The processes are considered in a cluster plasma consisting of a dense plasma of a buffer gas and a metal admixture. These processes involving clusters in a gas or plasma include nucleation processes in a supersaturated vapor, formation of metallic clusters in a dense gas from metal-containing compounds, and chemical processes in the course of this conversion, processes of cluster charging in a plasma and under the action of an electron beam. The basic methods are analyzed for cluster generation including formation and growth of clusters in free jet expansion of a gas, under laser action on the metallic surface, and growth of clusters in a plasma resulted from injection of metal-containing molecules into a plasma. Some applications of cluster beams are discussed, which include fabrication of thin films, new materials, and creation of a hot nonuniform plasma.

PACS: 36.40.Sx, 36.40.Wa, 52.50.Jm, 61.46.+w (all) DOI: 10.1070/PU2003v046n06ABEH001381 URL: https://ufn.ru/en/articles/2003/6/b/ 000185710500002 Citation: Smirnov B M "Generation of cluster beams" Phys. Usp. 46 589–628 (2003) BibTexBibNote ® (generic)BibNote ® (RIS)MedlineRefWorks Оригинал: Смирнов Б М «Генерация кластерных пучков» УФН 173 609–648 (2003); DOI: 10.3367/UFNr.0173.200306b.0609