Issues

 / 

2015

 / 

May

  

Reviews of topical problems


High-resolution X-ray diffraction in crystalline structures with quantum dots


Komi Scientific Center, Ural Branch of the Russian Academy of Sciences, ul. Chernova 3a, Syktyvkar, Respublika Komi, 167982, Russian Federation

This review presents the current status of nondestructive high-resolution X-ray diffractometry research on semiconductor structures with quantum dots (QDs). The formalism of the statistical theory of diffraction is used to consider the coherent and diffuse X-ray scattering in crystalline systems with nanoinclusions. The effects of shape, elastic deformations and of lateral and vertical QD correlation on the diffuse scattering angular distribution near reciprocal lattice nodes are considered. Using short-period and multicomponent superlattices as an example, the efficiency of data-assisted modeling in the quantitative analysis of nanostructured materials is demonstrated.

Fulltext is available at IOP
Keywords: high-resolution X-ray diffraction, coherent and diffuse scattering, superlattice, quantum dots
PACS: 61.05.C−, 68.65.−k (all)
DOI: 10.3367/UFNe.0185.201505a.0449
URL: https://ufn.ru/en/articles/2015/5/a/
Citation: Punegov V I "High-resolution X-ray diffraction in crystalline structures with quantum dots" Phys. Usp. 58 419–445 (2015)
BibTexBibNote ® (generic)BibNote ® (RIS)MedlineRefWorks

Received: 9th, January 2015, revised: 8th, February 2015, 10th, February 2015

Оригинал: Пунегов В И «Высокоразрешающая рентгеновская дифракция в кристаллических структурах с квантовыми точками» УФН 185 449–478 (2015); DOI: 10.3367/UFNr.0185.201505a.0449

References (190) ↓ Cited by (14) Similar articles (20)

