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Reviews of topical problems


Generation of cluster beams


Joint Institute for High Temperatures, Russian Academy of Sciences, ul. Izhorskaya 13, Bldg. 2, Moscow, 125412, Russian Federation

The processes are considered in a cluster plasma consisting of a dense plasma of a buffer gas and a metal admixture. These processes involving clusters in a gas or plasma include nucleation processes in a supersaturated vapor, formation of metallic clusters in a dense gas from metal-containing compounds, and chemical processes in the course of this conversion, processes of cluster charging in a plasma and under the action of an electron beam. The basic methods are analyzed for cluster generation including formation and growth of clusters in free jet expansion of a gas, under laser action on the metallic surface, and growth of clusters in a plasma resulted from injection of metal-containing molecules into a plasma. Some applications of cluster beams are discussed, which include fabrication of thin films, new materials, and creation of a hot nonuniform plasma.

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Fulltext is also available at DOI: 10.1070/PU2003v046n06ABEH001381
PACS: 36.40.Sx, 36.40.Wa, 52.50.Jm, 61.46.+w (all)
DOI: 10.1070/PU2003v046n06ABEH001381
URL: https://ufn.ru/en/articles/2003/6/b/
000185710500002
Citation: Smirnov B M "Generation of cluster beams" Phys. Usp. 46 589–628 (2003)
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Оригинал: Смирнов Б М «Генерация кластерных пучков» УФН 173 609–648 (2003); DOI: 10.3367/UFNr.0173.200306b.0609

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