RSS-ленты
РусскийEnglish
Выпуск 11, 2024
Том год страница
Выпуски Авторы PACS Подписчикам Для авторов

Выпуски

 / 

1997

 / 

Июнь

←  →

Обзоры актуальных проблем


Шум вида 1/f и нелинейные эффекты в тонких металлических пленках


Национальный исследовательский университет "Московский институт электронной техники", пл. Шокина, д. 1, Зеленоград, Москва, 124498, Российская Федерация

Дан обзор результатов исследований 1/f-шума и нелинейных эффектов в тонких металлических пленках. Приводятся экспериментальные данные по зависимостям уровня 1/f-шума и коэффициента кубической нелинейности вольт-амперной характеристики (ВАХ) пленок от толщины, температуры, внутренних механических напряжений. Представлены также результаты исследования влияния микроструктуры пленок на уровень 1/f-шума. Спектральная плотность мощности 1/f-шума и коэффициент нелинейности ВАХ имеют активационную зависимость от температуры и экспоненциальную от внутренних механических напряжений для металлических пленок с повышенной концентрацией подвижных дефектов. Проанализирована физическая модель 1/f-шума и нелинейности ВАХ в металлических пленках. Модель основана на механизме рождения и гибели квазиравновесных вакансий в объеме пленки. Модель позволяет объяснить взаимосвязь между 1/f-шумом и нелинейностью ВАХ в металлических пленках и наблюдаемые экспериментальные результаты.

Текст pdf (520 Кб)
English fulltext is available at DOI: 10.1070/PU1997v040n06ABEH000246
PACS: 72.70.+m, 73.50.Td (все)
DOI: 10.3367/UFNr.0167.199706c.0623
URL: https://ufn.ru/ru/articles/1997/6/c/
A1997XM47200003
Цитата: Жигальский Г П "Шум вида 1/f и нелинейные эффекты в тонких металлических пленках" УФН 167 623–648 (1997)
BibTexBibNote ® (generic)BibNote ® (RIS)MedlineRefWorks

English citation: Zhigal’skii G P “1/f noise and nonlinear effects in thin metal films” Phys. Usp. 40 599–622 (1997); DOI: 10.1070/PU1997v040n06ABEH000246

Список литературы (214) ↓ Статьи, ссылающиеся на эту (41) Похожие статьи (20)

  1. Johnson J B Phys. Rev. 26 71 (1925)
  2. Schottky W Phys. Rev. 28 74 (1926)
  3. Van der Ziel A Fluctuation Phenomena in Semi-Conductors (London: Butterworths, 1959); Translated into Russian, Van der Ziel A Fluctuation Phenomena in Semi-Conductors (Moscow: Inostrannaya Literatura, 1961)
  4. Naryshkin A K, Vrachev A S Teoriya Nizkochastotnykh Shumov (The Theory of Low-Frequency Noises) (Moscow: Energiya, 1972)
  5. Van der Ziel A Sources, Characterization, Measurement (Englewood Cliffs: Prentice-Hall, 1970); Translated into Russian, Van der Ziel A Sources, Characterization, Measurement (Moscow: Sovetskoe Radio, 1973)
  6. Van der Ziel A Adv. Electron. Phys. 49 225 (1979)
  7. Van der Ziel A Proc. IEEE 76 ((4)) 28 (1988)
  8. Buckingham M Noise in Electronic Devices and Systems (Chichester: Ellis Horwood, 1983); Translated into Russian, Buckingham M Noise in Electronic Devices and Systems (Moscow: Mir, 1986)
  9. Luk'yanchikova N B Fluktuatsionnye Yavleniya v Poluprovodnikakh i Poluprovodnikovykh Priborakh (Fluctuation Phenomena in Semiconductors and Devices Containing Semiconductors) (Moscow: Radio i Svyaz', 1990)