  1. Wang Z M (Ed.) Self-Assembled Quantum Dots (New York: Springer, 2008)
  2. Alferov Zh I Rev. Mod. Phys. 73 767 (2001); Alferov Zh I Usp. Fiz. Nauk 172 1068 (2002)
  3. Arakawa Y, Sakaki H Appl. Phys. Lett. 40 939 (1982)
  4. Goldstein L et al. Appl. Phys. Lett. 47 1099 (1985)
  5. Bimberg D (Ed.) Semiconductor Nanostructures (Berlin: Springer, 2008)
  6. Blokland J H et al. Appl. Phys. Lett. 94 023107 (2009)
  7. Pavlov K M, Punegov V I, Faleev N N Zh. Eksp. Teor. Fiz. 107 1967 (1995); Pavlov K M, Punegov V I, Faleev N N JETP 80 1090 (1995)
  8. Punegov V I, Faleev N N Fiz. Tverd. Tela 38 255 (1996); Punegov V I, Faleev N N Phys. Solid State 38 143 (1996)
  9. Punegov V I i dr. Fiz. Tverd. Tela 38 264 (1996); Punegov V I et al. Phys. Solid State 38 148 (1996)
  10. Renaud G, Lazzari R, Leroy F Surf. Sci. Rep. 64 255 (2009)
  11. Holý V, Buljan M, Lechner R T Semicond. Sci. Technol. 26 064002 (2011)
  12. Favre-Nicolin V et al. Eur. Phys. J. Special Topics 208 189 (2012)
  13. Chrastina D et al. Nanotechnology 23 155702 (2012)
  14. Vartanyants I A et al. Phys. Rev. B 71 245302 (2005)
  15. Schmidbauer M X-Ray Diffuse Scattering From Self-Organized Mesoscopic Semiconductor Structures (Berlin: Springer, 2004)
  16. Pietsch U, Holý V, Baumbach T High-Resolution X-ray Scattering: From Thin Films To Lateral Nanostructures (New York: Springer, 2004)
  17. Als-Nielsen J, McMorrow D Elements Of Modern X-ray Physics (Hoboken: Wiley, 2011)
  18. Caciuffo R et al. Phys. Rep. 152 1 (1987)
  19. Bonse U, Hart M Appl. Phys. Lett. 7 238 (1965)
  20. Compton A H, Allison S K X-ray In Theory And Experiment (New York: D. Van Nostrand Co., 1935)
  21. Eisenberger P, Alexandropoulos N G, Platzman P M Phys. Rev. Lett. 28 1519 (1972)
  22. Larson B C, Schmatz W Phys. Rev. B 10 2307 (1974)
  23. Iida A, Kohra K Phys. Status Solidi A 51 533 (1979)
  24. Fewster P F, Andrew N L J. Phys. D Appl. Phys. 28 A97 (1995)
  25. Gartstein E, Mandelbrot M, Mogilyanski D J. Phys. D Appl. Phys. 57 (2001)
  26. Godwod K, Żymierska D, Auleytner J J. Phys. D Appl. Phys. 36 A148 (2003)
  27. Nesterets Ya I, Gureyev T E, Wilkins S W J. Phys. D Appl. Phys. 38 4259 (2005)
  28. Kato N Acta Cryst. A 36 763 (1980)
  29. Bushuev V A Kristallogr. 34 279 (1989); Bushuev V A Sov. Phys. Crystallogr. 34 163 (1989)
  30. Bushuev V A Fiz. Tverd. Tela 31 (11) 70 (1989); Bushuev V A Sov. Phys. Solid State 31 1877 (1989)
  31. Punegov V I Kristallogr. 35 576 (1990); Punegov V I Sov. Phys. Crystallogr. 35 336 (1990)
  32. Punegov V I, Petrakov A P, Tikhonov N A Phys. Status Solidi A 122 449 (1990)
  33. Punegov V I Phys. Status Solidi A 136 9 (1993)
  34. Punegov V I, Vishnjakov Y V J. Phys. D Appl. Phys. 28 A184 (1995)
  35. Punegov V I, Kharchenko A V Kristallogr. 42 1078 (1998); Punegov V I, Kharchenko A V Cryst. Rep. 43 1020 (1998)
  36. Pavlov K M, Punegov V I Acta Cryst. A 54 214 (1998)
  37. Pavlov K M, Punegov V I Acta Cryst. A 56 227 (2000)
  38. Nesterets Y I, Punegov V I Acta Cryst. A 56 540 (2000)
