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High-resolution X-ray diffraction in crystalline structures with quantum dots


Komi Scientific Center, Ural Branch of the Russian Academy of Sciences, ul. Chernova 3a, Syktyvkar, Respublika Komi, 167982, Russian Federation

This review presents the current status of nondestructive high-resolution X-ray diffractometry research on semiconductor structures with quantum dots (QDs). The formalism of the statistical theory of diffraction is used to consider the coherent and diffuse X-ray scattering in crystalline systems with nanoinclusions. The effects of shape, elastic deformations and of lateral and vertical QD correlation on the diffuse scattering angular distribution near reciprocal lattice nodes are considered. Using short-period and multicomponent superlattices as an example, the efficiency of data-assisted modeling in the quantitative analysis of nanostructured materials is demonstrated.

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Fulltext is also available at DOI: 10.3367/UFNe.0185.201505a.0449
Keywords: high-resolution X-ray diffraction, coherent and diffuse scattering, superlattice, quantum dots
PACS: 61.05.C−, 68.65.−k (all)
DOI: 10.3367/UFNe.0185.201505a.0449
URL: https://ufn.ru/en/articles/2015/5/a/
000360073200001
2-s2.0-84938884127
2015PhyU...58..419P
Citation: Punegov V I "High-resolution X-ray diffraction in crystalline structures with quantum dots" Phys. Usp. 58 419–445 (2015)
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Received: 9th, January 2015, revised: 8th, February 2015, 10th, February 2015

Оригинал: Пунегов В И «Высокоразрешающая рентгеновская дифракция в кристаллических структурах с квантовыми точками» УФН 185 449–478 (2015); DOI: 10.3367/UFNr.0185.201505a.0449

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