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Reviews of topical problems


Nano- and microstructuring of solids by swift heavy ions


A.N. Sevchenko Research Institute of Applied Physics Problems, Belarussian State University, pr. Kurchatova 7, Minsk, 220064, Belarus

A state-of-the-art review is presented of track formation processes and mechanisms in materials irradiated by swift ions. It is shown that the nature and morphology of tracks depend on the type and structure of the material and on the energy density transfer to its electronic subsystem. Swift heavy ions serve as tools to synthesize nanoclusters and nanowires, to controllably change their morphology and to tailor electronic, magnetic and optical properties. The unique optical, photoelectric and conducting properties of tracks lead to a new generation of electronic and optoelectronic nanosized devices. These objects of restricted dimensions exhibit quantum behavior and stimulate a broad range of fundamental and applied research.

Fulltext pdf (1.4 MB)
Fulltext is also available at DOI: 10.3367/UFNe.2016.10.038012
Keywords: swift heavy ions, ion irradiation, tracks, chemical etching, ion-track template, nanotechnology
PACS: 61.80.−x, 61.82.−d, 61.85.+p (all)
DOI: 10.3367/UFNe.2016.10.038012
URL: https://ufn.ru/en/articles/2017/5/a/
000407895100001
2-s2.0-85026915270
2017PhyU...60..435K
Citation: Komarov F F "Nano- and microstructuring of solids by swift heavy ions" Phys. Usp. 60 435–471 (2017)
BibTexBibNote ® (generic)BibNote ® (RIS)MedlineRefWorks

Received: 26th, September 2015, revised: 19th, May 2016, 21st, October 2016

Оригинал: Комаров Ф Ф «Нано- и микроструктурирование твёрдых тел быстрыми тяжёлыми ионами» УФН 187 465–504 (2017); DOI: 10.3367/UFNr.2016.10.038012

References (460) ↓ Cited by (68) Similar articles (20)

  1. Komarov F F Usp. Fiz. Nauk 173 1287 (2003); Komarov F F Phys. Usp. 46 1253 (2003)
  2. Silk E C H, Barnes R S Philos. Mag. 4 970 (1959)
  3. Fleischer R L, Price P B, Walker R M Nuclear Tracks In Solids: Principles And Applications (Berkeley, Calif.: Univ. of California Press, 1975)
  4. Apel P Y, Fink D Transport Processes In Ion-Irradiated Polymers (Ed. D Fink) (Berlin: Springer, 2004)
  5. Ozin G A Adv. Mater. 4 612 (1992)
  6. Chakarvarti S K, Vetter J Radiat. Meas. 29 149 (1998)
  7. Wang X, Fujimaki M, Awazu K Opt. Express 13 1486 (2005)
  8. Schulz U et al. Opt. Express 15 13108 (2007)
  9. Vieillard J et al. Microelectron. Eng. 85 465 (2008)
  10. Jayalakshmi G et al. Vacuum 95 66 (2013)
  11. Kumar Y et al. Mater. Sci. Eng. B 177 1476 (2012)
  12. Abhirami K M et al. Vacuum 90 39 (2013)
  13. D’Orléans C et al. Phys. Rev. B 67 220101(R) (2003)
  14. Singh F et al. Nucl. Instrum. Meth. Phys. Res. B 267 936 (2009)
  15. Avasthi D K et al. Nucl. Instrum. Meth. Phys. Res. B 268 3027 (2010)
  16. Singh S P et al. Nucl. Instrum. Meth. Phys. Res. B 276 51 (2012)
  17. Kachurin G A et al. Nucl. Instrum. Meth. Phys. Res. B 282 68 (2012)
  18. Kumakhov M A, Komarov F F Energy Loss And Ion Ranges In Solids (New York: Gordon and Breach Sci. Publ., 1981)
  19. Miterev A M Usp. Fiz. Nauk 172 1131 (2002); Miterev A M Phys. Usp. 45 1019 (2002)
  20. Fain J, Monnin M, Montret M Radiat. Res. 57 379 (1974)
  21. Chatterjee A, Schaefer H J Rad. Environ. Biophys. 13 215 (1976)
  22. Akkerman A, Barak J, Emfietzoglou D Nucl. Instrum. Meth. Phys. Res. B 227 319 (2005)
  23. Kalinichenko A I, Strel’nitskii V E Radiatsionno-akusticheskie Effekty v Tverdykh Telakh (Khar’kov: NNTs KhFTI, 2013)
  24. Kaplan I G, Miterev A M Dokl. Akad. Nauk SSSR 280 127 (1985)
  25. Magee J Z, Chatterjee A J. Phys. Chem. 84 3529 (1980)
  26. Mozumder A J. Chem. Phys. 60 1145 (1974)
  27. Waligorski M R P, Hamm R N, Katz R Nucl. Tracks Radiat. Meas. 11 309 (1986)
  28. Lee E H Nucl. Instrum. Meth. Phys. Res. B 151 29 (1999)
  29. Miterev A M Khimiya Vysokikh Energii 31 197 (1997); Miterev A M High Energy Chem. 31 173 (1997)
  30. Bethe H A Ann. Physik 5 325 (1930)
  31. Bethe H A Rev. Mod. Phys. 22 213 (1950)
  32. Bloch F Ann. Physik 16 285 (1933)
  33. Barkas W H Nuclear Research Emulsions Vol. 1 (New York: Academic Press, 1963)
  34. Schiwietz G, Grande P L Nucl. Instrum. Meth. Phys. Res. B 175-177 125 (2001)
  35. Akkerman A, Murat M, Barak J Nucl. Instrum. Meth. Phys. Res. B 269 1630 (2011)
