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Обзоры актуальных проблем


Процессы конденсации тонких пленок

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Институт проблем машиноведения РАН, Санкт-Петербург, Российская Федерация

Представлено современное состояние проблемы зарождения и роста новой фазы на поверхности твердых тел в одно- и многокомпонентных системах. Исследуется кинетика образования и последующей эволюции островков новой фазы. Проанализированы модели роста пленок из пара и раствора-расплава с учетом деталей процесса: распределения островков по размерам, коалесценции, ориентации островков, морфологической устойчивости и т.п. Рассматривается изотермическое и неизотермическое оствальдовское созревание ансамблей многокомпонентных островков новой фазы, исследуются нелинейные явления при росте сплошных структур. Рассмотрена проблема управления процессом роста слоев новой фазы.

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English fulltext is available at DOI: 10.1070/PU1998v041n10ABEH000461
PACS: 68.35.−p, 68.18.+p, 68.15.+e, 81.15.−z (все)
DOI: 10.3367/UFNr.0168.199810b.1083
URL: https://ufn.ru/ru/articles/1998/10/b/
000076871800002
Цитата: Кукушкин С А, Осипов А В "Процессы конденсации тонких пленок" УФН 168 1083–1116 (1998)
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English citation: Kukushkin S A, Osipov A V “Thin-film condensation processesPhys. Usp. 41 983–1014 (1998); DOI: 10.1070/PU1998v041n10ABEH000461

Список литературы (242) Статьи, ссылающиеся на эту (197) ↓ Похожие статьи (20)

  1. Perekrestov V, Kornyushchenko A et al Crystals 14 953 (2024)
  2. Loboda V B, Khursenko S M, Kravchenko V O Advanced Structured Materials Vol. Nanocomposite and Nanocrystalline Materials and CoatingsPhase Composition and Structure of Nanocrystalline Films of NiCu, NiCo, and NiFe Alloys214 Chapter 8 (2024) p. 201
  3. Plusnin N I Tech. Phys. 69 1717 (2024)
  4. Redkov A Front. Chem. 11 (2023)
  5. Ponomarenko V P, Popov V S, Popov S V J. Commun. Technol. Electron. 67 S1 (2022)
  6. Sorokin M V, Ahmad I et al 2022 19th International Bhurban Conference on Applied Sciences and Technology (IBCAST), (2022) p. 10
  7. Afashagov A A, Shebzukhova M A, Shebzukhov A A Phys. Solid State 64 293 (2022)
  8. Sibirev N V, Berdnikov Yu S et al Semiconductors 56 14 (2022)
  9. Saurov A N, L’vov P E et al J. Mater. Chem. C 10 5864 (2022)
  10. Bulyarskiy S V, Svetukhin V V Silicon 13 3321 (2021)
  11. Perekrestov V, Kornyushchenko A et al 2021 IEEE 11th International Conference Nanomaterials: Applications & Properties (NAP), (2021) p. 1
  12. Altuntas I, Kocak M N et al Materials Science in Semiconductor Processing 127 105733 (2021)
  13. Tynyshtykbayev K, Spitas Ch et al ECS J. Solid State Sci. Technol. 10 013009 (2021)
  14. L’vov P E, Bulyarskiy S V et al 39 (6) (2021)
  15. Wan K, Gou X, Guo Zh J Bionic Eng 18 501 (2021)
  16. Alekseev N I, Khadutin V S, Khmel’nitskii I K Russ. J. Phys. Chem. 95 2444 (2021)
  17. Koryakin A A, Kukushkin S A Physica Status Solidi (b) 258 (6) (2021)
  18. Lozovoy K A, Korotaev A G et al Surface and Coatings Technology 384 125289 (2020)
  19. Smagulova S A, Vinokurov P V et al Semiconductors 54 454 (2020)