  39. Punegov V I, Lomov A A, Shcherbachev K D Phys. Status Solidi A 204 2620 (2007)
  40. Punegov V I, Nesterets Y I, Roshchupkin D V J. Appl. Cryst. 43 520 (2010)
  41. Holý V Phys. Status Solidi B 111 341 (1982)
  42. Holý V Phys. Status Solidi B 112 161 (1982)
  43. Dederichs P H Phys. Rev. B 4 1041 (1971)
  44. Krivoglaz M A Difraktsiya Rentgenovskikh Luchei i Neitronov v Neideal’nykh Kristallakh (Kiev: Naukova dumka, 1983); Krivoglaz M A X-Ray And Neutron Diffraction In Nonideal Crystals (Berlin: Springer, 1996)
  45. Bushuev V A Fiz. Tverd. Tela 37 249 (1995); Bushuev V A Phys. Solid State 37 136 (1995)
  46. Takagi S Acta Cryst. 15 1311 (1962)
  47. Punegov V I Pis’ma ZhTF 38 (11) 53 (2012); Punegov V I Tech. Phys. Lett. 38 523 (2012)
  48. Punegov V I Kristallogr. 58 652 (2013); Punegov V I Crystallogr. Rep. 58 663 (2013)
  49. Bushuev V A "Uglovoe raspredelenie intensivnostei dinamicheskoi difraktsii rentgenovskikh luchei v kristallakh s mikrodefektami v geometriyakh Laue i Bregga" Dep. VINITI №486-V88 (M.: VINITI, 1988)
  50. Punegov V I Kristallogr. 54 423 (2009); Punegov V I Crystallogr. Rep. 54 391 (2009)
  51. Punegov V I, Sivkov D V, Klad’ko V P Pis’ma ZhTF 37 (8) 41 (2011); Punegov V I, Sivkov D V, Klad’ko V P Tech. Phys. Lett. 37 364 (2011)
  52. Punegov V I, Sivkov D V Pis’ma ZhTF 39 (21) 60 (2013); Punegov V I, Sivkov D V Tech. Phys. Lett. 39 964 (2013)
  53. Punegov V I Pis’ma ZhTF 35 (1) 41 (2009); Punegov V I Tech. Phys. Lett. 35 20 (2009)
  54. Goncharskii A V, Kolpakov A V, Stepanov A A Obratnye Zadachi Rentgenovskoi Difraktometrii (Riga: Latviiskii un-t, 1992)
  55. Podorov S G, Punegov V I, Kusikov V A Fiz. Tverd. Tela 36 827 (1994); Podorov S G, Punegov V I, Kusikov V A Phys. Solid State 36 454 (1994)
  56. Podorov S G, Punegov V I Zh. Tekh. Fiz. 69 (3) 39 (1999); Podorov S G, Punegov V I Tech. Phys. 44 299 (1999)
  57. Krasil’nikov A G, Punegov V I, Faleev N N Pis’ma ZhTF 30 (12) 6 (2004); Krasil’nikov A G, Punegov V I, Faleev N N Tech. Phys. Lett. 30 489 (2004)
  58. Chuev M A, Lomov A A, Imamov R M Kristallogr. 51 208 (2006); Chuev M A, Lomov A A, Imamov R M Crystallogr. Rep. 51 178 (2006)
  59. Sutyrin A G, Imamov R M Kristallogr. 56 61 (2011); Sutyrin A G, Imamov R M Crystallogr. Rep. 56 57 (2011)
  60. Volkov Yu O i dr. Kristallogr. 58 146 (2013); Volkov Yu O et al. Crystallogr. Rep. 58 160 (2013)
  61. Bushuev V A, Sergeev A A Pis’ma ZhTF 25 (3) 1 (1999); Bushuev V A, Sergeev A A Tech. Phys. Lett. 25 83 (1999)
  62. Hol<$>acute {rm y}<$> V, Pietsch U, Baumbach T High-Resolution X-Ray Scattering From Thin Films And Multilayers (Berlin: Springer, 1999)
  63. Darhuber A A et al. Europhys. Lett. 32 131 (1995)
  64. Darhuber A A et al. Physica B 227 11 (1996)
  65. Holý V et al. Phys. Rev. B 52 8348 (1995)
  66. Holý V et al. Solid-State Electron. 40 373 (1996)
  67. Darhuber A A et al. Phys. Rev. B 58 4825 (1998)
  68. Baribeau J-M J. Cryst. Growth 157 52 (1995)
  69. Darhuber A A et al. Phys. Rev. B 55 15652 (1997)
  70. Holý V et al. Phys. Rev. B 58 7934 (1998)
  71. Darhuber A A et al. Physica E 2 789 (1998)