  10. Kogan Sh M Usp. Fiz. Nauk 145 285 (1985); Kogan Sh M Sov. Phys. Usp. 28 170 (1985)
  11. Hooge F N, Kleinpenning T G M, Vandamme L K J Rep. Prog. Phys. 44 479 (1981)
  12. Dutta P, Horn P M Rev. Mod. Phys. 53 ((3)) 497 (1981)
  13. Weissman M B Rev. Mod. Phys. 60 537 (1988)
  14. Bochkov G N, Kuzovlev Yu E Usp. Fiz. Nauk 141 151 (1983); Bochkov G N, Kuzovlev Yu E Sov. Phys. Usp. 26 829 (1983)
  15. Pryanikov V S Prognozirovanie Otkazov Poluprovodnikovykh Priborov (Forecasting of Failures in Semiconductor Devices) (Moscow: Energiya, 1978)
  16. Luk'yanchikova N B Elektronnaya Prom. (6) 28 (1983)
  17. Celik-Butler Z Proc. AIP Conf. 285 "Noise in Physical Systems and 1/f Fluctuations" (St. Louis, New York, 1993) p. 200
  18. Sikula J, Touboul A Proc. AIP Conf. 285 "Noise in Physical Systems and 1/f Fluctuations" (St. Louis, New York, 1993) p. 206
  19. Jones B K Adv. Electron. Electr. Phys. 87 201 (1994)
  20. Neri B, Diligenti A, Bagnoli P E IEEE Trans. Electron. Dev. ED-34 2317 (1987)
  21. Touboul A, Verdier F, Herve Y Proc. Int. Conf. "Noise in Physical Systems and 1/f Fluctuations" (Kyoto, Japan, 1991) p. 73
  22. Hooge F N, Hoppenbrouwers A M H Physica 45 386 (1969)
  23. Handel P H Phys. Rev. Lett. 34 1492 (1975)
  24. Handel P H Phys. Rev. Lett. 34 1495 (1975)
  25. Handel P H Phys. Rev. A 22 745 (1980)
  26. Handel P H Noise in Physical Systems and 1/f Noise (Eds A d'Amico, P Mazzetti) (New York: Elsevier, 1986) p. 465
  27. Van Viet K M Solid-State Electron. 34 1 (1991)
  28. Bychikhin S, Gertsenstein M, Potemkin V Proc. 13 Conf. "Noise in Physical Systems and 1/f Fluctuations" (Eds V Bareikis, R Katilius) (Singapore: World Scientific, 1995) p. 269
  29. Black R D, Snow W M, Weissman M B Phys. Rev. B 25 2955 (1982)
  30. McWhorter A L Semiconductor Surface Physics (Ed. R H Kingston) (University of Pennsylvania Press, 1957) p. 207; Translated into Russian, McWhorter A L Semiconductor Surface Physics (Moscow: Inostrannaya Literatura, 1959) p. 263
  31. Hooge F N Phys. Lett. A 29 139 (1969)
  32. Hooge F N Physica B 162 343 (1990)
  33. Voss R F, Clarke J Phys. Rev. B 13 556 (1976)
  34. Eberhard J W, Horn P M Phys. Rev. B 18 6681 (1978)
  35. Fleetwood D M, Giordano N Phys. Rev. B 25 1427 (1982)
  36. Fleetwood D M, Giordano N Phys. Rev. B 27 667 (1983)
  37. Fleetwood D M, Mosden J T, Giordano N Phys. Rev. Lett. 50 450 (1983)
  38. Hooge FN Physica (Netherlands) 60 130 (1972)
  39. Hooge F N Physica B 83 14 (1976)
  40. Kleinpenning T G M Physica B 113 189 (1982)
  41. Bosman G, Zijlstra R J J, Van Rheenen A Phys. Lett. A 80 57 (1980)
  42. Weissman M B J. Appl. Phys. 51 5872 (1980)
  43. Black R D, Restle P J, Weissman M B Phys. Rev. Lett. 51 1476 (1983)
  44. Black R D, Weissman M B, Restle P J J. Appl. Phys. 53 6280 (1982)
  45. Weissman M B Physica B 100 157 (1980)
  46. Hooge F N, Vandamme L K J Phys. Lett A 66 315 (1978)
  47. Palenskis V, Shoblitskas Z Solid State Commun. 43 761 (1982)
  48. Hooge F N, Kedzia J, Vandamme L K J J. Appl. Phys. 50 ((12)) 8087 (1979)
  49. Jevtic M M Solid-State Electron. 31 1049 (1988)
  50. Musha T Phys. Rev. B 26 1042 (1982)