  20. Reilly C E, Mates T E et al Semicond. Sci. Technol. 35 095014 (2020)
  21. Bildanau E, Pękalski J et al Phys. Rev. E 101 (1) (2020)
  22. Chen X, Li Yu et al Electrochemistry Communications 110 106642 (2020)
  23. Erwin S C, Lyons J L ACS Appl. Mater. Interfaces 12 49245 (2020)
  24. Akhmadiev F G, Farakhov M I, Akhmitshin A A Theor Found Chem Eng 54 592 (2020)
  25. Lozovoy K A, Kokhanenko A P et al Russ Phys J 63 296 (2020)
  26. Polishchuk V A, Tomaev V V, Leonov N B J. Synch. Investig. 14 459 (2020)
  27. Bulyarskiy S V, Svetukhin V V J Nanopart Res 22 (12) (2020)
  28. Nanosist. Nanomater. Nanotehnol. 18 (4) (2020)
  29. Lozovoy K A, Kokhanenko A P et al Crystal Growth & Design 19 7015 (2019)
  30. Koryakin A A, Kukushkin S A et al CrystEngComm 21 4707 (2019)
  31. Barabash M Yu, Vlaykov G G et al Advances in Thin Films, Nanostructured Materials, and Coatings Lecture Notes in Mechanical Engineering Chapter 17 (2019) p. 169
  32. Dvornichenko A V, Kharchenko D O et al Journal of Crystal Growth 514 1 (2019)
  33. Nanosist. Nanomater. Nanotehnol. 17 (3) (2019)
  34. Balakirev S V, Solodovnik M S et al Nanotechnology 30 505601 (2019)
  35. Koryakin A A, Kukushkin S A, Sibirev N V Semiconductors 53 350 (2019)
  36. Sibirev N V, Koryakin A A, Berdnikov Y S Semiconductors 52 2124 (2018)
  37. Kosminska Yu O, Perekrestov V I Diamond and Related Materials 85 37 (2018)
  38. А А К, С А К 8 5 (2018)
  39. Berdnikov Yu S, Sibirev N V Semiconductors 52 2085 (2018)
  40. Minenkov A A, Kryshtal A P, Bogatyrenko S I Journal of Alloys and Compounds 756 50 (2018)
  41. Lozovoy K, Kokhanenko A, Voitsekhovskii A Nanotechnology 29 054002 (2018)
  42. Yamada A, Muroi M et al Semicond. Sci. Technol. 33 094002 (2018)
  43. Grabov V M, Demidov E V et al Semiconductors 51 831 (2017)
  44. Antonets I V, Kotov L N et al Tech. Phys. 62 261 (2017)
  45. Kukushkin S A, Osipov A V et al Phys. Solid State 59 674 (2017)
  46. Danilova Yu V, Shumilova T G et al Petrology 24 35 (2016)
  47. Pavlov P A Thermophys. Aeromech. 23 543 (2016)
  48. Tumarkin A V, Serenkov I T et al Phys. Solid State 58 364 (2016)
  49. Lozovoy K A, Kokhanenko A P, Voitsekhovskii A V 109 (2) (2016)
  50. Kukushkin S A, Osipov A V et al Phys. Solid State 58 967 (2016)
  51. Orekhov A S, Kamilov T S et al Nanotechnol Russia 11 610 (2016)
  52. Antonets I V, Golubev E A et al Tech. Phys. 61 416 (2016)
  53. Belyaev A P, Antipov V V, Rubets V P Semiconductors 50 415 (2016)
  54. Rudenko S P, Maksimenko L S et al Plasmonics 11 557 (2016)
  55. Lozovoy K A, Pishchagin A A et al J. Phys.: Conf. Ser. 741 012019 (2016)
  56. Kosminska Yu O, Perekrestov V I et al 2016 International Conference on Nanomaterials: Application & Properties (NAP), (2016) p. 01NTF04-1
  57. Vyatkin A F, Volkov V T et al J. Synch. Investig. 9 139 (2015)
  58. Perekrestov V, Kornyushchenko A et al Phys. Status Solidi B 252 397 (2015)
  59. Roth S V, Santoro G et al ACS Appl. Mater. Interfaces 7 12470 (2015)
  60. Huang H, Yan J Semicond. Sci. Technol. 30 115001 (2015)
  61. Rabinovich O I, Kushhov A R, Gaev D S Izv. vysš. učebn. zaved., Mater. èlektron. teh. (1) 4 (2015)