  36. Ziegler J F, Ziegler M D, Biersack J P Nucl. Instrum. Meth. Phys. Res. B 268 1818 (2010)
  37. Sigmund P, Schinner A, Paul H "Errata and addenda for ICRU Report 73, Stopping of ions heavier than Helium" J. ICRU 5 (1) (2005)
  38. Grande P L, Schiwietz G Nucl. Instrum. Meth. Phys. Res. B 267 859 (2009)
  39. Physics Reference Manual, Version: Geant4 9.5.0, 2nd, December (2011)
  40. Bradt H L, Peters B Phys. Rev. 74 1828 (1948)
  41. Gryziński M Phys. Rev. 138 A322 (1965)
  42. Garcia J D Phys. Rev. 177 223 (1969)
  43. Kaganovich I D, Startsev E, Davidson R C New J. Phys. 8 278 (2006)
  44. Khandelwal G S, Choi B-H, Merzbacher E Atom. Data 1 103 (1969)
  45. Choi B-H, Merzbacher E, Khandelwal G S Atom. Data 5 291 (1973)
  46. Ritchie R H Phys. Rev. 114 644 (1959)
  47. Tung C J et al. Report ORNL/TM-5188 (Oak Ridge, TN: Oak Ridge Natl. Lab., 1976)
  48. Akkerman A et al. Phys. Status Solidi B 198 769 (1996)
  49. Slater J C Phys. Rev. 36 57 (1930)
  50. Khandelwal G S, Merzbacher E Phys. Rev. 151 12 (1966)
  51. Colladant T et al. Nucl. Instrum. Meth. Phys. Res. B 245 464 (2006)
  52. Kaliman Z et al. Phys. Rev. A 65 012708 (2001)
  53. Baranov A A et al. Nucl. Instrum. Meth. Phys. Res. B 286 51 (2012)
  54. Kuhr J-C, Fitting H-J J Electron Spectrosc. Relat. Phenom. 105 257 (1999)
  55. Rymzhanov R A, Medvedev N A, Volkov A E Nucl. Instrum. Meth. Phys. Res. B 388 41 (2016)
  56. Pines D Elementary Excitations In Solids (New York: W.A. Benjamin, 1963)
  57. Rymzhanov R A, Medvedev N A, Volkov A E Nucl. Instrum. Meth. Phys. Res. B 326 238 (2014)
  58. Rymzhanov R A, Medvedev N A, Volkov A E Nucl. Instrum. Meth. Phys. Res. B 354 292 (2015)
  59. Van Hove L Phys. Rev. 95 249 (1954)
  60. Leibfried G Bestrahlungseffekte In Festkörpern (Stuttgart: B.G. Teubner, 1965)
  61. Akkerman A, Murat M, Barak J Nucl. Instrum. Meth. Phys. Res. B 321 1 (2014)
  62. Brandt W, Kitagawa M Phys. Rev. B 25 5631 (1982)
  63. Sigmund P, Schinner A Nucl. Instrum. Meth. Phys. Res. B 382 15 (2016)
  64. Ritchie G G, Claussen C Nucl. Instrum. Meth. Phys. Res. 198 133 (1982)
  65. Klaumünzer S Matematisk-Fysiske Meddelelser 52 293 (2005)
  66. Insepov Z, Terasawa M, Takayama K Phys. Rev. A 77 062901 (2008)
  67. Johnson R E, Brown W L Nucl. Instrum. Meth. Phys. Res. 198 103 (1982)
  68. Leseur D, Dunlop A Radiat. Eff. Def. Solids 126 163 (1993)
  69. Schiwietz G et al. Nucl. Instrum. Meth. Phys. Res. B 225 4 (2004)
  70. Xiao G et al. Phys. Rev. Lett. 79 1821 (1997)
  71. Schiwietz G et al. Nucl. Instrum. Meth. Phys. Res. B 175-177 1 (2001)
  72. Sakata M et al. Nucl. Instrum. Meth. Phys. Res. B 269 795 (2011)
  73. Schiwietz G et al. Phys. Rev. Lett. 69 628 (1992)
  74. Schiwietz G et al. Europhys. Lett. 47 384 (1999)
  75. Schiwietz G et al. Nucl. Instrum. Meth. Phys. Res. B 193 705 (2002)
  76. Schiwietz G et al. Nucl. Instrum. Meth. Phys. Res. B 266 1287 (2008)
  77. Schiwietz G et al. Nucl. Instrum. Meth. Phys. Res. B 317 48 (2013)
  78. Onsager L Phys. Rev. 54 554 (1938)
  79. Lifshits E M, Pitaevskii L P Fizicheskaya Kinetika (M.: Nauka, 1979); Per. na angl. yaz., Lifshitz E M, Pitaevskii L P Physical Kinetics (Oxford: Pergamon Press, 1981)
  80. H&aum;nsch W, Miura-Mattausch M J. Appl. Phys. 60 650 (1986)
  81. Roldan I B et al. J. Appl. Phys. 80 5121 (1996)
  82. Grasser T et al. Proc. IEEE 91 251 (2003)
  83. Bordelon T J et al. Solid-State Electron. 34 617 (1991)
  84. Mizuno H et al. J. Appl. Phys. 74 1100 (1993)
  85. Hughes R C Phys. Rev. Lett. 30 1333 (1973)
  86. Hughes R C Phys. Rev. Lett. 35 449 (1975)
  87. Ramazashvili R R, Rukhadze A A, Silin V P Zh. Eksp. Teor. Fiz. 43 1323 (1963); Ramazashvili R R, Rukhadze A A, Silin V P Sov. Phys. JETP 16 939 (1963)
  88. Garin B M, Byakov V M Khimiya Vysokikh Energii 22 195 (1988)
  89. Lankin A V et al. Phys. Rev. E 79 036407 (2009)
  90. Komarov F F, Novikov A P, Khoang A T Izv. AN Bel.SSR (5) 81 (1987)
  91. Rethfeld B et al. Phys. Rev. B 65 214303 (2002)
  92. Osmani O et al. Phys. Rev. B 84 214105 (2011)
  93. Gorbunov S A et al. Nucl. Instrum. Meth. Phys. Res. B 315 173 (2013)
  94. Kaiser A et al. Phys. Rev. B 61 11437 (2000)
  95. Landau L D, Lifshits E M Gidrodinamika (M.: Nauka, 1986); Per. na angl. yaz., Landau L D, Lifshitz E M Fluid Mechanics (Oxford: Pergamon Press, 1987)
