RSS-ленты
РусскийEnglish
Выпуск 3, 2023
Том год страница
Выпуски Авторы PACS Подписчикам Для авторов

Выпуски

 / 

1998

 / 

Октябрь

←  →

Обзоры актуальных проблем


Процессы конденсации тонких пленок

,
Институт проблем машиноведения РАН, Санкт-Петербург, Российская Федерация

Представлено современное состояние проблемы зарождения и роста новой фазы на поверхности твердых тел в одно- и многокомпонентных системах. Исследуется кинетика образования и последующей эволюции островков новой фазы. Проанализированы модели роста пленок из пара и раствора-расплава с учетом деталей процесса: распределения островков по размерам, коалесценции, ориентации островков, морфологической устойчивости и т.п. Рассматривается изотермическое и неизотермическое оствальдовское созревание ансамблей многокомпонентных островков новой фазы, исследуются нелинейные явления при росте сплошных структур. Рассмотрена проблема управления процессом роста слоев новой фазы.

Текст pdf (678 Кб)
English fulltext is available at DOI: 10.1070/PU1998v041n10ABEH000461
PACS: 68.35.−p, 68.18.+p, 68.15.+e, 81.15.−z (все)
DOI: 10.3367/UFNr.0168.199810b.1083
URL: https://ufn.ru/ru/articles/1998/10/b/
Цитата: Кукушкин С А, Осипов А В "Процессы конденсации тонких пленок" УФН 168 1083–1116 (1998)
BibTexBibNote ® (generic)BibNote ® (RIS)MedlineRefWorks

English citation: Kukushkin S A, Osipov A V “Thin-film condensation processes” Phys. Usp. 41 983–1014 (1998); DOI: 10.1070/PU1998v041n10ABEH000461

Список литературы (242) Статьи, ссылающиеся на эту (185) ↓ Похожие статьи (20)