  51. Dutta P, Eberhard J W, Horn P M Solid State Commun. 21 679 (1977)
  52. Leemann C, Skove M J, Stillwell E P Solid State Commun. 35 97 (1980)
  53. Voss R F, Clarke J Phys. Rev. Lett. 36 42 (1976)
  54. Clarke J, Voss R F Phys. Rev. Lett. 33 24 (1974)
  55. Scofield J H, Mantese J V, Webb W W Phys. Rev. B 32 736 (1985)
  56. Scofield J H, Webb W W Phys. Rev. Lett. 54 353 (1985)
  57. Kittel Ch Introduction to Solid State Physics (New York: Wiley, 1967); Translated into Russian, Kittel Ch Introduction to Solid State Physics (Moscow: Nauka, 1978)
  58. Palenskis V P, Shoblitskas Z P, Mikola&ibreve;tis G S Fluktuatsionnye Yavleniya v Fizicheskikh Sistemakh. Tez. Dokl. 4 Vses. Konf. (Fluctuation Phenomena in Physical Systems. Abstracts of the 4th All-Union Conf.) (Pushchino, Moscow Region, 1985) p. 102
  59. Vandamme L K J, Kedzia J Thin Solid Films 65 283 (1980)
  60. Hooge F N Proc. Int. Conf. "Noise in Physical Systems and 1/f Fluctuations" (Kyoto, Japan, 1991) p. 7
  61. Kleinpenning T G M Physica B 98 289 (1980)
  62. Hooge F N, Hoppenbrouwers A M H Phys. Lett. A 29 642 (1969)
  63. Hoppenbrouwers A M H, Hooge F N Philips Res. Rep. 25 69 (1970)
  64. Tandon J L, Bilger H R J. Appl. Phys. 47 1697 (1976)
  65. Rollin B V, Templeton I M Proc. Phys. Soc. B 66 (Part 3) 259 (1953)
  66. Firle T E, Winston H J. Appl. Phys. 26 716 (1955)
  67. Caloyannides M A J. Appl. Phys. 45 307 (1974)
  68. Van Viet K M et al Physica 20 481 (1954)
  69. Malakhov A N Radiotekh. Elektron. 4 ((1)) 54 (1959)
  70. Brophy J J Phys. Rev. 166 827 (1968)
  71. Malakhov A N, Yakimov A V Radiotekh. Elektron. 19 2436 (1974); Malakhov A N, Yakimov A V Radio Eng. Electron. Phys. 19 137 (1974)
  72. Yakimov A V Izv. Vyssh. Uchebn. Zaved. Radiofiz. 23 238 (1980); Yakimov A V Radiophys. Quantum Electron. 23 170 (1980)
  73. Brophy J J J. Appl. Phys. 40 3551 (1969)
  74. Brophy J J J. Appl. Phys. 41 2913 (1970)
  75. Purcell W E J. Appl. Phys. 43 2890 (1972)
  76. Dell R A, Epstein M, Kannewurf C R J. Appl. Phys. 44 472 (1973)
  77. Moore W J J. Appl. Phys. 45 1896 (1974)
  78. Stoisiek M, Wolf D J. Appl. Phys. 47 362 (1976)
  79. Potemkin V V, Stepanov A V Radiotekh. Elektron. 25 1269 (1980)
  80. Potemkin V V, Stepanov A V Fluktuatsionnye Yavleniya v Fizicheskikh Sistemakh. Tez. Dokl. 2 Vses. Konf. (Fluctuation Phenomena in Physical Systems. Abstracts of the 2nd All-Union Conf.) (Vilnius, USSR, 1979) p. 66
  81. Dutta P, Dimon P, Horn P M Phys. Rev. Lett. 43 646 (1979)
  82. Klimontovich Yu L Statisticheskaya Fizika (Moscow: Nauka, 1982); Translated into English, Klimontovich Yu L Statisticheskaya Fizika Statistical Physics (New York: Harwood Acad. Publ., 1986)
  83. Stratonovich R L Izbrannye Voprosy Teorii Fluktuatsy&ibreve; v Radiotekhnike (Selected Topics of Fluctuation Theory in Radioengineering) (Moscow: Sovetskoe Radio, 1961)
  84. Bell D A, Dissanayake S P B Electron. Lett. 11 274 (1975)
  85. Nelkin M, Tremblay A M S J. Stat. Phys. 25 253 (1981)
  86. Aleksandrov A A et al Izv. Vyssh. Uchebn. Zaved. Radiofiz. 29 980 (1986); Aleksandrov A A et al Radiophys. Quantum Electron. 29 (1986)
