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Неупругое распыление твердых тел ионами

,  а, ,
а Институт ядерного синтеза Российского научного центра «Курчатовский институт», пл. Курчатова 1, Москва, 123182, Российская Федерация

Обзор теоретических и экспериментальных работ по распылению в результате сильного возбуждения электронной подсистемы твердых тел быстрыми и многозарядньми ионами. Систематизированы основные закономерности, установленные в экспериментах по неупругому распылению. Рассматриваются зависимости коэффициента неупругого распыления от энергии и заряда налетающих ионов, от структуры мишени, а также дифференциальные характеристики распыленных частиц. Обсуждаются теоретические работы, посвященные описанию области возбуждения электронов, ee релаксации, передачи энергии электронов атомам мишени и моделям неупругого распыления. Кратко изложена история вопроса, возможные практические применения неупругого распыления и его связь с другими явлениями. Табл. 1. Ил. 19. Библиогр. ссылок 107.

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English fulltext is available at DOI: 10.1070/PU1988v031n11ABEH005646
PACS: 68.49.Sf
DOI: 10.3367/UFNr.0156.198811c.0477
URL: https://ufn.ru/ru/articles/1988/11/c/
Цитата: Баранов И А, Мартыненко Ю В, Цепелевич С О, Явлинский Ю Н "Неупругое распыление твердых тел ионами" УФН 156 477–511 (1988)
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English citation: Baranov I A, Martynenko Yu V, Tsepelevich S O, Yavlinskii Yu N “Inelastic sputtering of solids by ions” Sov. Phys. Usp. 31 1015–1034 (1988); DOI: 10.1070/PU1988v031n11ABEH005646

Список литературы (106) Статьи, ссылающиеся на эту (113) ↓ Похожие статьи (20)