  96. Epifanov G I Fizika Tverdogo Tela (M.: Vysshaya shkola, 1977); Per. na angl. yaz., Epifanov G I Solid State Physics (Moscow: Mir, 1979)
  97. Vedenov A A, Gladush G G Fizicheskie Protsessy pri Lazernoi Obrabotke Materialov (M.: Energoatomizdat, 1985)
  98. Medvedev N et al. Nucl. Instrum. Meth. Phys. Res. B 268 3160 (2010)
  99. Terekhin P N et al. Nucl. Instrum. Meth. Phys. Res. B 354 200 (2015)
  100. Medvedev N A, Volkov A E AIP Conf. Proc. 999 238 (2008)
  101. Guizard S et al. Nucl. Instrum. Meth. Phys. Res. B 116 43 (1996)
  102. Guizard S et al. J. Phys. Condens. Matter 8 1281 (1996)
  103. Seidl M et al. Nucl. Instrum. Meth. Phys. Res. B 183 502 (2001)
  104. Novichenok L N, Shul’man Z P Teplofizicheskie Svoistva Polimerov (Minsk: Nauka i tekhnika, 1971)
  105. Baranov I A i dr. Usp. Fiz. Nauk 156 477 (1988); Baranov I A et al. Sov. Phys. Usp. 31 1015 (1988)
  106. Kitayama T et al. Nucl. Instrum. Meth. Phys. Res. B 354 183 (2015)
  107. Komarov F et al. Nucl. Instrum. Meth. Phys. Res. B 360 150 (2015)
  108. Kamarou A et al. Phys. Rev. B 78 054111 (2008)
  109. Kalinichenko A I i dr. Voprosy Atomnoi Nauki Tekhniki Fiz. radiatsionnykh povrezhdenii i radiatsionnoe materialoved. 92 131 (2008)
  110. Tombrello T A Nucl. Instrum. Meth. Phys. Res. B 95 232 (1995)
  111. Stampfli P Nucl. Instrum. Meth. Phys. Res. B 107 138 (1996)
  112. Bullough R, Gilman J J J. Appl. Phys. 37 2283 (1966)
  113. Klaumünzer S Nucl. Instrum. Meth. Phys. Res. B 225 136 (2004)
  114. Surwase S at al. Nucl. Instrum. Meth. Phys. Res. B 387 1 (2016)
  115. Young D A Nucl. Instrum. Meth. Phys. Res. B 252 175 (2006)
  116. Pakarinen O H, Djurabekova F, Nordlund K Nucl. Instrum. Meth. Phys. Res. B 268 3163 (2010)
  117. Leino A A et al. Nucl. Instrum. Meth. Phys. Res. B 326 289 (2014)
  118. Gol’danskii V I, Lantsburg E Ya, Yampol’skii P A Pis’ma ZhETF 21 365 (1975); Gol’danskii V I, Lantsburg E Ya, Yampol’skii P A JETP Lett. 21 166 (1975)
  119. Schwartz K et al. Nucl. Instrum. Meth. Phys. Res. B 245 204 (2006)
  120. Ronchi C J J. Appl. Phys. 44 3575 (1973)
  121. Davydov A A, Kalinichenko A I Problemy Yadernoi Fiziki i Kosmicheskikh Luchei Vyp. 26 (Otv. red. I I Zalyubovskii) (Khar’kov: Vishcha shkola, 1986) p. 60
  122. Tombrello T A Nucl. Instrum. Meth. Phys. Res. B 94 424 (1994)
  123. Lifshits I M, Kaganov M I, Tanatarov L V Atomnaya Energiya 6 391 (1959)
  124. Gervais B, Bouffard S Nucl. Instrum. Meth. Phys. Res. B 88 355 (1994)
  125. Toulemonde M et al. Matematisk-fysiske Meddeleleser 52 263 (2006)
  126. Lifshits I M, Kaganov M I, Tanatarov L V J. Nucl. Energy A 12 69 (1960)
  127. Allen P B Phys. Rev. Lett. 59 1460 (1987)
  128. Toulemonde M et al. Nucl. Instrum. Meth. Phys. Res. B 166-167 903 (2000)
  129. Lang M et al. Nucl. Instrum. Meth. Phys. Res. B 268 2951 (2010)
  130. Moll S et al. Phys. Rev. B 84 064115 (2011)
  131. Dawi E A et al. Nanotechnology 22 215607 (2011)
  132. Meftah A et al. Nucl. Instrum. Meth. Phys. Res. B 237 563 (2005)
  133. Toulemonde M et al. Nucl. Instrum. Meth. Phys. Res. B 115 37 (1996)
  134. Sall M et al. J. Mater. Sci. 50 5214 (2015)
  135. Lou S-N et al. Phys. Rev. B 68 134206 (2003)
  136. Osmani O et al. Nucl. Instrum. Meth. Phys. Res. B 282 43 (2011)
  137. Rothard H Nucl. Instrum. Meth. Phys. Res. B 225 27 (2004)
  138. Matsuzaki S et al. Nucl. Instrum. Meth. Phys. Res. B (2017), in press
  139. Baranov I et al. Nucl. Instrum. Meth. Phys. Res. B 266 1993 (2008)
  140. Anders et al. Nucl. Instrum. Meth. Phys. Res. B 267 2503 (2009)
  141. Kluth P et al. Phys. Rev. Lett. 101 175503 (2008)
  142. Itoh N et al. J. Phys. Condens. Matter 21 474205 (2009)
  143. Marks N A et al. Nucl. Instrum. Meth. Phys. Res. B 266 2665 (2008)
  144. Kamarou A et al. Phys. Rev. B 73 184107 (2006)
  145. Chettah A et al. Nucl. Instrum. Meth. Phys. Res. B 267 2719 (2009)
  146. Daraszewicz S L, Duffy O M Nucl. Instrum. Meth. Phys. Res. B 269 1646 (2011)
  147. Dunlop A, Jaskierowicz G, Della-Negra S Nucl. Instrum. Meth. Phys. Res. B 146 302 (1998)
  148. Canut B et al. Nucl. Instrum. Meth. Phys. Res. B 146 296 (1998)
  149. Daraszewicz S L, Duffy O M Nucl. Instrum. Meth. Phys. Res. B 303 112 (2013)
  150. Jakas M M, Bringa E M, Johnson R E Phys. Rev. B 65 165425 (2002)