  62. Rabinovich O I, Kushhov A R, Gaev D S Modern Electronic Materials 1 73 (2015)
  63. Tynyshtykbaev K B, Ryabikin Yu A et al Russ Microelectron 44 559 (2015)
  64. Lozovoy K A, Kokhanenko A P, Voitsekhovskii A V Crystal Growth & Design 15 1055 (2015)
  65. Tumarkin A V, Kukushkin S A et al Phys. Solid State 57 815 (2015)
  66. Kukushkin S A, Osipov A V et al Phys. Solid State 57 1899 (2015)
  67. Voitsekhovskii A V, Kokhanenko A P, Lozovoy K A Bull. Russ. Acad. Sci. Phys. 78 1058 (2014)
  68. Lozovoy K A, Kokhanenko A P, Voitsekhovskiy A V J. Phys.: Conf. Ser. 541 012084 (2014)
  69. Gerasimenko N N, Tynyshtykbaev K B et al Semiconductors 48 1088 (2014)
  70. Kukushkin S A, Osipov A V, Feoktistov N A Phys. Solid State 56 1507 (2014)
  71. Kukushkin S A, Osipov A V J. Phys. D: Appl. Phys. 47 313001 (2014)
  72. Dubrovskii V G Tech. Phys. Lett. 40 177 (2014)
  73. Chuchman M P, Laslov G E, Shuaibov A K High Temp 52 497 (2014)
  74. Lozovoy K A, Voytsekhovskiy A V et al Surface Science 619 1 (2014)
  75. Perekrestov V I, Kornyushchenko A S, Natalich V V Solid State Sciences 33 12 (2014)
  76. Red’kov A V, Lipovskii A A, Zhurikhina V V J. Phys.: Conf. Ser. 541 012005 (2014)
  77. Vengrenovich R D, Ivanskii B V et al Semiconductors 48 783 (2014)
  78. Dolgov A S, Valuiskaya A V J. Synch. Investig. 8 301 (2014)
  79. Rabinovich O I, Kushkhov A R, Gaev D S Inorg Mater 49 39 (2013)
  80. Stefanovich L I, Terekhova Yu V, Feldman E P Phys. Solid State 55 1955 (2013)
  81. Perekrestov V I, Kosminska Yu O et al J Porous Mater 20 967 (2013)
  82. Kukushkin S A, Osipov A V Semiconductors 47 1551 (2013)
  83. Simonyan A K J. Contemp. Phys. 48 220 (2013)
  84. Lebedev D, Nurgazizov N et al ANP 02 236 (2013)
  85. Redkov A V, Zhurikhina V V, Lipovskii A A Journal of Non-Crystalline Solids 376 152 (2013)
  86. Perekrestov V I, Kosminska Yu O et al Physica B: Condensed Matter 411 140 (2013)
  87. Kukushkin S A, Osipov A V 113 (2) (2013)
  88. Belyaev A P, Rubets V P et al Russ J Appl Chem 86 667 (2013)
  89. Kukushkin S A, Osipov A V Mech. Solids 48 216 (2013)
  90. Tynyshtykbaev K B, Aitmukan T et al MSA 04 1 (2013)
  91. Fisenko S P, Khodyko Yu A J Eng Phys Thermophy 85 487 (2012)
  92. Smirnov B M EPL 99 13001 (2012)
  93. Dolgov A S, Stetsenko N V J. Synch. Investig. 6 95 (2012)
  94. Chuchman M P, Mesarosh L V et al Opt. Spectrosc. 113 572 (2012)
  95. Bulyarskii S V Russ Microelectron 41 474 (2012)
  96. Kukushkin S A, Osipov A V KEM 528 145 (2012)
  97. Kushkhov A R, Gaev D S et al Crystallogr. Rep. 57 288 (2012)
  98. Sibirev N V, Nazarenko M V, Dubrovskii V G Tech. Phys. Lett. 37 596 (2011)
  99. Perekrestov V I, Kosminska Yu O et al Vacuum 86 111 (2011)
  100. Kazanskii M A, Nazarenko M V, Dubrovskii V G Tech. Phys. Lett. 37 282 (2011)
  101. Koropov A V Tech. Phys. 56 1781 (2011)
  102. Wang K-F, Peng Ch-X et al Appl. Phys. A 104 573 (2011)
  103. Valeev R G, Beltukov A N et al J Struct Chem 52 181 (2011)
  104. Olemskoi A I, Yushchenko O V, Zhilenko T I Phys. Solid State 53 845 (2011)
  105. Perekrestov V I, Mokrenko A A et al J. Synch. Investig. 5 667 (2011)
  106. Koropov A V J. Synch. Investig. 5 780 (2011)