  87. Aleksandrov A A et al Izv. Vyssh. Uchebn. Zaved. Radiofiz. 31 507 (1988); Aleksandrov A A et al Radiophys. Quantum Electron. 31 (1988)
  88. Garfunkel G A, Weissman M B Bull. Am. Phys. Soc. 32 480 (1987)
  89. Zhigal'skii G P Fluctuation Phenomena in Physical Systems (Ed. V Palenskis) (Vilnius: University Press, 1994) p. 285
  90. Zhigal'skii G P Zh. Fiz. Khim. 69 1355 (1995)
  91. Potemkin V V, Stepanov A V, Zhigal'skii G P Proc. AIP Conf. 285 "Noise in Physical Systems and 1/f Fluctuations" (St. Louis, New York, 1993) p. 61
  92. Zhigal'skii G P Proc. AIP Conf. 285 "Noise in Physical Systems and 1/f Fluctuations" (St. Louis, New York, 1993) p. 81
  93. Dagge K et al Proc. AIP Conf. 285 "Noise in Physical Systems and 1/f Fluctuations" (St. Louis, New York, 1993) p. 603
  94. Briggmann J et al Proc. AIP Conf. 285 "Noise in Physical Systems and 1/f Fluctuations" (St. Louis, New York, 1993) p. 607
  95. Bull C S, Bozic S M Brit. J. Appl. Phys. 18 883 (1967)
  96. Lorteije J H J, Hoppenbrouwers A M H Philips Res. Rep. 26 29 (1971)
  97. Jones B K, Francis J D J. Phys. D:. Appl. Phys. 8 1172 (1975)
  98. Palenskis V P, Leont'ev G E, Mikola&ibreve;tis G S Radiotekh. Elektron. 21 2433 (1976)
  99. Jones B K Electron. Lett. 12 110 (1976)
  100. Beck H G E, Spruit W P J. Appl. Phys. 49 3384 (1978)
  101. Dutta P, Eberhard J W, Horn P M Solid State Commun. 27 1389 (1978)
  102. Clarke J, Hsiang T Y Phys. Rev. Lett. 34 1217 (1975)
  103. Clarke J, Hsiang T Y Phys. Rev. B 13 4790 (1976)
  104. Weissman M B, Dollinger G D J. Appl. Phys. 52 3095 (1981)
  105. Zhigal'ski&ibreve; G P et al Izv. Vyssh. Uchebn. Zaved. Radiofiz. 33 1181 (1990); Zhigal'ski&ibreve; G P et al Radiophys. Quantum Electron. 33 (1990)
  106. Andrushko A F, Bakshi I S, Zhigal'ski&ibreve; G P Izv. Vyssh. Uchebn. Zaved. Radiofiz. 24 498 (1981); Andrushko A F, Bakshi I S, Zhigal'ski&ibreve; G P Radiophys. Quantum Electron. 24 343 (1981)
  107. Kurov G A, Zhigal'ski&ibreve; G P Fizika Plenok Chast' 2 (Uchebnoe Posobie) [Physics of Films Part 2 (Text-Book)] (Moscow: MIET Publ., 1980)
  108. Boltaks B I Diffuziya v Poluprovodnikakh (Diffusion in Semiconductors) (Moscow: Fizmatgiz, 1961)
  109. Keshner M S Proc. IEEE 70 212 (1982)
  110. Orlov V B, Yakimov A V Izv. Vyssh. Uchebn. Zaved. Radiofiz. 33 196 (1990); Orlov V B, Yakimov A V Radiophys. Quantum Electron. 33 (1990)
  111. Van der Ziel A Physica 16 359 (1950)
  112. Du Pre F K Phys. Rev. 78 615 (1950)
  113. Kogan Sh M, Nagaev K E Pis'ma Zh. Tekh. Fiz. 10 313 (1984); Kogan Sh M, Nagaev K E Sov. Tech. Phys. Lett. 10 132 (1984)
  114. Kogan Sh M, Nagaev K E Solid State Commun. 49 387 (1984)
  115. Yakimov A V Izv. Vyssh. Uchebn. Zaved. Radiofiz. 28 1071 (1985)
  116. Kozub V I Fluktuatsionnye Yavleniya v Fizicheskikh Sistemakh. Tez. Dokl. 4 Vses. Konf. (Fluctuation Phenomena in Physical Systems. Abstracts of the 4th All-Union Conf.) (Pushchino, Moscow Region, 1985) p. 73
  117. Va&ibreve;nshte&ibreve;n L A Dokl. Akad. Nauk SSSR 285 609 (1985); Va&ibreve;nshte&ibreve;n L A Sov. Phys. Dokl. 30 967 (1985)
  118. Halford D Proc. IEEE 56 251 (1968)