  1. Alekseev N I, Khadutin V S, Khmel’nitskii I K Russ. J. Phys. Chem. 95 2444 (2021)
  2. Perekrestov V, Kornyushchenko A et al 2021 IEEE 11th International Conference Nanomaterials: Applications & Properties (NAP), (2021) p. 1
  3. Altuntas I, Kocak M N et al Materials Science in Semiconductor Processing 127 105733 (2021)
  4. Bulyarskiy S V, Svetukhin V V Silicon 13 3321 (2021)
  5. Koryakin A A, Kukushkin S A Phys. Status Solidi B 258 2000604 (2021)
  6. Wan K, Gou X, Guo Zh J Bionic Eng 18 501 (2021)
  7. L’vov P E, Bulyarskiy S V et al Journal of Vacuum Science & Technology B 39 064201 (2021)
  8. Tynyshtykbayev K, Spitas Ch et al ECS J. Solid State Sci. Technol. 10 013009 (2021)
  9. Lozovoy K A, Kokhanenko A P et al Russ Phys J 63 296 (2020)
  10. Erwin S C, Lyons J L ACS Appl. Mater. Interfaces 12 49245 (2020)
  11. Lozovoy K A, Korotaev A G et al Surface and Coatings Technology 384 125289 (2020)
  12. Reilly C E, Mates T E et al Semicond. Sci. Technol. 35 095014 (2020)
  13. Chen X, Li Yu et al Electrochemistry Communications 110 106642 (2020)
  14. Smagulova S A, Vinokurov P V et al Semiconductors 54 454 (2020)
  15. Akhmadiev F G, Farakhov M I, Akhmitshin A A Theor Found Chem Eng 54 592 (2020)
  16. Bildanau E, Pękalski J et al Phys. Rev. E 101 (1) (2020)
  17. Nanosist. Nanomater. Nanotehnol. 18 (4) (2020)
  18. Bulyarskiy S V, Svetukhin V V J Nanopart Res 22 (12) (2020)
  19. Polishchuk V A, Tomaev V V, Leonov N B J. Synch. Investig. 14 459 (2020)
  20. Lozovoy K A, Kokhanenko A P et al Crystal Growth & Design 19 7015 (2019)
  21. Balakirev S V, Solodovnik M S et al Nanotechnology 30 505601 (2019)
  22. Barabash M Yu, Vlaykov G G et al Advances in Thin Films, Nanostructured Materials, and Coatings Lecture Notes in Mechanical Engineering Chapter 17 (2019) p. 169
  23. Nanosist. Nanomater. Nanotehnol. 17 (3) (2019)
  24. Koryakin A A, Kukushkin S A, Sibirev N V Semiconductors 53 350 (2019)
  25. Dvornichenko A V, Kharchenko D O et al Journal of Crystal Growth 514 1 (2019)
  26. Koryakin A A, Kukushkin S A et al CrystEngComm 21 4707 (2019)
  27. Lozovoy K, Kokhanenko A, Voitsekhovskii A Nanotechnology 29 054002 (2018)
  28. Berdnikov Yu S, Sibirev N V Semiconductors 52 2085 (2018)
  29. Sibirev N V, Koryakin A A, Berdnikov Y S Semiconductors 52 2124 (2018)
  30. Minenkov A A, Kryshtal A P, Bogatyrenko S I Journal of Alloys and Compounds 756 50 (2018)
  31. Yamada A, Muroi M et al Semicond. Sci. Technol. 33 094002 (2018)
  32. Kosminska Yu O, Perekrestov V I Diamond and Related Materials 85 37 (2018)
  33. Kukushkin S A, Osipov A V et al Phys. Solid State 59 674 (2017)
  34. Antonets I V, Kotov L N et al Tech. Phys. 62 261 (2017)
  35. Grabov V M, Demidov E V et al Semiconductors 51 831 (2017)
  36. Tumarkin A V, Serenkov I T et al Phys. Solid State 58 364 (2016)
  37. Pavlov P A Thermophys. Aeromech. 23 543 (2016)
  38. Rudenko S P, Maksimenko L S et al Plasmonics 11 557 (2016)
  39. Kukushkin S A, Osipov A V et al Phys. Solid State 58 967 (2016)
  40. Kosminska Yu O, Perekrestov V I et al 2016 International Conference on Nanomaterials: Application & Properties (NAP), (2016) p. 01NTF04-1
  41. Lozovoy K A, Kokhanenko A P, Voitsekhovskii A V Appl. Phys. Lett. 109 021604 (2016)
  42. Lozovoy K A, Pishchagin A A et al J. Phys.: Conf. Ser. 741 012019 (2016)
  43. Belyaev A P, Antipov V V, Rubets V P Semiconductors 50 415 (2016)
