RSS-ленты
РусскийEnglish
Выпуск 4, 2024
Том год страница
Выпуски Авторы PACS Подписчикам Для авторов

Выпуски

 / 

1998

 / 

Октябрь

←  →

Обзоры актуальных проблем


Процессы конденсации тонких пленок

,
Институт проблем машиноведения РАН, Санкт-Петербург, Российская Федерация

Представлено современное состояние проблемы зарождения и роста новой фазы на поверхности твердых тел в одно- и многокомпонентных системах. Исследуется кинетика образования и последующей эволюции островков новой фазы. Проанализированы модели роста пленок из пара и раствора-расплава с учетом деталей процесса: распределения островков по размерам, коалесценции, ориентации островков, морфологической устойчивости и т.п. Рассматривается изотермическое и неизотермическое оствальдовское созревание ансамблей многокомпонентных островков новой фазы, исследуются нелинейные явления при росте сплошных структур. Рассмотрена проблема управления процессом роста слоев новой фазы.

Текст pdf (678 Кб)
English fulltext is available at DOI: 10.1070/PU1998v041n10ABEH000461
PACS: 68.35.−p, 68.18.+p, 68.15.+e, 81.15.−z (все)
DOI: 10.3367/UFNr.0168.199810b.1083
URL: https://ufn.ru/ru/articles/1998/10/b/
000076871800002
Цитата: Кукушкин С А, Осипов А В "Процессы конденсации тонких пленок" УФН 168 1083–1116 (1998)
BibTexBibNote ® (generic)BibNote ® (RIS)MedlineRefWorks

English citation: Kukushkin S A, Osipov A V “Thin-film condensation processes” Phys. Usp. 41 983–1014 (1998); DOI: 10.1070/PU1998v041n10ABEH000461

Список литературы (242) Статьи, ссылающиеся на эту (192) ↓ Похожие статьи (20)