  151. Gan Y, Chen J Comput. Phys. Commun. 183 278 (2012)
  152. Gan Y, Chen J Appl. Phys. A 105 427 (2011)
  153. Caro A, Victoria M Phys. Rev. A 40 2287 (1989)
  154. Duffy D M, Rutherford A M J. Phys. Condens. Matter 19 016207 (2007)
  155. Rutherford A M, Duffy D M J. Phys. Condens. Matter 19 496201 (2007)
  156. Colder A et al. Nucl. Instrum. Meth. Phys. Res. B 174 491 (2001)
  157. Medvedev N A et al. Phys. Rev. B 82 125425 (2010)
  158. Medvedev N A et al. Nucl. Instrum. Meth. Phys. Res. B 268 2870 (2010)
  159. Komarov F F et al. Vacuum 70 75 (2003)
  160. Herre O et al. Phys. Rev. B 58 4832 (1998)
  161. Gaiduk P I et al. Phys. Rev. B 61 15785 (2000)
  162. Komarov F F, Komarov A F, Mironov A M Nucl. Instrum. Meth. Phys. Res. B 148 159 (1999)
  163. Komarov F F, Belyi V A Zh. Eksp. Teor. Fiz. 122 366 (2002); Komarov F F, Belyi V A JETP 95 316 (2002)
  164. Gaiduk P I et al. Phys. Rev. B 66 045316 (2002)
  165. Gaiduk P I Vacuum 78 375 (2005)
  166. Colder A et al. J. Appl. Phys. 91 5852 (2002)
  167. Komarov F F et al. Vacuum 78 353 (2005)
  168. Komarov F F, Yuvchenko V N Zh. Tekh. Fiz. 73 (6) 56 (2003); Komarov F F, Yuvchenko V N Tech. Phys. 48 717 (2003)
  169. Landolt-Börnstein. Series Numerical Data And Functional Relationships In Science And Technology (New Series, Vol. 17a) (Berlin: Springer, 1982) p. 642
  170. Jordan A S J. Cryst. Growth 71 551 (1985)
  171. Gantmakher V F, Levinson Y B Carrier Scattering In Metals And Semiconductors (Amsterdam: Horth-Holland, 1987) p. 352
  172. Volkov A E, Borodin V A Nucl. Instrum. Meth. Phys. Res. B 193 381 (2002)
  173. Komarov F F Dokl. NAN Belarusi 48 64 (2004)
  174. Szenes G Nucl. Instrum. Meth. Phys. Res. B 296 174 (2011)
  175. Szenes G Nucl. Instrum. Meth. Phys. Res. B 280 88 (2012)
  176. Itoh N, Stoneham A M Nucl. Instrum. Meth. Phys. Res. B 146 362 (1998)
  177. Yavlinskii Yu N Nucl. Instrum. Meth. Phys. Res. B 166-167 35 (2000)
  178. Osmani O et al. Nucl. Instrum. Meth. Phys. Res. B 317 72 (2013)
  179. Hillyard P B et al. Phys. Rev. Lett. 98 125501 (2007)
  180. Wang J et al. J. Phys. Condens. Matter 25 135001 (2013)
  181. Lushchik A et al. Phys. Status Solidi B 250 261 (2013)
  182. Ovchinnikov V V Usp. Fiz. Nauk 178 991 (2008); Ovchinnikov V V Phys. Usp. 51 955 (2008)
  183. Zakharov V E, Kuznetsov E A Usp. Fiz. Nauk 182 569 (2012); Zakharov V E, Kuznetsov E A Phys. Usp. 55 535 (2012)
  184. Vaisburd D I (Red.) Vysokoenergeticheskaya Elektronika Tverdogo Tela (Novosibirsk: Nauka, 1982)
  185. Haas M et al. Phys. Rev. B 84 144303 (2011)
  186. Guo H et al. Physica B 407 2262 (2012)
  187. Kluth P et al. Phys. Rev. Lett. 101 175503 (2008)
  188. Kluth P et al. Nucl. Instrum. Meth. Phys. Res. B 266 2994 (2008)
  189. Krauser J et al. J. Appl. Phys. 94 1959 (2003)
  190. O’Connell J H et al. Nucl. Instrum. Meth. Phys. Res. B 374 97 (2016)
  191. Skuratov V A et al. Nucl. Instrum. Meth. Phys. Res. B 326 223 (2014)
  192. Schwartz K et al. Phys. Rev. B 78 024120 (2008)
  193. Njoroge E G et al. Nucl. Instrum. Meth. Phys. Res. B 371 263 (2016)
  194. Bhattacharya D et al. Surf. Coat. Technol. 158-159 59 (2002)
  195. Sisodia V et al. Appl. Surf. Sci. 252 4016 (2006)
  196. Sisodia V et al. Rad. Eff. Def. Solids 164 566 (2009)
  197. Agarwal G et al. Surf. Interf. Anal. 41 746 (2009)
  198. Agarwal G et al. Appl. Phys. A 99 879 (2010)
  199. Nagel R, Balogh A G Nucl. Instrum. Meth. Phys. Res. B 156 135 (1999)
  200. Senkara J et al. Elektronika 40 (11) 11 (1999)
  201. Bolse W, Schattat B Nucl. Instrum. Meth. Phys. Res. B 209 34 (2003)
  202. Schattat B, Bolse W Nucl. Instrum. Meth. Phys. Res. B 225 105 (2004)
  203. Lu F, Lang M, Huang M Nucl. Instrum. Meth. Phys. Res. B 286 266 (2012)
  204. Wang Z G et al. Nucl. Instrum. Meth. Phys. Res. B 209 194 (2003)
  205. Zhang K et al. Nucl. Instrum. Meth. Phys. Res. B 249 167 (2006)
  206. Kumar S et al. Nucl. Instrum. Meth. Phys. Res. B 212 242 (2003)
  207. Kumar S et al. Nucl. Instrum. Meth. Phys. Res. B 266 1759 (2008)
  208. Szenes G et al. Nucl. Instrum. Meth. Phys. Res. B 191 186 (2002)
  209. Wang L et al. Radiat. Eff. Defects Solids 126 403 (1993)
  210. Toulemonde M et al. Nucl. Instrum. Meth. Phys. Res. B 116 37 (1996)
  211. Douillard L, Duraud J P Nucl. Instrum. Meth. Phys. Res. B 107 212 (1996)
