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Issue 11, 2025
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Accepted articles
Instruments and methods of investigation


Surface analysis by low energy ion scattering spectroscopy

 a, b, c,  d,  d
a Ryazan State Radio Engineering University named after V.F. Utkin, Gagarina Street 59/1, Ryazan, 390005, Russian Federation
b Zhuhai Tsinghua University Research Institute Innovation Center, Zhuhai, China
c Centre for Physics and Technological Research, Universidade Nova de Lisboa, Campus da Caparica, Caparica, 2829-516, Portugal
d Ioffe Institute, ul. Polytekhnicheskaya 26, St. Petersburg, 194021, Russian Federation

An overview of the physical processes underlying low-energy (0.5—5 keV) noble-gas ion scattering (LEIS) and its hardware implementation is presented. We discuss the specific features of LEIS surface analysis, including the energy spectra interpretation, quantitative elemental analysis, and the potential for studying surface structure, particle-surface interaction potential and the presence of clusters in solid solutions. Software codes for the computer simulation of ion-surface interaction are presented too. Advantages of energy-mass analysis of scattered ions, an application of ion scattering in modern ion microscopes, and the noble-gas ion scattering in the hyperthermal energy range are shown. The main applications of LEIS for surface and near-surface analysis of various materials and devices are discussed, and our view on the further development of LEIS are considered.

Keywords: surface analysis, ion scattering, ion-surface neutralization, sputtering, fast recoils, energy-mass analysis, hyperthermal energy, ion microscopy
DOI: 10.3367/UFNe.2025.09.040043
Citation: Tolstoguzov A B, Babenko P Yu, Zinov’ev A N "Surface analysis by low energy ion scattering spectroscopy" Phys. Usp., accepted

Received: 13th, January 2025, revised: 23rd, September 2025, 24th, September 2025

Оригинал: Толстогузов А Б, Бабенко П Ю, Зиновьев А Н «Диагностика поверхности методом спектроскопии обратно рассеянных ионов низких энергий» УФН, принята к публикации; DOI: 10.3367/UFNr.2025.09.040043

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