Single-electron structures of supersmall Al/AlO<sub>x</sub>/Al tunnelling junctions: manufacturing techniques and experimental results

D.E. Presnov^a, V.A. Krupenin^b, S.V. Lotkhov^b
^aLebedev Physical Institute, Russian Academy of Sciences, Leninsky prosp. 53, Moscow, 119991, Russian Federation
^bLomonosov Moscow State University, Faculty of Physics, Leninskie Gory 1 build. 2, Moscow, 119991, Russian Federation

PACS: 71.27.+a, 73.40.Rw (all)
DOI: 10.1070/PU1996v039n08ABEH001547
URL: https://ufn.ru/en/articles/1996/8/v/
Citation: Presnov D E, Krupenin V A, Lotkhov S V "Single-electron structures of supersmall Al/AlO_x/Al tunnelling junctions: manufacturing techniques and experimental results" Phys. Usp. 39 847–848 (1996)

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Оригинал: Преснов Д Е, Крупенин В А, Лотхов С В «Одноэлектронные структуры на основе сверхмалых туннельных переходов Al/AlO_x/Al: технология изготовления, экспериментальные результаты» УФН 166 906–907 (1996); DOI: 10.3367/UFNr.0166.199608v.0906

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Single-electron structures of supersmall Al/AlOx/Al tunnelling junctions: manufacturing techniques and experimental results

Single-electron structures of supersmall Al/AlO_x/Al tunnelling junctions: manufacturing techniques and experimental results