  212. Awazu K Phys. Rev. B 62 3689 (2000)
  213. Kaniukov E Yu et al. Nanotechnology 27 115305 (2016)
  214. Busch M C et al. J. Appl. Phys. 71 2596 (1992)
  215. Dallanora A et al. J. Appl. Phys. 104 024307 (2008)
  216. Awazu K, Kawazoe H J. Appl. Phys. 94 6243 (2003)
  217. Garcia-Navarro A et al. Nucl. Instrum. Meth. Phys. Res. B 249 172 (2006)
  218. Komarov F F et al. Vacuum 78 361 (2005)
  219. Klaumünzer S Nucl. Instrum. Meth. Phys. Res. B 225 136 (2004)
  220. Klaumünzer S et al. Nucl. Instrum. Meth. Phys. Res. B 39 665 (1989)
  221. Sigrist A, Balzer R Helv. Phys. Acta 50 49 (1977)
  222. Musket R G et al. J. Appl. Phys. 91 5760 (2002)
  223. Vlasukova L et al. Vacuum 129 137 (2016)
  224. Carvalho A M J F et al. Thin Solid Films 517 289 (2008)
  225. Vlasukova L A i dr. Izv. RAN. Ser. Fiz. 76 653 (2012); Vlasukova L A et al. Bull. Russ. Acad. Sci. Phys. 76 582 (2012)
  226. Al’zhanova A et al. Nucl. Instrum. Meth. Phys. Res. B 374 121 (2016)
  227. Vlasukova L A et al. Vacuum 105 107 (2014)
  228. Komarov F F et al. Lith. J. Phys. 49 111 (2009)
  229. Jensen J et al. Nucl. Instrum. Meth. Phys. Res. B 243 119 (2006)
  230. Nomura K et al. Phys. Rev. B 68 064106 (2003)
  231. Vlasukova L A i dr. Izv. RAN. Ser. Fiz. 74 226 (2010); Vlasukova L A et al. Bull. Russ. Acad. Sci. Phys. 74 206 (2010)
  232. Zinkle S J, Skuratov V A, Hoelzer D T Nucl. Instrum. Meth. Phys. Res. B 191 758 (2002)
  233. Canut B et al. Nucl. Instrum. Meth. Phys. Res. B 266 2819 (2008)
  234. Nakajima K et al. Nucl. Instrum. Meth. Phys. Res. B 291 12 (2012)
  235. Morita Y et al. Nucl. Instrum. Meth. Phys. Res. B 315 142 (2013)
  236. Kitayama T et al. Nucl. Instrum. Meth. Phys. Res. B 354 183 (2015)
  237. Toulemonde M et al. Phys. Rev. B 83 054106 (2011)
  238. Sun Y et al. Nucl. Instrum. Meth. Phys. Res. B 218 318 (2004)
  239. Takahashi et al. Nucl. Instrum. Meth. Phys. Res. B 217 435 (2004)
  240. Adla A, Fuess H, Trautmann C J. Polym. Sci. B 41 2892 (2003)
  241. Costantini J M et al. Nucl. Instrum. Meth. Phys. Res. B 194 132 (2004)
  242. Virk S H Nucl. Instrum. Meth. Phys. Res. B 191 739 (2002)
  243. Severin D, Bender M, Heuser J M Nucl. Instrum. Meth. Phys. Res. B 236 456 (2005)
  244. Diwan P K et al. Nucl. Instrum. Meth. Phys. Res. B 266 4738 (2008)
  245. Ma M et al. Nucl. Instrum. Meth. Phys. Res. B 286 233 (2012)
  246. Delgado A O et al. Nucl. Instrum. Meth. Phys. Res. B 273 55 (2012)
  247. Deslandes A et al. Nucl. Instrum. Meth. Phys. Res. B 314 90 (2013)
  248. Metz S et al. Micromech. Microeng. 14 324 (2004)
  249. Kaith B S et al. Vacuum 111 73 (2015)
  250. Fink D et al. Nucl. Instrum. Meth. Phys. Res. B 261 727 (2007)
  251. Fink D et al. Rad. Meas. 43 5546 (2008)
  252. Fink D et al. Vacuum 82 900 (2008)
  253. Yamaki T et al. Nucl. Instrum. Meth. Phys. Res. B 314 77 (2013)
  254. Neumann R Nucl. Instrum. Meth. Phys. Res. B 314 4 (2013)
  255. Zielinska K et al. Nucl. Instrum. Meth. Phys. Res. B 326 131 (2014)
  256. Satoh T et al. Nucl. Instrum. Meth. Phys. Res. B 332 242 (2014)
  257. Apel P Yu et al. Nucl. Instrum. Meth. Phys. Res. B 326 158 (2014)
  258. Hossain U H et al. Nucl. Instrum. Meth. Phys. Res. B 326 135 (2014)
  259. Lee E H et al. J. Mater. Res. 8 377 (1993)
  260. Pivin J C Thin Solid Films 263 185 (1995)
  261. Swain M V et al. J. Mater. Res. 12 1917 (1997)
  262. Dfavenas J et al. Nucl. Instrum. Meth. Phys. Res. B 32 166 (1988)
  263. Zhu J Z et al. Nucl. Instrum. Meth. Phys. Res. B 91 469 (1994)
  264. Wang Y Q et al. Nucl. Instrum. Meth. Phys. Res. B 710 127 (1997)
  265. Hnatowicz V Nucl. Instrum. Meth. Phys. Res. B 209 145 (2003)
  266. Davenas J Materials Under Irradiation (Solid State Phenomena, Vols. 30 - 31, Eds A Dunlop Et Al.) (Aedermannsdorf: Trans Tech., 1993) p. 317
  267. Paretzke H G et al. Report IAEA-TECDOC-799 (Vienna: IAEA, 1995) p. 633
  268. Durrani S A, Bull R K Solid State Nuclear Track Detection: Principles, Methods, And Applications (Oxford: Pergamon Press, 1987)
  269. Spohr R Ion Tracks And Microtechnology: Principles And Applications (Braunschweig: Vieweg, 1990)
  270. Apel P et al. Nucl. Instrum. Meth. Phys. Res. B 185 216 (2001)
  271. Cleland M R, Parks L A, Cheng S Nucl. Instrum. Meth. Phys. Res. B 208 66 (2003)
