This review presents the current status of nondestructive high-resolution X-ray diffractometry research on semiconductor structures with quantum dots (QDs). The formalism of the statistical theory of diffraction is used to consider the coherent and diffuse X-ray scattering in crystalline systems with nanoinclusions. The effects of shape, elastic deformations and of lateral and vertical QD correlation on the diffuse scattering angular distribution near reciprocal lattice nodes are considered. Using short-period and multicomponent superlattices as an example, the efficiency of data-assisted modeling in the quantitative analysis of nanostructured materials is demonstrated.

Keywords: high-resolution X-ray diffraction, coherent and diffuse scattering, superlattice, quantum dots PACS: 61.05.C−, 68.65.−k (all) DOI: 10.3367/UFNe.0185.201505a.0449 URL: https://ufn.ru/en/articles/2015/5/a/ 000360073200001 2-s2.0-84938884127 2015PhyU...58..419P Citation: Punegov V I "High-resolution X-ray diffraction in crystalline structures with quantum dots" Phys. Usp. 58 419–445 (2015) BibTexBibNote ® (generic)BibNote ® (RIS)MedlineRefWorks Received: 9th, January 2015, revised: 8th, February 2015, accepted: 10th, February 2015 Оригинал: Пунегов В И «Высокоразрешающая рентгеновская дифракция в кристаллических структурах с квантовыми точками» УФН 185 449–478 (2015); DOI: 10.3367/UFNr.0185.201505a.0449