  44. Orekhov A S, Kamilov T S et al Nanotechnol Russia 11 610 (2016)
  45. Antonets I V, Golubev E A et al Tech. Phys. 61 416 (2016)
  46. Danilova Yu V, Shumilova T G et al Petrology 24 35 (2016)
  47. Tynyshtykbaev K B, Ryabikin Yu A et al Russ Microelectron 44 559 (2015)
  48. Tumarkin A V, Kukushkin S A et al Phys. Solid State 57 815 (2015)
  49. Vyatkin A F, Volkov V T et al J. Synch. Investig. 9 139 (2015)
  50. Rabinovich O I, Kushhov A R, Gaev D S Modern Electronic Materials 1 73 (2015)
  51. Perekrestov V, Kornyushchenko A et al Phys. Status Solidi B 252 397 (2015)
  52. Roth S V, Santoro G et al ACS Appl. Mater. Interfaces 7 12470 (2015)
  53. Kukushkin S A, Osipov A V et al Phys. Solid State 57 1899 (2015)
  54. Huang H, Yan J Semicond. Sci. Technol. 30 115001 (2015)
  55. Lozovoy K A, Kokhanenko A P, Voitsekhovskii A V Crystal Growth & Design 15 1055 (2015)
  56. Lozovoy K A, Kokhanenko A P, Voitsekhovskiy A V J. Phys.: Conf. Ser. 541 012084 (2014)
  57. Chuchman M P, Laslov G E, Shuaibov A K High Temp 52 497 (2014)
  58. Voitsekhovskii A V, Kokhanenko A P, Lozovoy K A Bull. Russ. Acad. Sci. Phys. 78 1058 (2014)
  59. Gerasimenko N N, Tynyshtykbaev K B et al Semiconductors 48 1088 (2014)
  60. Kukushkin S A, Osipov A V, Feoktistov N A Phys. Solid State 56 1507 (2014)
  61. Lozovoy K A, Voytsekhovskiy A V et al Surface Science 619 1 (2014)
  62. Red’kov A V, Lipovskii A A, Zhurikhina V V J. Phys.: Conf. Ser. 541 012005 (2014)
  63. Perekrestov V I, Kornyushchenko A S, Natalich V V Solid State Sciences 33 12 (2014)
  64. Vengrenovich R D, Ivanskii B V et al Semiconductors 48 783 (2014)
  65. Dolgov A S, Valuiskaya A V J. Synch. Investig. 8 301 (2014)
  66. Kukushkin S A, Osipov A V J. Phys. D: Appl. Phys. 47 313001 (2014)
  67. Dubrovskii V G Tech. Phys. Lett. 40 177 (2014)
  68. Rabinovich O I, Kushkhov A R, Gaev D S Inorg Mater 49 39 (2013)
  69. Kukushkin S A, Osipov A V Mech. Solids 48 216 (2013)
  70. Perekrestov V I, Kosminska Yu O et al J Porous Mater 20 967 (2013)
  71. Tynyshtykbaev K B, Aitmukan T et al MSA 04 1 (2013)
  72. Redkov A V, Zhurikhina V V, Lipovskii A A Journal of Non-Crystalline Solids 376 152 (2013)
  73. Kukushkin S A, Osipov A V Semiconductors 47 1551 (2013)
  74. Simonyan A K J. Contemp. Phys. 48 220 (2013)
  75. Stefanovich L I, Terekhova Yu V, Feldman E P Phys. Solid State 55 1955 (2013)
  76. Belyaev A P, Rubets V P et al Russ J Appl Chem 86 667 (2013)
  77. Perekrestov V I, Kosminska Yu O et al Physica B: Condensed Matter 411 140 (2013)
  78. Kukushkin S A, Osipov A V Journal of Applied Physics 113 024909 (2013)
  79. Lebedev D, Nurgazizov N et al ANP 02 236 (2013)
  80. Dolgov A S, Stetsenko N V J. Synch. Investig. 6 95 (2012)
  81. Fisenko S P, Khodyko Yu A J Eng Phys Thermophy 85 487 (2012)
  82. Kushkhov A R, Gaev D S et al Crystallogr. Rep. 57 288 (2012)
  83. Smirnov B M EPL 99 13001 (2012)
  84. Bulyarskii S V Russ Microelectron 41 474 (2012)
  85. Kukushkin S A, Osipov A V KEM 528 145 (2012)
  86. Chuchman M P, Mesarosh L V et al Opt. Spectrosc. 113 572 (2012)
  87. Koropov A V Tech. Phys. 56 1781 (2011)
  88. Tynyshtykbaev K B 2011 International Conference on Multimedia Technology, (2011) p. 6528
  89. Sibirev N V, Nazarenko M V, Dubrovskii V G Tech. Phys. Lett. 37 596 (2011)
  90. Kazanskii M A, Nazarenko M V, Dubrovskii V G Tech. Phys. Lett. 37 282 (2011)
  91. Olemskoi A I, Yushchenko O V, Zhilenko T I Phys. Solid State 53 845 (2011)