  272. Dawes K, Glover L C Physical Properties Of Polymers Handbook (Ed. J E Mark) (Woodbury, NY: AIP Press, 1996), Ch. 41
  273. Hnatowicz V Phys. Status Solidi B 216 931 (1999)
  274. Fleisher R L, Price P B, Walker R M J. Appl. Phys. 36 3645 (1965)
  275. Szenes G Phys. Rev. B 52 6154 (1995); Szenes G Phys. Rev. B 51 8026 (1995)
  276. Balanzat E, Betz N, Bouffard S Nucl. Instrum. Meth. Phys. Res. B 105 46 (1995)
  277. Balanzat E et al. Nucl. Instrum. Meth. Phys. Res. B 91 140 (1994)
  278. Betz N et al. J. Polym. Sci. B 32 1493 (1994)
  279. Picq V, Balanzat E Nucl. Instrum. Meth. Phys. Res. B 151 76 (1999)
  280. Ferain E, Legras R Nucl. Instrum. Meth. Phys. Res. B 82 539 (1993)
  281. Steckenreiter T et al. Nucl. Instrum. Meth. Phys. Res. B 151 161 (1999)
  282. Chipara M I et al. Nucl. Instrum. Meth. Phys. Res. B 88 418 (1994)
  283. Chipara M I, Reyes-Romero J Nucl. Instrum. Meth. Phys. Res. B 185 77 (2001)
  284. Dehaye F et al. Nucl. Instrum. Meth. Phys. Res. B 209 103 (2003)
  285. Ferain E Radiat. Mes. 34 585 (2001)
  286. Piraux L et al. J. Mater. Res. 14 3042 (1999)
  287. Jerome C Chem. Eur. J. 6 30089 (2000)
  288. Sun Y et al. Nucl. Instrum. Meth. Phys. Res. B 209 188 (2003)
  289. Hama Y et al. Nucl. Instrum. Meth. Phys. Res. B 208 123 (2003)
  290. Hai Y et al. Nucl. Instrum. Meth. Phys. Res. B 356-357 129 (2015)
  291. Radwan R M, Abdul-Kader A M, El-Hag Ali A Nucl. Instrum. Meth. Phys. Res. B 266 3588 (2008)
  292. Wada T et al. J. Chem. Soc. Commun. 1 1194 (1985)
  293. Huynh W U, Dittmer J J, Alivisatos A P Science 295 2425 (2002)
  294. Li Z L et al. Appl. Phys. Lett. 84 3558 (2004)
  295. Kumar A, Hussain A M P Nucl. Instrum. Meth. Phys. Res. B 251 451 (2006)
  296. Costantini J M et al. J. Appl. Phys. 87 1899 (2000)
  297. De Bonis A, Bearzotti A, Marletta G Nucl. Instrum. Meth. Phys. Res. B 151 101 (1999)
  298. Davenas J, Boiteux G Adv. Mater. 2 521 (1990)
  299. Costantini J M et al. Nucl. Instrum. Meth. Phys. Res. B 234 458 (2005)
  300. Ramola R C et al. Current Sci. 97 1453 (2009)
  301. Hussain A M P et al. J. Phys. D 39 75 (2006)
  302. Murugaraj P, Mainwaring D, Siegele R Appl. Phys. Lett. 94 122101 (2009)
  303. Gupta S et al. Nucl. Instrum. Meth. Phys. Res. B 381 76 (2016)
  304. Balanzat E, Jousset J C, Toulemonde M Nucl. Instrum. Meth. Phys. Res. B 32 368 (1988)
  305. Dobrev D et al. J. Vac. Sci. Technol. B 19 1385 (2001)
  306. Molares M E T et al. Appl. Phys. Lett. 82 2139 (2003)
  307. Sharma T et al. Vacuum 135 73 (2017)
  308. Albrecht D J et al. Appl. Phys. A 37 37 (1985)
  309. Saleh S A, Eyal Y Appl. Phys. Lett. 85 2529 (2004)
  310. Saleh S A Nucl. Instrum. Meth. Phys. Res. B 236 81 (2005)
  311. Apel P Yu et al. Nucl. Instrum. Meth. Phys. Res. B 209 329 (2003)
  312. Apel P Yu Radiat. Meas. 25 667 (1995)
  313. Bryk M T et al. Nucl. Instrum. Meth. Phys. Res. B 251 419 (2006)
  314. Mazzei R et al. Nucl. Instrum. Meth. Phys. Res. B 236 407 (2005)
  315. Shmidt K et al. Nucl. Instrum. Meth. Phys. Res. B 107 381 (1996)
  316. Microfiltration and Laboratory: Poretics Products Catalog, 1996 Edition, Livermore CA, p. l, http://www.osmonics.com/products/page330.htm
  317. Kravets L I, Dmitriev S L, Apel’ P Yu Khimiya Vysokikh Energii 31 108 (1997)
  318. Shirokova V V, Tretyakova S P Radiat. Meas. 28 791 (1997)
  319. Skuratov V A, Abu-Alazm S M, Altynov V A Mater. Sci. Forum 248 399 (1997)
  320. Baryley H, Martin C R Chem. Rev. 100 2575 (2000)
  321. Kohli P et al. Science 305 984 (2004)
  322. Menon V P, Martin C R Anal. Chem. 67 1920 (1995)
  323. Grasseli M, Betz N Nucl. Instrum. Meth. Phys. Res. B 236 501 (2005)
  324. Mazzei R et al. Nucl. Instrum. Meth. Phys. Res. B 236 407 (2005)
  325. Xia Y, Yang P Adv. Mater. 15 351 (2003)
  326. Ferain E, Legras R Nucl. Instrum. Meth. Phys. Res. B 208 115 (2003)
  327. Spohr R et al. Nucl. Instrum. Meth. Phys. Res. B 268 676 (2010)
  328. Trautmann C Ion Beams In Nanoscience And Technology (Eds R Hellborg, H J Whitlow, Y Zhang) (Heidelberg: Springer-Verlag, 2009) p. 369
  329. Martin C R Science 266 1961 (1994)
  330. Apel P Nucl. Instrum. Meth. Phys. Res. B 208 11 (2003)
  331. Toimil Molares M E et al. Nanotechnology 15 S201 (2004)
  332. Chtanko N et al. Nucl. Instrum. Meth. Phys. Res. B 236 103 (2005)
  333. Man L C T et al. Nucl. Instrum. Meth. Phys. Res. B 265 621 (2007)