  1. Redkov A Front. Chem. 11 (2023)
  2. Ponomarenko V P, Popov V S, Popov S V J. Commun. Technol. Electron. 67 S1 (2022)
  3. Sibirev N V, Berdnikov Yu S et al Semiconductors 56 14 (2022)
  4. Sorokin M V, Ahmad I et al 2022 19th International Bhurban Conference on Applied Sciences and Technology (IBCAST), (2022) p. 10
  5. Afashagov A A, Shebzukhova M A, Shebzukhov A A Phys. Solid State 64 293 (2022)
  6. Saurov A N, L’vov P E et al J. Mater. Chem. C 10 5864 (2022)
  7. Wan K, Gou X, Guo Zh J Bionic Eng 18 501 (2021)
  8. Koryakin A A, Kukushkin S A Physica Status Solidi (b) 258 (6) (2021)
  9. Bulyarskiy S V, Svetukhin V V Silicon 13 3321 (2021)
  10. Tynyshtykbayev K, Spitas Ch et al ECS J. Solid State Sci. Technol. 10 013009 (2021)
  11. Alekseev N I, Khadutin V S, Khmel’nitskii I K Russ. J. Phys. Chem. 95 2444 (2021)
  12. Altuntas I, Kocak M N et al Materials Science in Semiconductor Processing 127 105733 (2021)
  13. L’vov P E, Bulyarskiy S V et al 39 (6) (2021)
  14. Perekrestov V, Kornyushchenko A et al 2021 IEEE 11th International Conference Nanomaterials: Applications & Properties (NAP), (2021) p. 1
  15. Chen X, Li Yu et al Electrochemistry Communications 110 106642 (2020)
  16. Akhmadiev F G, Farakhov M I, Akhmitshin A A Theor Found Chem Eng 54 592 (2020)
  17. Smagulova S A, Vinokurov P V et al Semiconductors 54 454 (2020)
  18. Bulyarskiy S V, Svetukhin V V J Nanopart Res 22 (12) (2020)
  19. Nanosist. Nanomater. Nanotehnol. 18 (4) (2020)
  20. Bildanau E, Pękalski J et al Phys. Rev. E 101 (1) (2020)
  21. Erwin S C, Lyons J L ACS Appl. Mater. Interfaces 12 49245 (2020)
  22. Polishchuk V A, Tomaev V V, Leonov N B J. Synch. Investig. 14 459 (2020)
  23. Lozovoy K A, Korotaev A G et al Surface and Coatings Technology 384 125289 (2020)
  24. Reilly C E, Mates T E et al Semicond. Sci. Technol. 35 095014 (2020)
  25. Lozovoy K A, Kokhanenko A P et al Russ Phys J 63 296 (2020)
  26. Koryakin A A, Kukushkin S A et al CrystEngComm 21 4707 (2019)
  27. Balakirev S V, Solodovnik M S et al Nanotechnology 30 505601 (2019)
  28. Koryakin A A, Kukushkin S A, Sibirev N V Semiconductors 53 350 (2019)
  29. Dvornichenko A V, Kharchenko D O et al Journal of Crystal Growth 514 1 (2019)
  30. Barabash M Yu, Vlaykov G G et al Advances in Thin Films, Nanostructured Materials, and Coatings Lecture Notes in Mechanical Engineering Chapter 17 (2019) p. 169
  31. Nanosist. Nanomater. Nanotehnol. 17 (3) (2019)
  32. Lozovoy K A, Kokhanenko A P et al Crystal Growth & Design 19 7015 (2019)
  33. Sibirev N V, Koryakin A A, Berdnikov Y S Semiconductors 52 2124 (2018)
  34. Minenkov A A, Kryshtal A P, Bogatyrenko S I Journal of Alloys and Compounds 756 50 (2018)
  35. Yamada A, Muroi M et al Semicond. Sci. Technol. 33 094002 (2018)
  36. Lozovoy K, Kokhanenko A, Voitsekhovskii A Nanotechnology 29 054002 (2018)
  37. Kosminska Yu O, Perekrestov V I Diamond and Related Materials 85 37 (2018)
  38. Berdnikov Yu S, Sibirev N V Semiconductors 52 2085 (2018)
  39. Kukushkin S A, Osipov A V et al Phys. Solid State 59 674 (2017)
  40. Antonets I V, Kotov L N et al Tech. Phys. 62 261 (2017)
  41. Grabov V M, Demidov E V et al Semiconductors 51 831 (2017)
  42. Pavlov P A Thermophys. Aeromech. 23 543 (2016)
  43. Rudenko S P, Maksimenko L S et al Plasmonics 11 557 (2016)
  44. Lozovoy K A, Pishchagin A A et al J. Phys.: Conf. Ser. 741 012019 (2016)
  45. Orekhov A S, Kamilov T S et al Nanotechnol Russia 11 610 (2016)
