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Prospects for the synthesis of large single-crystal diamonds


Lebedev Physical Institute, Russian Academy of Sciences, Leninsky prosp. 53, Moscow, 119991, Russian Federation

The unique properties of diamond have stimulated the study of and search for its applications in many fields, including optics, optoelectronics, electronics, biology and electrochemistry. Whereas chemical vapor deposition allows the growth of polycrystalline diamond plates more than 200 mm in diameter, most current diamond application technologies require large size (25 mm and more) single crystal diamond substrates or films suitable for the photolithography process. This is quite a challenge because the largest diamond crystals currently available are 10 mm or less in size. This review examines three promising approaches to fabricating large-size diamond single crystals: growing large size single crystals, the deposition of heteroepitaxial diamond films on single crystal substrates, and the preparation of composite diamond substrates.

Fulltext is available at IOP
Keywords: single-crystal diamond, chemical vapor deposition, epitaxy
PACS: 68.55.A−, 81.05.ug, 81.10.−h, 82.33.Ya (all)
DOI: 10.3367/UFNe.0185.201502b.0143
URL: https://ufn.ru/en/articles/2015/2/b/
Citation: Khmelnitskii R A "Prospects for the synthesis of large single-crystal diamonds" Phys. Usp. 58 134–149 (2015)
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Received: 16th, April 2014, revised: 18th, June 2014, 24th, June 2014

Оригинал: Хмельницкий Р А «Перспективы выращивания монокристаллического алмаза большого размера» УФН 185 143–159 (2015); DOI: 10.3367/UFNr.0185.201502b.0143

References (132) ↓ Cited by (33) Similar articles (20)