  107. Tynyshtykbaev K B 2011 International Conference on Multimedia Technology, (2011) p. 6528
  108. Dubrovskii V G Tech. Phys. Lett. 36 219 (2010)
  109. Shishkovsky I Physica Status Solidi (a) 207 1154 (2010)
  110. Gladkikh N T, Kryshtal’ A P, Sukhov R V Phys. Solid State 52 633 (2010)
  111. Kuz’michev S V, Kukushkin S A et al Phys. Solid State 52 1645 (2010)
  112. Lubov M N, Kulikov D V, Trushin Yu V Tech. Phys. 55 85 (2010)
  113. Cluster Processes in Gases and Plasmas 1 (2010) p. 423
  114. Kompan M E, Klimov V A et al Tech. Phys. Lett. 35 234 (2009)
  115. Kinetics of First‐Order Phase Transitions 1 (2009) p. 399
  116. Antonets I V, Kotov L N et al J. Commun. Technol. Electron. 54 493 (2009)
  117. Sibirev N V, Dubrovskii V G et al Tech. Phys. 54 586 (2009)
  118. Belyaev A P, Rubets V P et al Inorg Mater 45 357 (2009)
  119. Dubrovskii V G, Cirlin G E, Ustinov V M Semiconductors 43 1539 (2009)
  120. Perekrestov V I, Olemskoĭ A I et al Phys. Solid State 51 1060 (2009)
  121. Perekrestov V I, Olemskoi A I et al Physics Letters A 373 3386 (2009)
  122. Dubrovskii V G, Nazarenko M V, Sibirev N V Tech. Phys. Lett. 35 1117 (2009)
  123. Indeĭtsev D A, Osipova E V Phys. Solid State 51 1901 (2009)
  124. Kukushkin S A, Osipov A V Phys. Solid State 50 1238 (2008)
  125. Mosienko B A 222 1533 (2008)
  126. Perekrestov V I, Kornyushchenko A S, Kosminskaya Yu A Tech. Phys. 53 1364 (2008)
  127. Prysyazhnyuk V, Mykolaychuk O Journal of Non-Crystalline Solids 354 4458 (2008)
  128. Ayupov B M, Danilovich V S, Prokhorova S A Opt. Spectrosc. 105 896 (2008)
  129. Zhabrev V A, Margolin V I Inorg Mater 44 1459 (2008)
  130. Koropov A V Phys. Solid State 50 2184 (2008)
  131. Шкляев А А, Ичикава М Uspekhi Fizicheskikh Nauk 178 139 (2008)
  132. Perekrestov V I, Kornyushchenko A S, Kosminskaya Yu A Jetp Lett. 86 767 (2008)
  133. Galdikas A Applied Surface Science 254 3964 (2008)
  134. Kukushkin S A, Osipov A V Kinet Catal 49 79 (2008)
  135. Kukushkin S A, Kuz’michev S V Phys. Solid State 50 (8) (2008)
  136. Perekrestov V I, Kornyushchenko A S, Kosminskaya Yu A Phys. Solid State 50 1357 (2008)
  137. Bhattacharyya S R, Chini T K et al J. Exp. Theor. Phys. 107 1009 (2008)
  138. Kukushkin S A, Shlyagin M G et al 102 (5) (2007)
  139. Vengrenovich R D, Moskalyuk A V, Yarema S V Phys. Solid State 49 11 (2007)
  140. Vengrenovich R D, Ivanskiĭ B V, Moskalyuk A V J. Exp. Theor. Phys. 104 906 (2007)
  141. Safonov K L, Dubrovskii V G et al Tech. Phys. Lett. 33 490 (2007)
  142. Dyskin V G Appl. Sol. Energy 43 72 (2007)
  143. Indeitsev D, Mochalova Yu Meccanica 41 311 (2006)
  144. Gubanov P Yu, Maksimov I L, Morozov V P Crystallogr. Rep. 51 513 (2006)
  145. Ievlev V M, Shvedov E V Phys. Solid State 48 144 (2006)
  146. Belyaev A P, Rubets V P, Antipov V V Semiconductors 40 770 (2006)
  147. Dubrovskiĭ V G Semiconductors 40 1123 (2006)
  148. Prysyazhnyuk V, Mykolaychuk O Journal of Non-Crystalline Solids 352 4299 (2006)
  149. Kukushkin S A, Osipov A V, Shlyagin M G Tech. Phys. 51 1035 (2006)
  150. Borman V D, Zenkevich A V et al J. Exp. Theor. Phys. 103 850 (2006)
  151. Dubrovskiĭ V G, Sibirev N V et al Semiconductors 40 249 (2006)
