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Conferences and symposia


Parallel fabrication of nanostructures via atom projection


Institute of Spectroscopy, Russian Academy of Sciences, ul. Fizicheskaya 5, Troitsk, Moscow, 108840, Russian Federation

A scientific session of the Physical Sciences Division of the Russian Academy of Sciences (RAS) was held in the Conference Hall of the P N Lebedev Physical Institute, RAS on 31 January 2007. The following reports were presented at the session:
(1) Koshelev K N (Institute of Spectroscopy, RAS, Troitsk, Moscow region), Banine V E (ASML, Veldhoven, the Netherlands), Salashchenko N N (Institute for the Physics of Microstructures, RAS, Nizhny Novgorod). ’Research and development in short-wave radiation sources for new-genera- tion lithography’;
(2) Balykin V I (Institute of Spectroscopy, RAS, Troitsk, Moscow region). ’Parallel fabrication of nanostructures via atom projection’;
(3) Lozovik Yu E, Popov A M (Institute of Spectroscopy, RAS, Troitsk, Moscow region). ’Properties and nanotechnological applications of nanotubes’.
An abridge version of the reports is given below.

Fulltext pdf (2.1 MB)
Fulltext is also available at DOI: 10.1070/PU2007v050n07ABEH006322
PACS: 01.10.Fv, 81.07.−b, 81.16.−c, 81.16.Ta (all)
DOI: 10.1070/PU2007v050n07ABEH006322
URL: https://ufn.ru/en/articles/2007/7/g/
000250847100008
2-s2.0-35948983712
2007PhyU...50..744B
Citation: Balykin V I "Parallel fabrication of nanostructures via atom projection" Phys. Usp. 50 744–749 (2007)
BibTexBibNote ® (generic)BibNote ® (RIS)MedlineRefWorks

Оригинал: Балыкин В И «Атомно-проекционная параллельная фабрикация наноструктур» УФН 177 780–786 (2007); DOI: 10.3367/UFNr.0177.200707i.0780

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