  119. Palenskis V et al Fluktuatsionnye Yavleniya v Fizicheskikh Sistemakh. Tez. Dokl. 3 Vses. Konf. (Fluctuation Phenomena in Physical Systems. Abstracts of the 3rd All-Union Conf.) (Vilnius, USSR, 1983) p. 131
  120. Radeka V IEEE Trans. Nucl. Sci. NS-16 17 (1969)
  121. Landau L D, Lifshitz E M Statisticheskaya Fizika Chast' 2 (Moscow: Nauka, 1976); Translated into English, Landau L D, Lifshitz E M Statisticheskaya Fizika Statistical Physics Part 2 (Oxford: Pergamon Press, 1984)
  122. Zhigal'ski&ibreve; G P, Karev A V Radiotekh. Elektron. 22 2610 (1977); Zhigal'ski&ibreve; G P, Karev A V Radio Eng. Electron. Phys. 22 112 (1977)
  123. Kleinpenning T G M Physica B 84 353 (1976)
  124. Scofield J H, Darling D H, Webb W W Phys. Rev. B 24 7450 (1981)
  125. Black R D, Weissman M B, Fliegel F M Phys. Rev. B 24 7454 (1981)
  126. Yakimov A V Zh. Tekh. Fiz. 56 1657 (1986); Yakimov A V Sov. Phys. Tech. Phys. 31 987 (1986)
  127. Ketchen M B, Clarke J Phys. Rev. B 17 114 (1978)
  128. Zhigal'ski&ibreve; G P, Fedorov A S Izv. Vyssh. Uchebn. Zaved. Radiofiz. 28 1192 (1985); Zhigal'ski&ibreve; G P, Fedorov A S Radiophys. Quantum Electron. 28 831 (1985)
  129. Zhigal'ski&ibreve; G P, Bakshi I S Radiotekh. Elektron. 25 771 (1980); Zhigal'ski&ibreve; G P, Bakshi I S Radio Eng. Electron. Phys. 25 61 (1980)
  130. Sato H J. Phys. Soc. Jpn. 44 49 (1978)
  131. Sato H Physica B 97 194 (1979)
  132. Van Viet K M, Van der Ziel A, Schmidt R R J. Appl. Phys. 51 2947 (1980)
  133. Va&ibreve;nshte&ibreve;n L A Zh. Eksp. Teor. Fiz. 83 1841 (1982); Va&ibreve;nshte&ibreve;n L A Sov. Phys. JETP 56 1064 (1982)
  134. Van Viet K M, Mehta H Phys. Status Solidi B 106 11 (1981)
  135. Klimontovich Yu L Zh. Eksp. Teor. Fiz. 80 2243 (1981); Klimontovich Yu L Sov. Phys. JETP 53 1171 (1981)
  136. Klimontovich Yu L Pis'ma Zh. Tekh. Fiz. 9 406 (1983); Klimontovich Yu L Sov. Tech. Phys. Lett. 9 174 (1983)
  137. Lundstrom I, McQueen D, Klason C Solid State Commun. 13 1941 (1973)
  138. Klason C Solid State Commun. 13 1945 (1973)
  139. Zhigal'ski&ibreve; G P, Fedorov A S Izv. Vyssh. Uchebn. Zaved. Radiofiz. 37 161 (1994)
  140. Yakimov A V Izv. Vyssh. Uchebn. Zaved. Radiofiz. 25 308 (1982)
  141. Masoero A, Mazzetti P, Stepanescu A Vacuum 27 349 (1977)
  142. Potemkin V V et al Proc. Int. Conf. "Noise in Physical Systems and 1/f Fluctuations" (Kyoto, Japan, 1991) p. 607
  143. Zhigalskii G P Proc. Int. Conf. "Noise in Physical Systems and 1/f Fluctuations" (Kyoto, Japan, 1991) p. 39
  144. Eberhard J W, Horn P M Phys. Rev. Lett. 39 643 (1977)
  145. Robinson F N H Phys. Lett. A 97 162 (1983)
  146. Pelz J, Clarke J Phys. Rev. Lett. 55 738 (1985)
  147. Pelz J, Clarke J Phys. Rev. B 36 4479 (1987)
  148. Fleetwood D M, Giordano N Phys. Rev. B 31 1157 (1985)
  149. Miller S C Phys. Rev. B 24 3008 (1981)
  150. Kogan Sh M, Nagaev K E Fiz. Tverd. Tela (Leningrad) 24 3381 (1982)
  151. Damask A, Dienes J Point Defects in Metals (New York: Pergamon Press, 1963); Translated into Russian, Damask A, Dienes J Point Defects in Metals (Moscow: Mir, 1966)
  152. Thompson M Defects and Radiation Damage in Metals (Cambridge: Cambridge University Press, 1969); Translated into Russian, Thompson M Defects and Radiation Damage in Metals (Moscow: Nauka, 1983)