  1. Field J E (Ed.) The Properties Of Diamond (London: Academic Press, 1979)
  2. Koizumi S, Nebel C, Nesladek M (Eds) Physics And Applications Of CVD Diamond (Weinheim: Wiley-VCH Verlag, 2008)
  3. Balmer R S et al. J. Phys. Condens. Matter 21 364221 (2009)
  4. Vavilov V S, Gippius A A, Konorova E A Elektricheskie i Opticheskie Protsessy v Almaze (M.: Nauka, 1985)
  5. Railkar T A et al. Critical Rev. Solid State Mater. Sci. 25 163 (2000)
  6. Sussmann R S (Ed.) CVD Diamond For Electronic Devices And Sensors (Chichester: J. Wiley, 2009)
  7. Kohn E, Denisenko A Thin Solid Films 515 4333 (2007)
  8. Ekimov E A et al. Nature 428 542 (2004)
  9. Kim E et al. Appl. Phys. Lett. 101 082410 (2012)
  10. Mildren R P, Rabeau J R (Eds) Optical Engineering Of Diamond (Weinheim: Wiley-VCH, 2013)
  11. Hausmann B J M et al. Phys. Status Solidi A 209 1619 (2012)
  12. Bayn I et al. Diamond Relat. Mater. 20 937 (2011)
  13. Olivero P et al. Adv. Mater. 17 2427 (2005)
  14. Liao M et al. Diamond Relat. Mater. 24 69 (2012)
  15. Stacey A et al. Adv. Mater. 24 3333 (2012)
  16. Hird J R, Field J E Proc. R. Soc. Lond. A 460 3547 (2004)
  17. Schuelke T, Grotjohn T A Diamond Relat. Mater. 32 17 (2013)
  18. Friel I Diamond Relat. Mater. 18 808 (2009)
  19. Leipunskii O I Uspekhi Khimii 8 1519 (1939)
  20. Bundy F P et al. Carbon 34 141 (1996)
  21. Bundy F P et al. Nature 176 51 (1955)
  22. Wentorf R H (Jr.) J. Phys. Chem. 75 1833 (1971)
  23. Sumiya H, Toda N, Satoh S J. Cryst. Growth 237 - 239 1281 (2002)
  24. Sumiya H, Toda N, Satoh S SEI Tech. Rev. 60 10 (2005)
  25. Pal’yanov Yu N et al. Nucl. Instrum. Meth. Phys. Res. A 448 179 (2000)
  26. Silva F et al. Diamond Relat. Mater. 18 683 (2009)
  27. Burns R C et al. Diamond Relat. Mater. 8 1433 (1999)
  28. Sumiya H et al. Jpn. J. Appl. Phys. 51 090102 (2012)
  29. Pehrsson P E, Celii F G, Butler J E Diamond Films And Coatings (Ed. R F Davis) (Park Ridge, NJ: Noyes Publ., 1993) p. 68
  30. Derjaguin B V et al. J. Cryst. Growth 2 3804 (1968)
  31. Spitsyn B V, Bouilov L L, Derjaguin B V J. Cryst. Growth 52 219 (1981)
  32. Matsumoto S et al. Jpn. J. Appl. Phys. 21 183 (1982)
  33. Goodwin D G, Butler J E Theory Of Diamond Chemical Vapor Deposition (Eds M A Prelas, G Popovici, L K Bigelow) (New York: M. Dekker, 1998) p. 527
  34. Cheesman A, Harvey J N, Ashfold M N R J. Phys. Chem. A 112 11436 (2008)
  35. Butler J E et al. J. Phys. Condens. Matter 21 364201 (2009)
  36. May P W et al. J. Appl. Phys. 108 014905 (2010)
  37. Skokov S, Weiner B, Frenklach M J. Phys. Chem. 98 7073 (1994)
  38. Butler J E, Woodin R L Philos. Trans. R. Soc. A 342 209 (1993)
  39. D’Evelyn M P, Graham J D, MartL R Diamond Relat. Mater. 10 1627 (2001)
  40. Eaton-Magana S, D’Haenens-Johansson U F S Gems Gemology (Summer) 124 (2012)
  41. Hiramatsu M et al. Jpn. J. Appl. Phys. 46 303 (2007)
  42. Mankelevich Yu A, Ma P W Diamond Relat. Mater. 17 1021 (2008)
  43. Silva F et al. J. Phys. Condens. Matter 21 364202 (2009)
  44. Zuo S S et al. Diamond Relat. Mater. 17 300 (2008)
  45. Muchnikov A B et al. Diamond Relat. Mater. 19 432 (2010)
  46. Hemawan K W et al. Diamond Relat. Mater. 19 1446 (2010)
  47. Weng J et al. Diamond Relat. Mater. 30 15 (2012)
  48. Yamada H et al. Diamond Relat. Mater. 17 1062 (2008)
  49. Nebel C E, Ristein J (Eds) Thin-Film Diamond I. Semiconductors And Semimetals (Semiconductors and Semimetals Ser.) Vol. 76 (Amsterdam: Elsevier, 2004)
  50. Kobashi K Diamond Films. Chemical Vapor Deposition For Oriented And Heteroepitaxial Growth (Amsterdam: Elsevier, 2005)
  51. Nazare M H, Neves A J (Eds) Properties, Growth And Application Of Diamond (London: Inst. of Engineering and Technology, 2001)
  52. Brillas E, Martinez-Huitle C A (Eds) Synthetic Diamond Films. Preparation, Electrochemistry, Characterization, And Applications (Hoboken, NJ: John Wiley and Sons, 2011)
  53. Teraji T Phys. Status Solidi A 203 3324 (2006)
  54. Tallaire A et al. C. R. Physique 14 169 (2013)
  55. Takeuchi D et al. Phys. Rev. B 63 245328 (2001)
  56. Tallaire A et al. Diamond Relat. Mater. 33 71 (2013)
  57. Bauer T et al. Diamond Relat. Mater. 14 266 (2005)
  58. Butler J E, Oleynik I Phil. Trans. R. Soc. A 366 295 (2008)
  59. Meng Y et al. Phys. Status Solidi A 209 101 (2012)
  60. Silva F et al. J. Cryst. Growth 310 187 (2008)
  61. Silva F et al. Diamond Relat. Mater. 17 1067 (2008)
  62. Hartman P, Perdok W G Acta Cryst. 8 521 (1955)
  63. Giling L J, Van Enckevort W J P Surf. Sci. 161 567 (1985)