  152. Gubanov P Yu, Zheltov Yu V et al Tech. Phys. 50 364 (2005)
  153. Dubrovskiı̆ V G Semiconductors 39 1267 (2005)
  154. Kukushkin S A Tech. Phys. Lett. 31 859 (2005)
  155. Zverev A V, Neizvestny I G et al Semiconductors 39 967 (2005)
  156. Kukushkin S A 98 (3) (2005)
  157. Sibirev N V, Dubrovskii V G Tech. Phys. Lett. 30 791 (2004)
  158. Koshkin V M, Slezov V V Tech. Phys. Lett. 30 367 (2004)
  159. Matukov I D, Kalinin D S et al Journal of Crystal Growth 266 313 (2004)
  160. Shuaibov A K, Chuchman M P, Dashchenko A I Opt. Spectrosc. 97 633 (2004)
  161. Dubrovskii V G, Sibirev N V, Cirlin G E Tech. Phys. Lett. 30 682 (2004)
  162. Belyaev A P, Rubets V P et al Semiconductors 37 617 (2003)
  163. Indeitsev D, Mochalova Yu Mathematical and Numerical Aspects of Wave Propagation WAVES 2003 Chapter 80 (2003) p. 500
  164. Smirnov B M Uspekhi Fizicheskikh Nauk 173 609 (2003)
  165. Shuaibov A K, Chuchman M P Tech. Phys. Lett. 29 485 (2003)
  166. Schmelzer J W P, Schmelzer J Atmospheric Research 65 303 (2003)
  167. Gordon P V, Kukushkin S A, Osipov A V Phys. Solid State 44 2175 (2002)
  168. Kukushkin S A, Osipov A V et al Semiconductors 36 1097 (2002)
  169. Perekrestov V I, Koropov A V, Kravchenko S N Phys. Solid State 44 1181 (2002)
  170. Kukushkin S A, Bessolov V N et al Phys. Solid State 44 1399 (2002)
  171. Ambrok A G, Kalashnikov E V, Kukushkin S A 91 4961 (2002)
  172. Ferguson T, Gavrilov G et al Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment 483 698 (2002)
  173. Kukushkin S A Phys. Solid State 44 2298 (2002)
  174. Belyaev A P, Rubets V P Semiconductors 36 789 (2002)
  175. Belyaev A P, Rubets V P et al Tech. Phys. 47 491 (2002)
  176. Maksimov I L Crystallogr. Rep. 47 S105 (2002)
  177. Kukushkin S A, Osipov A V Phys. Rev. B 65 (17) (2002)
  178. Kukushkin S A, Osipov A V Phys. Solid State 43 82 (2001)
  179. Kukushkin S A, Osipov A V Phys. Solid State 43 325 (2001)
  180. Kukushkin S A, Bessolov V N et al Phys. Solid State 43 2229 (2001)
  181. Kukushkin S A, Kukushkin S A, Osipov A V Phys. Solid State 43 90 (2001)
  182. Belyaev A P, Rubets V P, Kukushkin S A Phys. Solid State 43 1979 (2001)
  183. Belyaev A P, Kukushkin S A, Rubets V P Phys. Solid State 43 597 (2001)
  184. Schmelzer J W P, Schmelzer J 114 5180 (2001)
  185. Belyaev A P, Rubets V P et al Phys. Solid State 43 778 (2001)
  186. Plyatsko S V, Bergush N N Semiconductors 35 374 (2001)
  187. Ambrok A G, Kalashnikov E V, Kukushkin S A Tech. Phys. 46 311 (2001)
  188. Kuni F M, Shchekin A K, Grinin A P Uspekhi Fizicheskikh Nauk 171 345 (2001)
  189. Belyaev A P, Rubets V P Semiconductors 35 279 (2001)
  190. Schmelzer J W P, Schmelzer J, Gutzow I S 112 3820 (2000)
  191. Bakhtizin R Z, Hasegawa Y et al J. Exp. Theor. Phys. 91 1000 (2000)
  192. Nucleation (2000) p. 495
  193. Vakulenko A A, Kukushkin S A Phys. Solid State 42 179 (2000)
  194. Ginzburg B M Tech. Phys. Lett. 26 345 (2000)
  195. Pchelyakov O P, Bolkhovityanov Yu B et al Semiconductors 34 1229 (2000)
  196. Pchelyakov O P, Bolkhovityanov Yu B et al Thin Solid Films 367 75 (2000)
  197. Vostokov N V, Gusev S A et al Semiconductors 34 6 (2000)

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