  92. Wang K-F, Peng Ch-X et al Appl. Phys. A 104 573 (2011)
  93. Perekrestov V I, Mokrenko A A et al J. Synch. Investig. 5 667 (2011)
  94. Valeev R G, Beltukov A N et al J Struct Chem 52 181 (2011)
  95. Koropov A V J. Synch. Investig. 5 780 (2011)
  96. Perekrestov V I, Kosminska Yu O et al Vacuum 86 111 (2011)
  97. Cluster Processes in Gases and Plasmas (2010) p. 423
  98. Kuz’michev S V, Kukushkin S A et al Phys. Solid State 52 1645 (2010)
  99. Shishkovsky I phys. stat. sol. (a) 207 1154 (2010)
  100. Gladkikh N T, Kryshtal’ A P, Sukhov R V Phys. Solid State 52 633 (2010)
  101. Lubov M N, Kulikov D V, Trushin Yu V Tech. Phys. 55 85 (2010)
  102. Dubrovskii V G Tech. Phys. Lett. 36 219 (2010)
  103. Dubrovskii V G, Nazarenko M V, Sibirev N V Tech. Phys. Lett. 35 1117 (2009)
  104. Perekrestov V I, Olemskoĭ A I et al Phys. Solid State 51 1060 (2009)
  105. Antonets I V, Kotov L N et al J. Commun. Technol. Electron. 54 493 (2009)
  106. Indeĭtsev D A, Osipova E V Phys. Solid State 51 1901 (2009)
  107. Sibirev N V, Dubrovskii V G et al Tech. Phys. 54 586 (2009)
  108. Perekrestov V I, Olemskoi A I et al Physics Letters A 373 3386 (2009)
  109. Dubrovskii V G, Cirlin G E, Ustinov V M Semiconductors 43 1539 (2009)
  110. Belyaev A P, Rubets V P et al Inorg Mater 45 357 (2009)
  111. Kompan M E, Klimov V A et al Tech. Phys. Lett. 35 234 (2009)
  112. Galdikas A Applied Surface Science 254 3964 (2008)
  113. Zhabrev V A, Margolin V I Inorg Mater 44 1459 (2008)
  114. Perekrestov V I, Kornyushchenko A S, Kosminskaya Yu A Tech. Phys. 53 1364 (2008)
  115. Mosienko B A 222 1533 (2008)
  116. Prysyazhnyuk V, Mykolaychuk O Journal of Non-Crystalline Solids 354 4458 (2008)
  117. Koropov A V Phys. Solid State 50 2184 (2008)
  118. Kukushkin S A, Osipov A V Phys. Solid State 50 1238 (2008)
  119. Ayupov B M, Danilovich V S, Prokhorova S A Opt. Spectrosc. 105 896 (2008)
  120. Perekrestov V I, Kornyushchenko A S, Kosminskaya Yu A Phys. Solid State 50 1357 (2008)
  121. Perekrestov V I, Kornyushchenko A S, Kosminskaya Yu A Jetp Lett. 86 767 (2008)
  122. Bhattacharyya S R, Chini T K et al J. Exp. Theor. Phys. 107 1009 (2008)
  123. Шкляев А А, Ичикава М Uspekhi Fizicheskikh Nauk 178 139 (2008)
  124. Kukushkin S A, Kuz’michev S V Phys. Solid State 50 1445 (2008)
  125. Kukushkin S A, Osipov A V Kinet Catal 49 79 (2008)
  126. Dyskin V G Appl. Sol. Energy 43 72 (2007)
  127. Vengrenovich R D, Moskalyuk A V, Yarema S V Phys. Solid State 49 11 (2007)
  128. Kukushkin S A, Shlyagin M G et al Journal of Applied Physics 102 053502 (2007)
  129. Vengrenovich R D, Ivanskiĭ B V, Moskalyuk A V J. Exp. Theor. Phys. 104 906 (2007)
  130. Safonov K L, Dubrovskii V G et al Tech. Phys. Lett. 33 490 (2007)
  131. Belyaev A P, Rubets V P, Antipov V V Semiconductors 40 770 (2006)
  132. Dubrovskiĭ V G, Sibirev N V et al Semiconductors 40 249 (2006)
  133. Borman V D, Zenkevich A V et al J. Exp. Theor. Phys. 103 850 (2006)
  134. Indeitsev D, Mochalova Yu Meccanica 41 311 (2006)
  135. Gubanov P Yu, Maksimov I L, Morozov V P Crystallogr. Rep. 51 513 (2006)
  136. Ievlev V M, Shvedov E V Phys. Solid State 48 144 (2006)
  137. Prysyazhnyuk V, Mykolaychuk O Journal of Non-Crystalline Solids 352 4299 (2006)
  138. Dubrovskiĭ V G Semiconductors 40 1123 (2006)
  139. Kukushkin S A, Osipov A V, Shlyagin M G Tech. Phys. 51 1035 (2006)