  1. Medvedev N, Voronkov R, Volkov A E Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 547 165218 (2024)
  2. Ghosh S, Karmakar P Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 516 1 (2022)
  3. Liu Y, Han X et al Nanomaterials 12 4028 (2022)
  4. Xiao T P, Bennett Ch H et al IEEE Trans. Nucl. Sci. 69 406 (2022)
  5. Wiss T, Benedetti A, De Bona E Comprehensive Nuclear Materials (2020) p. 125
  6. Frolova S V, Vlokh G V et al Phys. Atom. Nuclei 83 1200 (2020)
  7. Lang M, Djurabekova F et al Comprehensive Nuclear Materials (2020) p. 485
  8. Dalkarov O  D, Negodaev M  A et al Phys. Rev. Accel. Beams 22 (3) (2019)
  9. Komarov F F Успехи физических наук 187 465 (2017)
  10. Kazanskiy N L, Kolpakov V A et al Instrum Exp Tech 60 748 (2017)
  11. Zhang K, Hu Zh et al Applied Surface Science 390 941 (2016)
  12. Wesch W, Schnohr C S Springer Series in Surface Sciences Vol. Ion Beam Modification of SolidsSwift Heavy Ion Irradiation of Crystalline Semiconductors61 Chapter 9 (2016) p. 365
  13. Khara G S, Murphy S T et al J. Phys.: Condens. Matter 28 395201 (2016)
  14. Dufour Ch, Toulemonde M Springer Series in Surface Sciences Vol. Ion Beam Modification of SolidsModels for the Description of Track Formation61 Chapter 2 (2016) p. 63
  15. Matveev V I, Makarov D N, Kapustin S N Tech. Phys. Lett. 41 771 (2015)
  16. Sall M, Monnet I et al J Mater Sci 50 5214 (2015)
  17. Yanin S N IOP Conf. Ser.: Mater. Sci. Eng. 81 012061 (2015)
  18. Markidonov A V, Starostenkov M D et al Phys. Solid State 57 1551 (2015)
  19. Zhang J, Toulemonde M et al J. Mater. Res. 30 2456 (2015)
  20. Markidonov A V, Starostenkov M D, Poletaev G M Bull. Russ. Acad. Sci. Phys. 79 1089 (2015)
  21. Melnikov S P, Sizov A N et al Lasers with Nuclear Pumping Chapter 10 (2015) p. 373
  22. Martynenko Yu V, Korshunov S N, Skorlupkin I D Jetp Lett. 98 853 (2014)
  23. Ochedowski O, Osmani O et al Nat Commun 5 (1) (2014)
  24. Rethfeld B, Rämer A et al Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 327 78 (2014)
  25. Nakajima K, Morita Y et al Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 332 117 (2014)
  26. Li W, Rodriguez M D et al Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 302 40 (2013)
  27. Osmani O, Medvedev N et al Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 317 72 (2013)
  28. Wiss T Comprehensive Nuclear Materials (2012) p. 465
  29. Yanin S 2012 7th International Forum on Strategic Technology (IFOST), (2012) p. 1
  30. Toulemonde M, Assmann W et al Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 277 28 (2012)
  31. Osmani O, Medvedev N et al Phys. Rev. B 84 (21) (2011)
  32. Osmani O, Lebius H et al Laser Part. Beams 28 229 (2010)
  33. Huang M, Schwen D, Averback R S Journal of Nuclear Materials 399 175 (2010)
  34. Medvedev N, Osmani O et al Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 268 3160 (2010)
  35. Didyk A Yu, Khalil A S Phys. Part. Nuclei 41 230 (2010)
  36. Osmani O, Medvedev N et al e-J. Surf. Sci. Nanotechnol. 8 278 (2010)
  37. Matveev V I, Kochkin S A J. Exp. Theor. Phys. 110 722 (2010)
  38. Medvedev N A, Volkov A E et al Phys. Rev. B 82 (12) (2010)
  39. Amirkhanov I V, Didyk A Yu et al J. Synch. Investig. 3 402 (2009)
  40. Chettah A, Kucal H et al Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 267 2719 (2009)
  41. Touboul A, Carvalho A et al Defects in Microelectronic Materials and Devices (2008)
  42. Akcöltekin E, Akcöltekin S et al New J. Phys. 10 053007 (2008)
  43. Amirkhanov I V, Didyk A Yu et al J. Synch. Investig. 2 331 (2008)
  44. Assmann W, Toulemonde M, Trautmann Ch Topics in Applied Physics Vol. Sputtering by Particle BombardmentElectronic Sputtering with Swift Heavy Ions110 Chapter 7 (2007) p. 401
  45. Meshakin V I, Budnik A P At Energy 103 605 (2007)
  46. Amirkhanov I V, Didyk A Yu et al Phys. Part. Nuclei Lett. 3 37 (2006)
  47. Amirkhanov I V, Didyk A Yu et al Phys. Part. Nuclei Lett. 3 320 (2006)
  48. Amirkhanov I V, Didyk A Yu et al Crystallogr. Rep. 51 S32 (2006)
  49. Kamarou A, Wesch W et al Phys. Rev. B 73 (18) (2006)
  50. Amirkhanov I V, Cheblukov Yu N et al Phys. Part. Nuclei 37 837 (2006)
  51. Baranov I, Kirillov S et al Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 230 495 (2005)
  52. Meftah A, Costantini J M et al Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 237 563 (2005)
  53. Skuratov V A, Zinkle S J et al Surface and Coatings Technology 196 56 (2005)
  54. Matveev V I, Kochkin S A Tech. Phys. 49 345 (2004)
  55. Volkov A E, Sorokin M V Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 209 184 (2003)
  56. Toulemonde M, Assmann W et al Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 212 346 (2003)
  57. Sorokin M V, Volkov A E Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 205 746 (2003)