  153. Girifalko L Statistical Physics of Materials (New York: Wiley, 1973); Translated into Russian, Girifalko L Statistical Physics of Materials (Moscow: Mir, 1975)
  154. Palatnik L S, Fuks M Ya, Kosevich V M Mekhanizm Obrazovaniya i Struktura Kondensirovannykh Plenok (Mechanism of Fabrication and Structure of Condensed Films) (Moscow: Nauka, 1972)
  155. Chopra K Thin Film Phenomena (New York: Wiley, 1969); Translated into Russian, Chopra K Thin Film Phenomena (Moscow: Mir, 1972)
  156. Potemkin V V, Bakshi I S, Zhigal'ski&ibreve; G P Radiotekh. Elektron. 28 (221) 221 (1983); Potemkin V V, Bakshi I S, Zhigal'ski&ibreve; G P Radio Eng. Electron. Phys. 28 89 (1983)
  157. Celasco M, Fiorillo F, Mazzetti P Phys. Rev. Lett. 36 38 (1976)
  158. Bokshte&ibreve;n B S Diffuziya v Metallakh (Diffusion in Metals) (Moscow: Metallurgiya, 1978)
  159. Zhigal'ski&ibreve; G P et al Nauchnye Trudy po Problemam Mikroelektroniki. Poluprovodnikovye Pribory i Integral'nye Skhemy Vyp. 27 (Problems of Microelectronics. Semiconductor Devices and Integrated Circuits. Issue 27) (Moscow: MIET Publ., 1976) p. 134
  160. Zhil'kov É A et al Nauchnye Trudy po Problemam Mikroelektroniki. Poluprovodnikovye Pribory i Integral'nye Skhemy Vyp. 27 (Problems of Microelectronics. Semiconductor Instruments and Integrated Circuits. Issue 27) (Moscow: MIET Publ., 1976) p. 127
  161. DobryninaGM, Zhigal'ski&ibreve; GP, NovikovVV Nauchnye Trudy po Problemam Mikroelektroniki. Poluprovodnikovye Pribory i Integral'nye Skhemy Vyp. 27 (Problems of Microelectronics. Semiconductor Devices and Integrated Circuits. Issue 27) (Moscow: MIET Publ., 1976) p. 141
  162. Bakshee I S et al Proc. 10th Int. Conf. on Noise in Physical Systems (Ed. A Ambrozy) (Budapest, Hungary, 1990) p. 389
  163. Bakshi I S et al Fluktuatsionnye Yavleniya v Fizicheskikh Sistemakh. Tez. Dokl. 5 Vses. Konf. (Fluctuation Phenomena in Physical Systems. Abstracts of the 5th All-Union Conf.) (Vilnius, USSR, 1988) p. 117
  164. Zhigal'ski&ibreve; G P, Karev A V, Siranashvili I Sh Fluktuatsionnye Yavleniya v Fizicheskikh Sistemakh. Tez. Dokl. 5 Vses. Konf. (Fluctuation Phenomena in Physical Systems. Abstracts of the 5th All-Union Conf.) (Vilnius, USSR, 1988) p. 133
  165. Zimmerman N M et al Phys. Rev. B 34 773 (1986)
  166. Celasco M, Fiorillo F, Masoero A Phys. Rev. B 19 1304 (1979)
  167. Verbruggen A H, Koch R H, Umbach C P Phys. Rev. B 35 5864 (1987)
  168. Kurov G A, Zhil'kov E A Mikroelektronika 1 144 (1972)
  169. Kurov G A et al Dokl. Akad. Nauk SSSR 219 582 (1974); Kurov G A et al Sov. Phys. Dokl. 19 772 (1975)
  170. Zhigal'ski&ibreve; G P, Dobrynina G M, Fedorov A S Nauchnye Trudy MIET po Problemam Mikroelektroniki. Ser. Fiz.-Mat. Vyp. 35 (Problems of Microelectronics. No. 35) (Moscow: MIET Publ., 1977) p. 150
  171. Agrikov Yu M et al Elektronnaya Tekhnika Ser. 6 Mikroelektronika 4 ((25)) 69 (1970)
  172. Zhigal'ski&ibreve; G P, Markaryants É A, Fedorov A S Poverkhnost': Fizika, Khimiya, Mekhanika (4) 78 (1993)
  173. Geguzin Ya E Diffuzionnaya Zona (Diffusion Zone) (Moscow: Nauka, 1979)
