The state of the art and prospects for the development of quantitative optical spectroscopy methods for analyzing the composition of small chemically active components of a nonequilibrium plasma are discussed. The capabilities of the methods are considered in combination with the conditions of applicability, both for fundamental research in the fields of plasma physics and chemistry, and for monitoring the technological processes in reactors for the benefit of the energy sector, micro- and nano-electronics, medicine, the creation of optical coatings, and generating active radicals and excited particles.

Keywords: spectroscopy, plasma, equilibrium PACS: 29.30.−h, 52.25.Os, 52.70.−m (all) DOI: 10.3367/UFNe.2021.07.039026 URL: https://ufn.ru/en/articles/2022/10/d/ 001112536300004 2-s2.0-85182907351 2022PhyU...65.1071O Citation: Ochkin V N "Spectroscopy of small gas components of a nonequilibrium low-temperature plasma" Phys. Usp. 65 1071–1103 (2022) BibTexBibNote ® (generic)BibNote ® (RIS)MedlineRefWorks Received: 4th, June 2021, revised: 22nd, July 2021, accepted: 23rd, July 2021 Оригинал: Очкин В Н «Спектроскопия малых газовых составляющих неравновесной низкотемпературной плазмы» УФН 192 1145–1178 (2022); DOI: 10.3367/UFNr.2021.07.039026