  334. Trautmann C et al. Nucl. Tracks Radiat. Meas. 19 967 (1991)
  335. Siwy Z et al. Nucl. Instrum. Meth. Phys. Res. B 208 143 (2003)
  336. Ohgai T et al. J. Appl. Electrochem. 38 713 (2008)
  337. Mara A et al. Nano Lett. 4 497 (2004)
  338. Sergent-Engelen T et al. Biotechnol. Tech. 4 89 (1990)
  339. Bignold L P J. Immun. Meth. 118 217 (1989)
  340. Fink D et al. Nucl. Instrum. Meth. Phys. Res. B 236 11 (2005)
  341. Duan J et al. Nucl. Instrum. Meth. Phys. Res. B 267 2567 (2009)
  342. Chen J et al. Appl. Phys. Lett. 85 1401 (2004)
  343. Berggren M, Inganas O Science 267 1479 (1995)
  344. Schon J H et al. Science 290 963 (2000)
  345. Lindeberg M et al. Proc. of the Workshop on European Network on Ion Track Technology, Caen, France, 24 - 26 February 2002
  346. Berdinsky A S et al. Chem. Sustainable Dev. 8 141 (2000)
  347. Fink D et al. Radiat. Meas. 36 605 (2003)
  348. Bohm S, Oltuis W, Bergveld P Sensors Actuat. B 63 201 (2000)
  349. Yoshida M et al. Nucl. Instrum. Meth. Phys. Res. B 122 39 (1997)
  350. Yousef H, Lindeberg M, Hjort K Nucl. Instrum. Meth. Phys. Res. B 266 1659 (2008)
  351. Fink D "Novel ion track-based electronic structures. An overview" ISL-Information (Berlin: HMI, 2005) p. 2
  352. Fink D et al. Nucl. Instrum. Meth. Phys. Res. B 218 355 (2004)
  353. Hoppe K et al. Nucl. Instrum. Meth. Phys. Res. B 266 1642 (2008)
  354. Zollondz J-H et al. Nucl. Instrum. Meth. Phys. Res. B 225 178 (2004)
  355. Thornell G et al. Sensors Actuators A 73 176 (1999)
  356. Thornell G, Rapp H, Hjort K IEEE Trans. Ultrason. Ferroelectrics 47 8 (2000)
  357. Pezzagna S et al. Phys. Status Solidi A 208 2017 (2011)
  358. Sanz R et al. Nanotechnology 18 305303 (2007)
  359. Skupinski M et al. Vacuum 82 359 (2007)
  360. Mitrofanov A V, Apel P Yu Nucl. Instrum. Meth. Phys. Res. B 245 332 (2006)
  361. Fisher B E, Spohr R Rev. Mod. Phys. 55 907 (1983)
  362. German Patent Application 201197413 (2002)
  363. Akapiev G N et al. Nucl. Instrum. Meth. Phys. Res. B 208 133 (2003)
  364. Stolterfoht N et al. Phys. Rev. Lett. 88 133201 (2002)
  365. Li D H et al. Nucl. Instrum. Meth. Phys. Res. B 267 469 (2009)
  366. Stolterfoht N Nucl. Instrum. Meth. Phys. Res. B 317 96 (2013)
  367. Keerthisinghe D et al. Nucl. Instrum. Meth. Phys. Res. B 317 105 (2013)
  368. Komarov F F, Kamyshan A S, Karwat Cz Vacuum 83 S51 (2009)
  369. Gravier L et al. IEEE Trans. Magn. 38 2700 (2002)
  370. Enculescu I et al. Appl. Phys. A 86 43 (2007)
  371. Ferain E, Legras R Nucl. Instrum. Meth. Phys. Res. B 267 1028 (2009)
  372. Zhu X R et al. Nucl. Instrum. Meth. Phys. Res. B 356-357 57 (2015)
  373. Gudiksen M S, Wang J, Lieber C M J. Phys. Chem. B 106 4036 (2002)
  374. US Patent 6,328,342 (2001)
  375. Ameniya K et al. Nucl. Instrum. Meth. Phys. Res. B 356-357 154 (2015)
  376. Fleischer R MRS Bull. 20 (12) 35 (1995)
  377. Durante M et al. Nucl. Instrum. Meth. Phys. Res. B 94 251 (1994)
  378. Snoeks E et al. Adv. Mater. 12 1511 (2000)
  379. van Dillen T et al. Nucl. Instrum. Meth. Phys. Res. B 175 350 (2001)
  380. Klaumünzer S Nucl. Instrum. Meth. Phys. Res. B 215 345 (2004)
  381. D’Orleans C D et al. Nucl. Instrum. Meth. Phys. Res. B 225 154 (2004)
  382. Klaumünzer S Nucl. Instrum. Meth. Phys. Res. B 244 1 (2006)
  383. Penninkhof J J et al. Nucl. Instrum. Meth. Phys. Res. B 242 523 (2006)
  384. Giulian R et al. Nucl. Instrum. Meth. Phys. Res. B 266 3158 (2008)
  385. Kerboua C H, Chicoine M, Roorda S Nucl. Instrum. Meth. Phys. Res. B 269 2006 (2011)
  386. Rizza G, Ridgway M C Ion Beam Modification Of Solids (Eds W Wesch, E Wendler) (Berlin: Springer, 2016) p. 443
  387. Sprouster D J et al. Appl. Phys. 109 113504 (2011)
  388. D’Orleans C et al. Nucl. Instrum. Meth. Phys. Res. B 209 316 (2003)
  389. Roorda S et al. Adv. Mater. 16 235 (2004)
  390. van Dillen T, van Blaaderen A, Polman A Mater. Today 7 40 (2004)
  391. Ridgway M C et al. Phys. Rev. Lett. 106 095505 (2011)
  392. Awazu K et al. Phys. Rev. B 78 054102 (2008)
  393. Kluth P et al. Appl. Phys. Lett. 94 113107 (2009)
  394. Zeng H et al. Appl. Phys. 87 4718 (2000)
  395. Pannu C et al. Nucl. Instrum. Meth. Phys. Res. B 379 206 (2016)
  396. Davi E A et al. Nucl. Instrum. Meth. Phys. Res. B 384 86 (2016)
  397. Kerboua C H et al. Thin Solid Films 527 186 (2013)