  174. Zhigal'ski&ibreve; G P, Brylov I N, Markaryants É A Nauchnye Trudy MIET "Fizika i Modelirovanie Tekhnologicheskikh Protsessov, Marshrutov i Elementov SBIS" [Physics and Models of Technological Processes, Routes, and VLSI Elements (Ed. Yu A Parmenov) (Moscow: MIET Publ., 1991) p. 46
  175. Akhromushkin E A, Zhigal'ski&ibreve; G P "Nauchnye Trudy MIET "Fizika i Modelirovanie Tekhnologicheskikh Protsessov, Marshrutov i Elementov SBIS"" Physics and Models of Technological Processes, Routes, and VLSI Elements (Ed. Yu A Parmenov)] (Moscow: MIET Publ., 1991) p. 37
  176. Potemkin V V et al Proc. 6th Sci. Conf. on Fluctuation Phenomena in Physical Systems (Palanga, Lithuania, 1991) p. 79
  177. Holland L (Ed.) Thin Film Microelectronics (London: Chapman and Hall, 1965); Translated into Russian, Holland L (Ed.) Thin Film Microelectronics (Moscow: Mir, 1968)
  178. Tablitsy Fizicheskikh Velichin. Spravochnik (Tables of Physical Quantities. Reference Book, Ed. I K Kikoin) (Moscow: Atomizdat, 1976)
  179. Dagge K et al Proc. 13 Conf. "Noise in Physical Systems and 1/f Fluctuations" (Eds V Bareikis, R Katilius) (Singapore: World Scientific, 1995) p. 603
  180. Zhigal'ski&ibreve; G P, Kurov G A, Siranashvili I Sh Izv. Vyssh. Uchebn. Zaved. Radiofiz. 26 207 (1983); Zhigal'ski&ibreve; G P, Kurov G A, Siranashvili I Sh Radiophys. Quantum Electron. 26 162 (1983)
  181. Dimon P, Dutta P, Horn P M Bull. Am. Phys. Soc. 24 358 (1979)
  182. Potemkin V V, Gertsenshtein M E, Bakshi I S Izv. Vyssh. Uchebn. Zaved. Fiz. 26 ((4)) 114 (1983)
  183. Zhigal'ski&ibreve; G P Pis'ma Zh. Eksp. Teor. Fiz. 54 510 (1991); Zhigal'ski&ibreve; G P JETP Lett. 54 513 (1991)
  184. Zhurkov S N Fiz. Tverd. Tela (Leningrad) 25 3119 (1983); Zhurkov S N Sov. Phys. Solid State 25 1797 (1983)
  185. Timashev S F Dokl. Akad. Nauk SSSR Ser. Fiz. Khim. 279 1407 (1984)
  186. Zhigal'ski&ibreve; G P, Sokov Yu E, Tomson N G Radiotekh. Elektron. 24 410 (1979); Zhigal'ski&ibreve; G P, Sokov Yu E, Tomson N G Radio Eng. Electron. Phys. 24 137 (1979)
  187. Fleetwood D M, Giordano N Phys. Rev. B 28 3625 (1983)
  188. Kurov G A, Zhigal'ski&ibreve; G P, Siranashvili I Sh Puti Povysheniya Stabil'nosti i Nadezhnosti Mikroelementov i Mikroskhem. Materialy 2 Vses. Nauchno-Tekh. Seminara (Approaches to Improving Stability and Reliability of Microelements and Microcircuits. Proc. 2nd All-Union Scientific and Technical Workshop) (Ryazan': RRTI Publ., 1982) p. 41
  189. Zhigal'ski&ibreve; G P, Sokov Yu E, Tomson N G Fizika Poluprovodnikov i Mikroelektronika (Physics of Semiconductors and Microelectronics) (Ryazan': RRTI Publ., 1977) p. 63
  190. Hoffman R U Physics of Thin Films. Advances in Research and Development Vol. Vol. 3 (Eds G Hass, R Thun) (New York: Academic Press, 1966); Translated into Russian, Hoffman R U Physics of Thin Films. Advances in Research and Development (Moscow: Mir, 1968) p. 225
  191. Friedel J Dislocations (Oxford, 1964); Translated into Russian, Friedel J Dislocations (Moscow: Mir, 1967)
  192. Van Bueren H G Imperfections in Crystals (Amsterdam: North-Holland, 1960); Translated into Russian, Van Bueren H G Imperfections in Crystals (Moscow: Inostrannaya Literatura, 1961)