  140. Kukushkin S A Tech. Phys. Lett. 31 859 (2005)
  141. Gubanov P Yu, Zheltov Yu V et al Tech. Phys. 50 364 (2005)
  142. Zverev A V, Neizvestny I G et al Semiconductors 39 967 (2005)
  143. Dubrovskiı̆ V G Semiconductors 39 1267 (2005)
  144. Kukushkin S A Journal of Applied Physics 98 033503 (2005)
  145. Shuaibov A K, Chuchman M P, Dashchenko A I Opt. Spectrosc. 97 633 (2004)
  146. Dubrovskii V G, Sibirev N V, Cirlin G E Tech. Phys. Lett. 30 682 (2004)
  147. Matukov I D, Kalinin D S et al Journal of Crystal Growth 266 313 (2004)
  148. Sibirev N V, Dubrovskii V G Tech. Phys. Lett. 30 791 (2004)
  149. Koshkin V M, Slezov V V Tech. Phys. Lett. 30 367 (2004)
  150. Shuaibov A K, Chuchman M P Tech. Phys. Lett. 29 485 (2003)
  151. Smirnov B M Uspekhi Fizicheskikh Nauk 173 609 (2003)
  152. Indeitsev D, Mochalova Yu Mathematical and Numerical Aspects of Wave Propagation WAVES 2003 Chapter 80 (2003) p. 500
  153. Belyaev A P, Rubets V P et al Semiconductors 37 617 (2003)
  154. Schmelzer J W P, Schmelzer J Atmospheric Research 65 303 (2003)
  155. Kukushkin S A, Osipov A V Phys. Rev. B 65 (17) (2002)
  156. Perekrestov V I, Koropov A V, Kravchenko S N Phys. Solid State 44 1181 (2002)
  157. Gordon P V, Kukushkin S A, Osipov A V Phys. Solid State 44 2175 (2002)
  158. Ferguson T, Gavrilov G et al Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment 483 698 (2002)
  159. Kukushkin S A, Bessolov V N et al Phys. Solid State 44 1399 (2002)
  160. Maksimov I L Crystallogr. Rep. 47 S105 (2002)
  161. Kukushkin S A Phys. Solid State 44 2298 (2002)
  162. Belyaev A P, Rubets V P et al Tech. Phys. 47 491 (2002)
  163. Belyaev A P, Rubets V P Semiconductors 36 789 (2002)
  164. Ambrok A G, Kalashnikov E V, Kukushkin S A Journal of Applied Physics 91 4961 (2002)
  165. Kukushkin S A, Osipov A V et al Semiconductors 36 1097 (2002)
  166. Belyaev A P, Rubets V P, Kukushkin S A Phys. Solid State 43 1979 (2001)
  167. Schmelzer J W P, Schmelzer J The Journal of Chemical Physics 114 5180 (2001)
  168. Ambrok A G, Kalashnikov E V, Kukushkin S A Tech. Phys. 46 311 (2001)
  169. Belyaev A P, Rubets V P Semiconductors 35 279 (2001)
  170. Belyaev A P, Kukushkin S A, Rubets V P Phys. Solid State 43 597 (2001)
  171. Kukushkin S A, Bessolov V N et al Phys. Solid State 43 2229 (2001)
  172. Plyatsko S V, Bergush N N Semiconductors 35 374 (2001)
  173. Kukushkin S A, Osipov A V Phys. Solid State 43 325 (2001)
  174. Kukushkin S A, Kukushkin S A, Osipov A V Phys. Solid State 43 90 (2001)
  175. Kukushkin S A, Osipov A V Phys. Solid State 43 82 (2001)
  176. Belyaev A P, Rubets V P et al Phys. Solid State 43 778 (2001)
  177. Kuni F M, Shchekin A K, Grinin A P Uspekhi Fizicheskikh Nauk 171 345 (2001)
  178. Schmelzer J W P, Schmelzer J, Gutzow I S The Journal of Chemical Physics 112 3820 (2000)
  179. Pchelyakov O P, Bolkhovityanov Yu B et al Thin Solid Films 367 75 (2000)
  180. Pchelyakov O P, Bolkhovityanov Yu B et al Semiconductors 34 1229 (2000)
  181. Nucleation (2000) p. 495
  182. Vakulenko A A, Kukushkin S A Phys. Solid State 42 179 (2000)
  183. Ginzburg B M Tech. Phys. Lett. 26 345 (2000)
  184. Vostokov N V, Gusev S A et al Semiconductors 34 6 (2000)
  185. Bakhtizin R Z, Hasegawa Y et al J. Exp. Theor. Phys. 91 1000 (2000)
© Успехи физических наук, 1918–2023
Электронная почта: ufn@ufn.ru Телефоны и адреса редакции О журнале Пользовательское соглашение