. Schulz-von der Gathen V et al Contrib. Plasma Phys. 47 510 (2007)
  253. Ono R, Oda T J. Phys. D 37 730 (2004)
  254. Reuter S et al Plasma Sources Sci. Technol. 21 034015 (2012)
  255. Moiseev T et al Plasma Sources Sci. Technol. 23 065033 (2014)
  256. Schmidt-Bleker A et al J. Phys. D 47 145201 (2014)
  257. Hübner M et al Rev. Sci. Instrum. 82 093102 (2011)
  258. Laroche G et al Rev. Sci. Instrum. 83 103508 (2012)
  259. Chatain A et al Plasma Sources Sci. Technol. 29 085019 (2020)
  260. Campargue A, Romanini D, Sadeghi N J. Phys. D 31 1168 (1998)
  261. Escribano R, Campargue A J. Chem. Phys. 108 6249 (1998)
  262. Boogaarts M G H et al Chem. Phys. Lett. 326 400 (2000)
  263. Lang N et al IEEE Trans. Plasma Sci. 37 2335 (2009)
  264. Gianella M et al Plasma Sources Sci. Technol. 27 095013 (2018)
  265. Klose S-J et al Plasma Sources Sci. Technol. 29 085011 (2020)
  266. Starikovskaia S M et al Proc. SPIE 4450 63 (2002)
  267. Akishev Yu S et al Proc. SPIE 4450 90 (2002)
  268. Foissac C et al J. Phys. D 33 2434 (2000)
  269. Sadeghi N, Foissac C, Supiot P J. Phys. D 34 1779 (2001)
  270. Stancu G D et al J. Phys. Chem. A 114 201 (2010)
  271. Jans E R et al J. Mol. Spectrosc. 365 111205 (2019)
  272. Hancock G et al J. Phys. D 39 1846 (2006)
  273. Pazyuk V S et al Quantum Electron. 31 363 (2001); Pazyuk V S et al Kvantovaya Elektron. 34 363 (2001)
  274. Sousa J S et al Appl. Phys. Lett. 93 011502 (2008)
  275. Sousa J S et al Eur. Phys. J. Appl. Phys. 47 22807 (2009)
  276. Gupta M et al Chem. Phys. Lett. 400 42 (2004)
  277. Sousa J S et al J. Appl. Phys. 109 123302 (2011)
  278. Kotterer M, Conceicao J, Maier J P Chem. Phys. Lett. 259 233 (1996)
  279. Yalin A P et al Plasma Sources Sci. Technol. 11 248 (2002)
  280. Pan F, Oka T Phys. Rev. A 36 2297 (1987)
  281. Liu K et al J. Phys. D 54 065201 (2021)
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