  193. Hirth J, Lothe J Theory of Dislocations (New York: McGraw-Hill, 1968); Translated into Russian, Hirth J, Lothe J Theory of Dislocations (Moscow: Atomizdat, 1972)
  194. Prokhorov N N "Fizicheskie Protsessy v Metallakh pri Svarke" (Physical Processes in Metals Under Welding) Vol. Vol. 2 (Moscow: Metallurgiya, 1976)
  195. Scofield J H, Mantese J V, Webb W W Phys. Rev. B 34 723 (1986)
  196. Kirby P L Electronic Engineering 37 722 (1965)
  197. Dobrynina G M, Zhigal'ski&ibreve; G P, Mozgin A A Fizika Poluprovodnikov i Mikroelektronika (Physics of Semiconductors and Microelectronics) (Ryazan': RRTI Publ., 1979) p. 79
  198. Zhigal'ski&ibreve; G P, Siranashvili I Sh, Khaletski&ibreve; V G Metody i Sredstva Integral'no&ibreve; Diagnostiki (Methods and Tools for Integral Diagnosis) (Kiev: KPI, 1984) p. 28
  199. Jones B K, Xu Y Z, Emonts P G A Conf. Proc. ESREF 92 (Schwabisch Gmund, Germany, 1992) p. 363
  200. Jones B K, Xu Y Z Microelectron. Reliab. 33 1829 (1993)
  201. Potemkin V V, Bakshi I S, Zhigal'ski&ibreve; G P Elektrofluktuatsionnaya Diagnostika Materialov i Izdeli&ibreve; Elektronno&ibreve; Tekhniki (Electrofluctuation Diagnosis of Materials and Appliances for Electronic Devices) (Moscow: TsNIIITEI Publ., 1981) p. 52
  202. Chen T M, Djeu T P, Moore R D Proc. Reliability Phys. 1985, Orlando (New York: IEEE Publ., 1985) p. 87
  203. Bagnoli P E et al J. Appl. Phys. 63 1448 (1988)
  204. Neri B et al Proc. 10th Int. Conf. "Noise in Physical Systems" (Ed. A Ambrozy) (Budapest, Hungary, 1990) p. 237
  205. Chen T M, Fang P, Cottle J G Proc. 10th Int. Conf. "Noise in Physical Systems" (Ed. A Ambrozy) (Budapest, Hungary, 1990) p. 515
  206. Schwarz J A et al J. Appl. Phys. 70 1561 (1991)
  207. Smith R G, Biery G A Appl. Phys. Lett. 65 315 (1994)
  208. Chen T M Proc. AIP Conf. 285 "Noise in Physical Systems and 1/f Fluctuations" (St. Louis, New York, 1993) p. 17
  209. Yassine A M, Chen T M Proc. 13th Int. Conf. "Noise in Physical Systems and 1/f Fluctuations" (Eds V Bareikis, R Katilius) (Singapore: World Scientific, 1995) p. 614
  210. Ciofi C, Diligenti A, Neri B Proc. 13th Int. Conf. "Noise in Physical Systems and 1/f Fluctuations" (Eds V Bareikis, R Katilius) (Singapore: World Scientific, 1995) p. 618
  211. Vrachev A S "Trudy Moskovskogo Energeticheskogo Instituta Vyp. 522" (Proc. Moscow Power Engineering Institute No. 522, 1981) p. 19
  212. Koch R H, Lloyd J R, Cronin J Phys. Rev. Lett. 55 2487 (1985)
  213. D'Erl F, Rosenberg R Physics of Thin Films: Advances in Research and Development Vol. Vol. 7 (Eds G Hass, M Francombe, R Hoffman) (New York: Academic Press, 1973); Translated into Russian, D'Erl F, Rosenberg R Physics of Thin Films: Advances in Research and Development (Moscow: Mir, 1977)
  214. Poate J, Tu K, Mayer J (Eds) Thin Films. Inter diffusion and Reactions (New York: Wiley, 1978); Translated into Russian, Poate J, Tu K, Mayer J (Eds) Thin Films. Inter diffusion and Reactions (Moscow: Mir, 1982)
© Успехи физических наук, 1918–2024
Электронная почта: ufn@ufn.ru Телефоны и адреса редакции О журнале Пользовательское соглашение