  72. Bauer G, Darhuber A A, Holý V Cryst. Res. Technol. 34 197 (1999)
  73. Darhuber A A et al. Appl. Phys. Lett. 70 955 (1997)
  74. Darhuber A A et al. Thin Solid Films 306 198 (1997)
  75. Faleev N et al. Jpn. J. Appl. Phys. 38 818 (1999)
  76. Faleev N N i dr. Fiz. Tekh. Poluprovodn. 33 1359 (1999); Faleev N N et al. Semiconductors 33 1229 (1999)
  77. Faleev N N i dr. Fiz. Tekh. Poluprovodn. 35 969 (2001); Faleev N N et al. Semiconductors 35 932 (2001)
  78. Holý V et al. Physica B 283 65 (2000)
  79. Springholz G et al. Appl. Phys. Lett. 82 799 (2003)
  80. Lechner R T et al. Appl. Phys. Lett. 84 885 (2004)
  81. Díaz B et al. Nanotechnology 23 015604 (2012)
  82. Oshima R et al. J. Cryst. Growth 301 - 302 776 (2007)
  83. Manna U et al. J. Appl. Phys. 111 033516 (2012)
  84. Schmidbauer M et al. Phys. Rev. Lett. 96 066108 (2006)
  85. Hanke M et al. Appl. Phys. Lett. 94 203105 (2009)
  86. Shoji Y et al. Physica E 42 2768 (2010)
  87. Kladko V P et al. Phys. Status Solidi A 204 2567 (2007)
  88. Kladko V et al. Phys. Status Solidi A 206 1748 (2009)
  89. Novák J et al. J. Appl. Phys. 98 073517 (2005)
  90. Grützmacher D et al. Nano Lett. 7 3150 (2007)
  91. Holý V et al. Phys. Rev. B 79 035324 (2009)
  92. Maranganti R, Sharma P Handbook Of Theoretical And Computational Nanotechnology Vol. 1 (Eds M Rieth, W Schommers) (New York: Am. Sci. Publ., 2005) p. 1, Ch. 118
  93. Benabbas T, Androussi Y, Lefebvre A J. Appl. Phys. 86 1945 (1999)
  94. Daruka I et al. Phys. Rev. B 60 R2150 (1999)
  95. Yang M, Xu S J, Wang J Appl. Phys. Lett. 92 083112 (2008)
  96. Andreev A D et al. J. Appl. Phys. 86 297 (1999)
  97. Nenashev A V, Dvurechenskii A V J. Appl. Phys. 107 064322 (2010)
  98. Yang M, Sturm J C, Prevost J Phys. Rev. B 56 1973 (1997)
  99. Aqua J-N et al. Phys. Rep. 522 59 (2013)
  100. Maia A D B et al. J. Phys. D Appl. Phys. 45 225104 (2012)
  101. Punegov V I, Kolosov S I, Pavlov K M Pis’ma ZhTF 32 (18) 65 (2006); Punegov V I, Kolosov S I, Pavlov K M Tech. Phys. Lett. 32 809 (2006)
  102. Hesse A et al. Phys. Rev. B 66 085321 (2002)
  103. Ulloa J M et al. Phys. Rev. B 81 165305 (2010)
  104. Ulloa J M, Bozkurt M, Koenraad P Solid State Commun. 149 1410 (2009)
  105. Ulloa J M et al. J. Appl. Phys. 112 074311 (2012)
  106. Faleev N N, Honsberg C, Punegov V I J. Appl. Phys. 113 163506 (2013)
  107. Zernike F, Prins J A Z. Phys. 41 184 (1927)
  108. Hosemann R Z. Phys. 128 465 (1950)
  109. Punegov V I Pis’ma ZhTF 18 (4) 66 (1992); Punegov V I Sov. Tech. Phys. Lett. 18 120 (1992)
  110. Punegov V I Izv. Komi NTs UrO RAN (1) 11 (2010)
  111. Pal D, Towe E, Chen S Appl. Phys. Lett. 78 4133 (2001)
  112. Punegov V I Pis’ma ZhTF 37 (15) 8 (2011); Punegov V I Tech. Phys. Lett. 37 696 (2011)
  113. Buljan M et al. Phys. Rev. B 79 035310 (2009)
  114. Schmidbauer M, Hanke M, Köhler R Phys. Rev. B 71 115323 (2005)
  115. Kegel I et al. Appl. Phys. Lett. 74 2978 (1999)
  116. Bushuev V A Poverkhnost’. Rentgenovskie, Sinkhrotronnye Neitronnye Issledovaniya (9) 29 (2007); Bushuev V A J. Surf. Invest. X-ray Synchrotron Neutron Tech. 1 522 (2007)