  46. Kosminska Yu O, Perekrestov V I et al 2016 International Conference on Nanomaterials: Application & Properties (NAP), (2016) p. 01NTF04-1
  47. Kukushkin S A, Osipov A V et al Phys. Solid State 58 967 (2016)
  48. Lozovoy K A, Kokhanenko A P, Voitsekhovskii A V 109 (2) (2016)
  49. Danilova Yu V, Shumilova T G et al Petrology 24 35 (2016)
  50. Tumarkin A V, Serenkov I T et al Phys. Solid State 58 364 (2016)
  51. Antonets I V, Golubev E A et al Tech. Phys. 61 416 (2016)
  52. Belyaev A P, Antipov V V, Rubets V P Semiconductors 50 415 (2016)
  53. Lozovoy K A, Kokhanenko A P, Voitsekhovskii A V Crystal Growth & Design 15 1055 (2015)
  54. Rabinovich O I, Kushhov A R, Gaev D S Modern Electronic Materials 1 73 (2015)
  55. Tumarkin A V, Kukushkin S A et al Phys. Solid State 57 815 (2015)
  56. Roth S V, Santoro G et al ACS Appl. Mater. Interfaces 7 12470 (2015)
  57. Tynyshtykbaev K B, Ryabikin Yu A et al Russ Microelectron 44 559 (2015)
  58. Perekrestov V, Kornyushchenko A et al Phys. Status Solidi B 252 397 (2015)
  59. Vyatkin A F, Volkov V T et al J. Synch. Investig. 9 139 (2015)
  60. Huang H, Yan J Semicond. Sci. Technol. 30 115001 (2015)
  61. Kukushkin S A, Osipov A V et al Phys. Solid State 57 1899 (2015)
  62. Lozovoy K A, Kokhanenko A P, Voitsekhovskiy A V J. Phys.: Conf. Ser. 541 012084 (2014)
  63. Dubrovskii V G Tech. Phys. Lett. 40 177 (2014)
  64. Lozovoy K A, Voytsekhovskiy A V et al Surface Science 619 1 (2014)
  65. Red’kov A V, Lipovskii A A, Zhurikhina V V J. Phys.: Conf. Ser. 541 012005 (2014)
  66. Dolgov A S, Valuiskaya A V J. Synch. Investig. 8 301 (2014)
  67. Kukushkin S A, Osipov A V J. Phys. D: Appl. Phys. 47 313001 (2014)
  68. Vengrenovich R D, Ivanskii B V et al Semiconductors 48 783 (2014)
  69. Gerasimenko N N, Tynyshtykbaev K B et al Semiconductors 48 1088 (2014)
  70. Chuchman M P, Laslov G E, Shuaibov A K High Temp 52 497 (2014)
  71. Voitsekhovskii A V, Kokhanenko A P, Lozovoy K A Bull. Russ. Acad. Sci. Phys. 78 1058 (2014)
  72. Perekrestov V I, Kornyushchenko A S, Natalich V V Solid State Sciences 33 12 (2014)
  73. Kukushkin S A, Osipov A V, Feoktistov N A Phys. Solid State 56 1507 (2014)
  74. Perekrestov V I, Kosminska Yu O et al Physica B: Condensed Matter 411 140 (2013)
  75. Simonyan A K J. Contemp. Phys. 48 220 (2013)
  76. Kukushkin S A, Osipov A V Semiconductors 47 1551 (2013)
  77. Lebedev D, Nurgazizov N et al ANP 02 236 (2013)
  78. Stefanovich L I, Terekhova Yu V, Feldman E P Phys. Solid State 55 1955 (2013)
  79. Redkov A V, Zhurikhina V V, Lipovskii A A Journal of Non-Crystalline Solids 376 152 (2013)
  80. Tynyshtykbaev K B, Aitmukan T et al MSA 04 1 (2013)
  81. Kukushkin S A, Osipov A V 113 (2) (2013)
  82. Belyaev A P, Rubets V P et al Russ J Appl Chem 86 667 (2013)
  83. Rabinovich O I, Kushkhov A R, Gaev D S Inorg Mater 49 39 (2013)
  84. Perekrestov V I, Kosminska Yu O et al J Porous Mater 20 967 (2013)
  85. Kukushkin S A, Osipov A V Mech. Solids 48 216 (2013)
  86. Bulyarskii S V Russ Microelectron 41 474 (2012)
  87. Kukushkin S A, Osipov A V KEM 528 145 (2012)
  88. Dolgov A S, Stetsenko N V J. Synch. Investig. 6 95 (2012)
  89. Kushkhov A R, Gaev D S et al Crystallogr. Rep. 57 288 (2012)
  90. Fisenko S P, Khodyko Yu A J Eng Phys Thermophy 85 487 (2012)
  91. Smirnov B M EPL 99 13001 (2012)
  92. Chuchman M P, Mesarosh L V et al Opt. Spectrosc. 113 572 (2012)
  93. Valeev R G, Beltukov A N et al J Struct Chem 52 181 (2011)
  94. Koropov A V Tech. Phys. 56 1781 (2011)