  58. Komarov F F Uspekhi Fizicheskikh Nauk 173 1287 (2003)
  59. Awazu K, Kawazoe H 94 6243 (2003)
  60. Ghosh S, Avasthi D K et al Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 212 431 (2003)
  61. Matveev V I, Kochkin S A Tech. Phys. Lett. 29 1048 (2003)
  62. Mieskes H D, Assmann W et al Phys. Rev. B 67 (15) (2003)
  63. Volkov A E, Korolev D N Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 209 98 (2003)
  64. Bringa E M, Johnson R E Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 193 365 (2002)
  65. Baranov I, Brunelle A et al Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 187 451 (2002)
  66. Ronchi C, Wiss T 92 5837 (2002)
  67. Volkov A E, Borodin V A Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 193 381 (2002)
  68. Miterev A M Uspekhi Fizicheskikh Nauk 172 1131 (2002)
  69. Baranov I, Håkansson P et al Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 193 798 (2002)
  70. Matveev V I Tech. Phys. 47 767 (2002)
  71. Toulemonde M, Assmann W et al Phys. Rev. Lett. 88 (5) (2002)
  72. Volkov A E Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 193 376 (2002)
  73. Kuanyshev V T, Belykh T A et al Radiation Measurements 33 503 (2001)
  74. Baranov I, Kirillov S et al Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 183 232 (2001)
  75. Kissel R, Urbassek H M Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 180 293 (2001)
  76. Kissel R, Urbassek H M International Journal of Mass Spectrometry 208 29 (2001)
  77. Matveev V I Tech. Phys. Lett. 27 761 (2001)
  78. Ghosh S, Tripathi A et al Radiation Effects and Defects in Solids 154 151 (2001)
  79. Pereira J A M, da Silveira E F Phys. Rev. Lett. 84 5904 (2000)
  80. Berthelot A, Hémon S et al Philosophical Magazine A 80 2257 (2000)
  81. Berthelot A, Gourbilleau F et al Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 166-167 927 (2000)
  82. Yavlinskii Yu N Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 166-167 35 (2000)
  83. Toulemonde M, Dufour Ch et al Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 166-167 903 (2000)
  84. Matveev V I Tech. Phys. 45 1063 (2000)
  85. Davydov S Yu Tech. Phys. 44 584 (1999)
  86. Volkov A E, Borodin V A Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 146 137 (1998)
  87. Bouffard S, Duraud J P et al Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 141 372 (1998)
  88. Akap’ev G I, Balabaev A N et al Tech. Phys. 43 120 (1998)
  89. Meftah A, Djebara M et al Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 146 431 (1998)
  90. Wiss T, Matzke H et al Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 122 583 (1997)
  91. Meftah A, Costantini J M et al Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 122 470 (1997)
  92. Baranov I, Bogdanov S et al Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 122 329 (1997)
  93. Miotello A, Kelly R Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 122 458 (1997)
  94. Toulemonde M, Costantini J M et al Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 116 37 (1996)
  95. Martynenko Yu V Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 115 515 (1996)
  96. Didyk A Yu, Varichenko V S Radiation Measurements 25 119 (1995)
  97. Szenes G Phys. Rev. B 52 6154 (1995)
  98. Gutzmann A, Klaumünzer S, Meier P Phys. Rev. Lett. 74 2256 (1995)
  99. Ryazanov A I, Volkov A E, Klaumünzer S Phys. Rev. B 51 12107 (1995)
  100. Yassievich I N Semicond. Sci. Technol. 9 1433 (1994)
  101. Komarov F F Russ Phys J 37 423 (1994)
  102. Meftah A, Brisard F et al Phys. Rev. B 49 12457 (1994)
  103. Martynenko Yu V, Umansky M V Radiation Effects and Defects in Solids 132 31 (1994)
  104. Yavlinskii Yu N Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 90 96 (1994)
  105. Lesueur D, Dunlop A Radiation Effects and Defects in Solids 126 163 (1993)
  106. Baranov I, Kozlov B et al Clustering Phenomena in Atoms and Nuclei Springer Series in Nuclear and Particle Physics Chapter 53 (1992) p. 435
  107. Katin V V, Martynenko Yu V, Yavlinskii Yu N Radiation Effects and Defects in Solids 124 187 (1992)
  108. Vorobyova I V, Monastyrenko V E, Ter-Ovanesyan E A International Journal of Radiation Applications and Instrumentation. Part D. Nuclear Tracks and Radiation Measurements 20 327 (1992)
  109. Karamyan S A International Journal of Radiation Applications and Instrumentation. Part D. Nuclear Tracks and Radiation Measurements 18 365 (1991)
  110. Johnson R E, Pospieszalska M, Brown W L Phys. Rev. B 44 7263 (1991)
  111. Drapchinsky L V, Soloviev S M Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment 303 19 (1991)
  112. Karamyan S A Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 51 354 (1990)
  113. Baranov I A, Obnorskii V V, Tsepelevich S O Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 52 9 (1990)
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