  117. Eads J L, Millane R P Acta Cryst. A 57 507 (2001)
  118. Punegov V I, Lomov A A Pis’ma ZhTF 34 (6) 30 (2008); Punegov V I, Lomov A A Tech. Phys. Lett. 34 238 (2008)
  119. Pukite P R, Lent C S, Cohen P I Surf. Sci. 161 39 (1985)
  120. Kegel I et al. Phys. Rev. B 60 2516 (1999)
  121. Punegov V I Pis’ma ZhTF 39 (10) 54 (2013); Punegov V I Tech. Phys. Lett. 39 475 (2013)
  122. Steward E G Fourier Optics: An Introduction (Chichester: E. Horwood, 1983)
  123. Köhler R et al. Semiconductor Nanostructures (Ed. D Bimberg) (Berlin: Springer, 2008) p. 97
  124. Punegov V I, Nesterets Ya I Pis’ma ZhTF 20 (16) 62 (1994); Punegov V I, Nesterets Ya I Tech. Phys. Lett. 20 674 (1994)
  125. Punegov V I, Faleev N N Pis’ma ZhETF 92 483 (2010); Punegov V I, Faleev N N JETP Lett. 92 437 (2010)
  126. Punegov V I, Faleev N N Izv. RAN Ser. Fiz. 75 42 (2011); Punegov V I, Faleev N N Bull. Russ. Acad. Sci. Phys. 75 36 (2011)
  127. Stepanov S, Forrest R J. Appl. Cryst. 41 958 (2008)
  128. Lomov A A i dr. Kristallogr. 55 196 (2010); Lomov A A et al. Crystallogr. Rep. 55 182 (2010)
  129. Punegov V I, Lomov A A Pis’ma ZhTF 36 (3) 60 (2010); Punegov V I, Lomov A A Tech. Phys. Lett. 36 122 (2010)
  130. Boulle A, Conchon F, Guinebretière R Acta Cryst. A 62 11 (2006)
  131. Ida T, Ando M, Toraya H J. Appl. Cryst. 33 1311 (2000)
  132. Punegov V I Zh. Tekh. Fiz. 82 (1) 40 (2012); Punegov V I Tech. Phys. 57 37 (2012)
  133. Kaganer V M et al. Phys. Rev. B 55 1793 (1997)
  134. Kaganer V M, Sabelfeld K K Acta Cryst. A 70 457 (2014)
  135. Punegov V I Pis’ma ZhTF 34 (20) 8 (2008); Punegov V I Tech. Phys. Lett. 34 864 (2008)
  136. Springholz G Comptes Rendus Physique 6 89 (2005)
  137. Springholz G, Holý V Lateral Alignment Of Epitaxial Quantum Dots (Ed. O Schmidt) (Berlin: Springer, 2007) p. 247
  138. Xie Q et al. Phys. Rev. Lett. 75 2542 (1995)
  139. Legrand B et al. Appl. Phys. Lett. 74 2608 (1999)
  140. Wasilewski Z R, Fafard S, McCaffrey J P J. Cryst. Growth 201 - 202 1131 (1999)
  141. Punegov V I Fiz. Tverd. Tela 32 2476 (1990); Punegov V I Sov. Phys. Solid State 32 1438 (1990)
  142. Punegov V I, Pavlov K M Kristallogr. 38 (5) 34 (1993); Punegov V I, Pavlov K M Crystallogr. Rep. 38 602 (1993)
  143. Holý V et al. Superlattices Microstruct. 12 25 (1992)
  144. Punegov V I Kristallogr. 41 246 (1996); Punegov V I Crystallogr. Rep. 41 196 (1996)
  145. Nesterets Ya I, Punegov V I Kristallogr. 44 422 (1999); Nesterets Ya I, Punegov V I Crystallogr. Rep. 44 382 (1999)
  146. Nesterets Ya I, Punegov V I Kristallogr. 44 980 (1999); Nesterets Ya I, Punegov V I Crystallogr. Rep. 44 913 (1999)
  147. Nesterets Ya I i dr. Zh. Tekh. Fiz. 69 (2) 44 (1999); Nesterets Ya I et al. Tech. Phys. 44 171 (1999)
  148. Punegov V I Metallofizika Noveishie Tekhnologii 32 33 (2010); Punegov V I Phys. Met. Adv. Technol. 5 33 (2010)
  149. Leclere C et al. J. Appl. Phys. 113 034311 (2013)
  150. Dhomkar S et al. Appl. Phys. Lett. 103 181905 (2013)