  95. Olemskoi A I, Yushchenko O V, Zhilenko T I Phys. Solid State 53 845 (2011)
  96. Perekrestov V I, Kosminska Yu O et al Vacuum 86 111 (2011)
  97. Wang K-F, Peng Ch-X et al Appl. Phys. A 104 573 (2011)
  98. Tynyshtykbaev K B 2011 International Conference on Multimedia Technology, (2011) p. 6528
  99. Kazanskii M A, Nazarenko M V, Dubrovskii V G Tech. Phys. Lett. 37 282 (2011)
  100. Sibirev N V, Nazarenko M V, Dubrovskii V G Tech. Phys. Lett. 37 596 (2011)
  101. Koropov A V J. Synch. Investig. 5 780 (2011)
  102. Perekrestov V I, Mokrenko A A et al J. Synch. Investig. 5 667 (2011)
  103. Kuz’michev S V, Kukushkin S A et al Phys. Solid State 52 1645 (2010)
  104. Lubov M N, Kulikov D V, Trushin Yu V Tech. Phys. 55 85 (2010)
  105. Gladkikh N T, Kryshtal’ A P, Sukhov R V Phys. Solid State 52 633 (2010)
  106. Dubrovskii V G Tech. Phys. Lett. 36 219 (2010)
  107. Shishkovsky I Physica Status Solidi (a) 207 1154 (2010)
  108. Cluster Processes in Gases and Plasmas 1 (2010) p. 423
  109. Perekrestov V I, Olemskoi A I et al Physics Letters A 373 3386 (2009)
  110. Perekrestov V I, Olemskoĭ A I et al Phys. Solid State 51 1060 (2009)
  111. Belyaev A P, Rubets V P et al Inorg Mater 45 357 (2009)
  112. Kinetics of First‐Order Phase Transitions 1 (2009) p. 399
  113. Sibirev N V, Dubrovskii V G et al Tech. Phys. 54 586 (2009)
  114. Kompan M E, Klimov V A et al Tech. Phys. Lett. 35 234 (2009)
  115. Indeĭtsev D A, Osipova E V Phys. Solid State 51 1901 (2009)
  116. Antonets I V, Kotov L N et al J. Commun. Technol. Electron. 54 493 (2009)
  117. Dubrovskii V G, Cirlin G E, Ustinov V M Semiconductors 43 1539 (2009)
  118. Dubrovskii V G, Nazarenko M V, Sibirev N V Tech. Phys. Lett. 35 1117 (2009)
  119. Perekrestov V I, Kornyushchenko A S, Kosminskaya Yu A Phys. Solid State 50 1357 (2008)
  120. Шкляев А А, Ичикава М Uspekhi Fizicheskikh Nauk 178 139 (2008)
  121. Galdikas A Applied Surface Science 254 3964 (2008)
  122. Kukushkin S A, Kuz’michev S V Phys. Solid State 50 (8) (2008)
  123. Prysyazhnyuk V, Mykolaychuk O Journal of Non-Crystalline Solids 354 4458 (2008)
  124. Ayupov B M, Danilovich V S, Prokhorova S A Opt. Spectrosc. 105 896 (2008)
  125. Perekrestov V I, Kornyushchenko A S, Kosminskaya Yu A Jetp Lett. 86 767 (2008)
  126. Perekrestov V I, Kornyushchenko A S, Kosminskaya Yu A Tech. Phys. 53 1364 (2008)
  127. Koropov A V Phys. Solid State 50 2184 (2008)
  128. Kukushkin S A, Osipov A V Kinet Catal 49 79 (2008)
  129. Bhattacharyya S R, Chini T K et al J. Exp. Theor. Phys. 107 1009 (2008)
  130. Mosienko B A 222 1533 (2008)
  131. Kukushkin S A, Osipov A V Phys. Solid State 50 1238 (2008)
  132. Zhabrev V A, Margolin V I Inorg Mater 44 1459 (2008)
  133. Vengrenovich R D, Ivanskiĭ B V, Moskalyuk A V J. Exp. Theor. Phys. 104 906 (2007)
  134. Vengrenovich R D, Moskalyuk A V, Yarema S V Phys. Solid State 49 11 (2007)
  135. Dyskin V G Appl. Sol. Energy 43 72 (2007)
  136. Safonov K L, Dubrovskii V G et al Tech. Phys. Lett. 33 490 (2007)
  137. Kukushkin S A, Shlyagin M G et al 102 (5) (2007)
  138. Indeitsev D, Mochalova Yu Meccanica 41 311 (2006)
  139. Belyaev A P, Rubets V P, Antipov V V Semiconductors 40 770 (2006)
  140. Prysyazhnyuk V, Mykolaychuk O Journal of Non-Crystalline Solids 352 4299 (2006)
  141. Ievlev V M, Shvedov E V Phys. Solid State 48 144 (2006)
  142. Borman V D, Zenkevich A V et al J. Exp. Theor. Phys. 103 850 (2006)
  143. Kukushkin S A, Osipov A V, Shlyagin M G Tech. Phys. 51 1035 (2006)