  398. Datta D P et al. Appl. Surf. Sci. 310 164 (2014)
  399. Oliver A et al. Phys. Rev. B 74 245425 (2006)
  400. Singh F et al. Nucl. Instrum. Meth. Phys. Res. B 311 5 (2013)
  401. Yang Y et al. Nucl. Instrum. Meth. Phys. Res. B 308 24 (2013)
  402. Ridgway M C et al. Nucl. Instrum. Meth. Phys. Res. B 267 931 (2009)
  403. Joseph B et al. Nucl. Instrum. Meth. Phys. Res. B 256 659 (2007)
  404. Giulian R et al. Phys. Rev. B 78 125413 (2008)
  405. Johanessen B et al. Nucl. Instrum. Meth. Phys. Res. B 250 210 (2006)
  406. Krasheninnikov A V, Nordlund K J. Appl. Phys. 107 071301 (2010)
  407. Avasthi D K, Mehta G H Swift Heavy Ions For Materials Engineering And Nanostructuring (Dordrecht: Springer, 2011)
  408. Mishra Y K et al. Appl. Phys. Lett. 91 063103 (2007)
  409. Giulian R et al. Phys. Rev. B 82 113410 (2010)
  410. Mahanta D et al. Eur. Phys. J. Appl. Phys. 35 29 (2006)
  411. Shirai M et al. Nucl. Instrum. Meth. Phys. Res. B 269 1787 (2009)
  412. Schmidt B et al. Nucl. Instrum. Meth. Phys. Res. B 267 1345 (2009)
  413. Amekura H et al. Appl. Phys. Lett. 103 203106 (2013)
  414. Rodichev D et al. Nucl. Instrum. Meth. Phys. Res. B 107 259 (1996)
  415. Hirschman K D et al. Nature 384 338 (1996)
  416. Arnoldbik W M et al. Phys. Rev. B 71 125329 (2005)
  417. Arnoldbik W M et al. Nucl. Instrum. Meth. Phys. Res. B 258 199 (2007)
  418. Saxena N et al. Phys. Status Solidi A 209 283 (2012)
  419. Ardyanian M, Rinnert H, Vergnat M Appl. Phys. Lett. 89 11902 (2006)
  420. Batra Y et al. J. Phys. D 40 4568 (2007)
  421. Mohanty T et al. J. Nanosci. Nanotechnol. 7 1 (2007)
  422. Tripathi N et al. Nucl. Instrum. Meth. Phys. Res. B 268 3335 (2010)
  423. Iwase A et al. Nucl. Instrum. Meth. Phys. Res. B 195 309 (2002)
  424. Valentin E et al. Phys. Rev. Lett. 86 99 (2001)
  425. Volkov A E, Korolev D N Nucl. Instrum. Meth. Phys. Res. B 209 98 (2003)
  426. Antonova I V et al. Nanotechnology 20 095205 (2009)
  427. Rao S et al. Nucl. Instrum. Meth. Phys. Res. B 268 1741 (2010)
  428. Saikiran V et al. Nucl. Instrum. Meth. Phys. Res. B 323 14 (2014)
  429. Komarov F F i dr. Izv. RAN. Ser. Fiz. 80 160 (2016); Komarov F F et al. Bull. Russ. Acad. Sci. Phys. 80 141 (2016)
  430. Saikiran V et al. Nucl. Instrum. Meth. Phys. Res. B 333 99 (2014)
  431. Rizza G, Dunlop A, Dezellus A Nucl. Instrum. Meth. Phys. Res. B 256 219 (2007)
  432. Sprouster D J et al. Phys. Rev. B 80 115438 (2009)
  433. Leino A A, Djurabekova F, Nordlund K Eur. Phys. J. B 87 242 (2014)
  434. Studer F et al. Nucl. Instrum. Meth. Phys. Res. B 82 91 (1993)
  435. Gokholl Sh et al. Nucl. Instrum. Meth. Phys. Res. B 333 64 (2014)
  436. Ghidini M et al. J. Magn. Magn. Mater. 140-144 483 (1995)
  437. Srivastava P C, Tripathi J K J. Phys. D 39 1465 (2006)
  438. Provost J et al. MRS Bull. 20 (12) 22 (1995)
  439. Wiesner J et al. Physica C 268 161 (1996)
  440. Rani S et al. Nanosensor Technol. 2008 395490 (2008)
  441. Messenger G C, Ash M S Single Event Phenomena (New York: Chapman and Hall, 1997)
  442. Cellere G et al. J. Appl. Phys. 38 160 (2016)
  443. Ma Y et al. Nucl. Instrum. Meth. Phys. Res. B 273 40 (2012)
  444. Kumar A et al. Nanotechnology 21 175102 (2010)
  445. Merk B et al. Nucl. Instrum. Meth. Phys. Res. B 306 81 (2013)
  446. Durante M Life Sci. Space Res. 1 2 (2014)
  447. Guan J, Wang L, QX Nucl. Instrum. Meth. Phys. Res. B 315 318 (2013)
  448. Liu G et al. Nucl. Instrum. Meth. Phys. Res. B 325 43 (2014)
  449. Yang J et al. Appl. Opt. 50 6678 (2011)
  450. Yao Y C et al. Opt. Express 19 2452 (2011)
  451. Zhou Y F et al. Nucl. Instrum. Meth. Phys. Res. B 315 328 (2013)
  452. Kip D Appl. Phys. B 67 131 (1998)
  453. Prabakaran K et al. Nucl. Instrum. Meth. Phys. Res. B 394 81 (2017)
  454. Biswas A et al. Nano Lett. 3 69 (2003)
  455. Bhavsar K H, Joshi U Nucl. Instrum. Meth. Phys. Res. B 379 95 (2016)
  456. Seki S Adv. Mater. 13 1663 (2001)
  457. Biswas A et al. Nucl. Instrum. Meth. Phys. Res. B 217 39 (2004)
  458. Norman G E et al. Contrib. Plasma Phys. 53 129 (2013)
  459. Saumon D et al. Frontiers And Challenges In Warm Dense Matter (Ed. F Graziani) (Heidelberg: Springer, 2014) p. 151
  460. Sadi S et al. Nucl. Instrum. Meth. Phys. Res. B 328 78 (2014)
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