  151. Dhomkar S et al. Solar Energy Mater. Solar Cells 117 604 (2013)
  152. Rawle J L, Howes P B Surf. Rev. Lett. 10 525 (2003)
  153. Rawle J L, Howes P B Eur. Phys. J. Spec. Topics 167 47 (2009)
  154. Authier A Dynamical Theory Of X-Ray Diffraction (New York: Oxford Univ. Press, 2001)
  155. Klad’ko V P Metallofizika Noveishie Tekhnologii 26 1255 (2004)
  156. Mazur Yu I et al. J. Appl. Phys. 99 023517 (2006)
  157. De Seta M et al. J. Appl. Phys. 102 043518 (2007)
  158. Krost A et al. Appl. Phys. Lett. 68 785 (1996)
  159. Krost A et al. Appl. Phys. Lett. 75 2957 (1999)
  160. Xu S et al. Appl. Phys. Lett. 77 2130 (2000)
  161. Pal D et al. J. Cryst. Growth 233 34 (2001)
  162. Pal D, Towe E, Chen S J Appl. Phys. Lett. 78 4133 (2001)
  163. Wang H et al. Chin. Phys. Lett. 18 810 (2001)
  164. Krishna S et al. Appl. Phys. Lett. 80 3898 (2002)
  165. Pashaev E M et al. Phys. Status Solidi A 195 204 (2003)
  166. Pashaev E M i dr. Mikroelektronika 31 367 (2002); Pashaev E M et al. Russ. Microelectron. 31 310 (2002)
  167. Zaitsev A A i dr. Mikroelektronika 33 35 (2004); Zaitsev A A et al. Russ. Microelectron. 33 27 (2004)
  168. Huang X-Q et al. J. Cryst. Growth 270 364 (2004)
  169. Tatebayashi J et al. J. Phys. D Appl. Phys. 42 073002 (2009)
  170. Bailey C G et al. Appl. Phys. Lett. 95 203110 (2009)
  171. Carrington P J et al. Physica B 407 1493 (2012)
  172. Holy V et al. Phys. Rev. B 63 205318 (2001)
  173. Darhuber A A et al. J. Phys. D Appl. Phys. 28 A195 (1995)
  174. Baumbach T, Lubbert D, Gailhanou M J. Appl. Phys. 87 3744 (2000)
  175. Punegov V I Poverkhnost’. Rentgenovskie, Sinkhrotronnye Neitronnye Issledovaniya (1) 77 (2002)
  176. Kolosov S I, Punegov V I Kristallogr. 50 401 (2005); Kolosov S I, Punegov V I Crystallogr. Rep. 50 375 (2005)
  177. Punegov V I i dr. Pis’ma ZhTF 32 (18) 65 (2006); Punegov V I et al. Tech. Phys. Lett. 32 809 (2006)
  178. Punegov V I, Kolosov S I Kristallogr. 52 215 (2007); Punegov V I, Kolosov S I Crystallogr. Rep. 52 191 (2007)
  179. Punegov V I i dr. Pis’ma ZhTF 33 (3) 64 (2007); Punegov V I et al. Tech. Phys. Lett. 33 125 (2007)
  180. Punegov V I, Kolosov S I, Pavlov K M Acta Cryst. A 70 64 (2014)
  181. Punegov V I Pis’ma ZhTF 30 (1) 3 (2004); Punegov V I Tech. Phys. Lett. 30 1 (2004)
  182. Li J H et al. Phys. Rev. B 66 115312 (2002)
  183. Li J H et al. J. Appl. Phys. 107 123504 (2010)
  184. Wintersberger E et al. Appl. Phys. Lett. 96 131905 (2010)
  185. Bazzan M et al. J. Appl. Phys. 106 104121 (2009)
  186. Roshchupkin D V, Irzhak D V, Antipov V V J. Appl. Phys. 105 024112 (2009)
  187. Lomov A A i dr. Kristallogr. 57 232 (2012); Lomov A A et al. Crystallogr. Rep. 57 185 (2012)
  188. Punegov V I Pis’ma ZhTF 38 (11) 53 (2012); Punegov V I Tech. Phys. Lett. 38 523 (2012)
  189. Punegov V I Kristallogr. 58 652 (2013); Punegov V I Crystallogr. Rep. 58 663 (2013)
  190. Lomov A A et al. J. Appl. Cryst. 47 1614 (2014)

© 1918–2020 Uspekhi Fizicheskikh Nauk
Email: ufn@ufn.ru Editorial office contacts About the journal Terms and conditions