  144. Dubrovskiĭ V G Semiconductors 40 1123 (2006)
  145. Gubanov P Yu, Maksimov I L, Morozov V P Crystallogr. Rep. 51 513 (2006)
  146. Dubrovskiĭ V G, Sibirev N V et al Semiconductors 40 249 (2006)
  147. Gubanov P Yu, Zheltov Yu V et al Tech. Phys. 50 364 (2005)
  148. Kukushkin S A 98 (3) (2005)
  149. Zverev A V, Neizvestny I G et al Semiconductors 39 967 (2005)
  150. Kukushkin S A Tech. Phys. Lett. 31 859 (2005)
  151. Dubrovskiı̆ V G Semiconductors 39 1267 (2005)
  152. Shuaibov A K, Chuchman M P, Dashchenko A I Opt. Spectrosc. 97 633 (2004)
  153. Matukov I D, Kalinin D S et al Journal of Crystal Growth 266 313 (2004)
  154. Sibirev N V, Dubrovskii V G Tech. Phys. Lett. 30 791 (2004)
  155. Dubrovskii V G, Sibirev N V, Cirlin G E Tech. Phys. Lett. 30 682 (2004)
  156. Koshkin V M, Slezov V V Tech. Phys. Lett. 30 367 (2004)
  157. Belyaev A P, Rubets V P et al Semiconductors 37 617 (2003)
  158. Shuaibov A K, Chuchman M P Tech. Phys. Lett. 29 485 (2003)
  159. Smirnov B M Uspekhi Fizicheskikh Nauk 173 609 (2003)
  160. Indeitsev D, Mochalova Yu Mathematical and Numerical Aspects of Wave Propagation WAVES 2003 Chapter 80 (2003) p. 500
  161. Schmelzer J W P, Schmelzer J Atmospheric Research 65 303 (2003)
  162. Kukushkin S A, Osipov A V et al Semiconductors 36 1097 (2002)
  163. Kukushkin S A, Bessolov V N et al Phys. Solid State 44 1399 (2002)
  164. Gordon P V, Kukushkin S A, Osipov A V Phys. Solid State 44 2175 (2002)
  165. Ambrok A G, Kalashnikov E V, Kukushkin S A 91 4961 (2002)
  166. Kukushkin S A, Osipov A V Phys. Rev. B 65 (17) (2002)
  167. Perekrestov V I, Koropov A V, Kravchenko S N Phys. Solid State 44 1181 (2002)
  168. Belyaev A P, Rubets V P Semiconductors 36 789 (2002)
  169. Kukushkin S A Phys. Solid State 44 2298 (2002)
  170. Ferguson T, Gavrilov G et al Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment 483 698 (2002)
  171. Belyaev A P, Rubets V P et al Tech. Phys. 47 491 (2002)
  172. Maksimov I L Crystallogr. Rep. 47 S105 (2002)
  173. Plyatsko S V, Bergush N N Semiconductors 35 374 (2001)
  174. Belyaev A P, Rubets V P, Kukushkin S A Phys. Solid State 43 1979 (2001)
  175. Belyaev A P, Rubets V P Semiconductors 35 279 (2001)
  176. Belyaev A P, Kukushkin S A, Rubets V P Phys. Solid State 43 597 (2001)
  177. Belyaev A P, Rubets V P et al Phys. Solid State 43 778 (2001)
  178. Kukushkin S A, Kukushkin S A, Osipov A V Phys. Solid State 43 90 (2001)
  179. Kukushkin S A, Bessolov V N et al Phys. Solid State 43 2229 (2001)
  180. Kukushkin S A, Osipov A V Phys. Solid State 43 325 (2001)
  181. Kukushkin S A, Osipov A V Phys. Solid State 43 82 (2001)
  182. Schmelzer J W P, Schmelzer J 114 5180 (2001)
  183. Kuni F M, Shchekin A K, Grinin A P Uspekhi Fizicheskikh Nauk 171 345 (2001)
  184. Ambrok A G, Kalashnikov E V, Kukushkin S A Tech. Phys. 46 311 (2001)
  185. Vakulenko A A, Kukushkin S A Phys. Solid State 42 179 (2000)
  186. Bakhtizin R Z, Hasegawa Y et al J. Exp. Theor. Phys. 91 1000 (2000)
  187. Pchelyakov O P, Bolkhovityanov Yu B et al Semiconductors 34 1229 (2000)
  188. Schmelzer J W P, Schmelzer J, Gutzow I S 112 3820 (2000)
  189. Ginzburg B M Tech. Phys. Lett. 26 345 (2000)
  190. Vostokov N V, Gusev S A et al Semiconductors 34 6 (2000)
  191. Nucleation (2000) p. 495
  192. Pchelyakov O P, Bolkhovityanov Yu B et al Thin Solid Films 367 75 (2000)
© Успехи физических наук, 1918–2024
Электронная почта: ufn@ufn.ru Телефоны и адреса редакции О журнале Пользовательское соглашение