  64. Stekolnikov A A, Bechstedt F Phys. Rev. B 72 125326 (2005)
  65. Burns R C et al. J. Cryst. Growth 104 257 (1990)
  66. Liu L, Edgar J H Mater. Sci. Eng. R 37 61 (2002)
  67. Pashley D W "A historical review of epitaxy" Epitaxial Growth Pt. A (Ed. J W Matthews) (New York: Academic Press, 1975) p. 1
  68. Jiang X et al. Studies Of Heteroepitaxial Nucleation And Growth Of Diamond On Silicon (Electrochemical Soc. Proc.) Vol. 95-4 (Eds K K Ravi, J P Dismukes) (Pennigton, NJ: The Electrochemical Soc., 1995) p. 50
  69. Yoshimoto M et al. Nature 398 340 (1999)
  70. Liu W et al. J. Appl. Phys. 78 1291 (1995)
  71. Tachibana T et al. Diamond Relat. Mater. 6 266 (1997)
  72. Wolter S D et al. Appl. Phys. Lett. 66 2810 (1995)
  73. Suzuki T, Yagi M, Shibuki K Advances In New Diamond Science And Technology (Eds S Saito et al.) (Tokyo: MYU, 1994) p. 271
  74. Argoitia A et al. J. Appl. Phys. 73 4305 (1993)
  75. Tucker D A et al. Surf. Sci. 334 179 (1995)
  76. Bauer T et al. Phys. Status Solidi A 199 19 (2003)
  77. Koizumi S et al. Appl. Phys. Lett. 57 563 (1990)
  78. Inuzuka T, Koizumi S, Suzuki K Diamond Relat. Mater. 1 175 (1992)
  79. Koizumi S, Inuzuka T Jpn. J. Appl. Phys. 32 3920 (1993)
  80. Zhang X W et al. Nature Mater. 2 312 (2003)
  81. Stoner B R, Glass J T Appl. Phys. Lett. 60 698 (1992)
  82. Kawarada H et al. J. Appl. Phys. 81 3490 (1997)
  83. Suzuki T, Argoita A Phys. Status Solidi A 154 239 (1996)
  84. Wolter S D et al. Appl. Phys. Lett. 62 1251 (1993)
  85. Jia C L, Urban K, Jiang X Phys. Rev. B 52 5164 (1995)
  86. Jiang X, Jia C L Appl. Phys. Lett. 67 1197 (1995)
  87. Jiang X, Klages C P Phys. Status Solidi A 154 175 (1996)
  88. Sato Y et al. Philos. Trans. R. Soc. London A 342 225 (1993)
  89. Zhu W, Yang P C, Glass J T Appl. Phys. Lett. 63 1640 (1993)
  90. Yang P C et al. J. Mater. Res. 13 1120 (1998)
  91. Hartsell M L, Plano L S J. Mater. Res. 9 921 (1994)
  92. Ohtsuka K et al. Jpn. J. Appl. Phys. 35 1702 (1996)
  93. Ohtsuka K et al. Jpn. J. Appl. Phys. 36 1214 (1997)
  94. Schreck M, Roll H, Stritzker B Appl. Phys. Lett. 74 650 (1999)
  95. Tsubota T et al. Diamond Relat. Mater. 9 1380 (2000)
  96. Kono S et al. New Diamond Front. Carbon Technol. 15 363 (2005)
  97. Golding B, Bednarski-Meinke C, Dai Z Diamond Relat. Mater. 13 545 (2004)
  98. Gsell S et al. Diamond Relat. Mater. 16 665 (2007)
  99. Brescia R et al. Diamond Relat. Mater. 17 1045 (2008)
  100. Schreck M et al. Appl. Phys. Lett. 78 192 (2001)
  101. van der Drift A Philips Res. Rep. 22 267 (1967)
  102. Jiang X, Jia C L Appl. Phys. Lett. 69 3902 (1996)
  103. Dai Z et al. Appl. Phys. Lett. 82 3847 (2003)
  104. Gsell S et al. Appl. Phys. Lett. 84 4541 (2004)
  105. Fischer M et al. Diamond Relat. Mater. 17 1035 (2008)
  106. Kohn E et al. New Diamond Front. Carbon Technol. 11 81 (2001)
  107. Ertl S et al. Diamond Relat. Mater. 9 970 (2000)
  108. Achard J et al. Diamond Relat. Mater. 11 423 (2002)
  109. Kawarada H et al. Appl. Phys. Lett. 72 1878 (1998)
  110. Yamada T, Maede J, Sawabe A Jpn. J. Appl. Phys. 38 902 (1999)
  111. Kusakabe K et al. Diamond Relat. Mater. 12 1396 (2003)
  112. Stoner B R et al. Appl. Phys. Lett. 62 2347 (1993)
  113. Stolz A et al. Diamond Relat. Mater. 15 807 (2006)
  114. Geis M W Diamond Relat. Mater. 1 684 (1992)
  115. Janssen G, Giling L J Diamond Relat. Mater. 4 1025 (1995)
  116. Findeling-Dufour C, Gicquel A Thin Solid Films 308 - 309 178 (1997)
  117. Findeling-Dufour C, Gicquel A, Chiron R Diamond Relat. Mater. 7 986 (1998)
  118. Bauer T et al. Diamond Relat. Mater. 14 266 (2005)
  119. Frauenheim T et al. Diamond Relat. Mater. 7 348 (1998)
  120. Geis M W et al. Appl. Phys. Lett. 58 2485 (1991)
  121. Geis M W et al. Diamond Relat. Mater. 4 76 (1994)
  122. Meguro K et al. New Diamond Front. Carbon Technol. 12 125 (2002)
  123. Kobashi K et al. Diamond Relat. Mater. 12 233 (2003)
  124. Parikh N R et al. Appl. Phys. Lett. 61 3124 (1992)
  125. Wang C F et al. J. Vac. Sci. Technol. B 25 730 (2007)
  126. Yamada H et al. Diamond Relat. Mater. 24 29 (2012)
  127. Yamada H et al. Diamond Relat. Mater. 33 27 (2013)
  128. Mokuno Y et al. Diamond Relat. Mater. 19 128 (2010)
  129. Lu W Z et al. Key Eng. Mater. 315 - 316 464 (2006)
  130. Vikharev A L i dr. Fiz. Tekh. Poluprovodn. 46 274 (2012); Vikharev A L et al. Semiconductors 46 263 (2012)
  131. Pawar M R et al. Int. J. Microcircuits Electron. Pack 19 (3) 316 (1996)
  132. Vivensang C et al. Diamond Relat. Mater. 5 840 (1996)

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