RSS feeds
РусскийEnglish
Issue 4, 2024
Volume year page
Issues Authors PACS Subscription For authors

Issues

 / 

2015

 / 

November

←  →

Instruments and methods of investigation


Aperiodic multilayer structures in soft X-ray optics

 a,  b, c
a Kansai Photon Science Institute, Japan Atomic Energy Agency, 8-1-7 Umemidai, Kyoto, Kizugawa-shi, 619-0215, Japan
b Moscow Institute of Physics and Technology (National Research University), Institutskii per. 9, Dolgoprudny, Moscow Region, 141701, Russian Federation
c Lebedev Physical Institute, Russian Academy of Sciences, Leninsky prosp. 53, Moscow, 119991, Russian Federation

This paper reviews a series of studies that address the development and application of aperiodic multilayer structures (aperiodic multilayer mirrors) as soft X-ray (SXR) (λ ≈ 4—40 nm) optical elements. The paper discusses the potential of such structures for reflecting SXR radiation in a broad wavelength range, primarily at normal radiation incidence; and as polarization elements (broadband polarizer mirrors and phase shifters). The results of multiparametric optimization are presented, and experimental data for aperiodic Mo/Si (λ ⩾ 12.5 nm) multilayer mirrors are outlined. The feasibility of advancing to the λ ⩽ 12.5 nm domain due to the use of other materials is examined, and the capabilities of aperiodic structures as elements of attosecond SXR optics are discussed.

Fulltext pdf (697 KB)
Fulltext is also available at DOI: 10.3367/UFNe.0185.201511e.1203
Keywords: soft X-ray/EUV optics, aperiodic multilayer structures, broadband multilayer mirrors, polarization optics, attosecond optical elements, imaging spectrometers
PACS: 07.60.−j, 42.30.−d, 42.79.−e (all)
DOI: 10.3367/UFNe.0185.201511e.1203
URL: https://ufn.ru/en/articles/2015/11/d/
000369654900004
2015PhyU...58.1095P
Citation: Pirozhkov A S, Ragozin E N "Aperiodic multilayer structures in soft X-ray optics" Phys. Usp. 58 1095–1105 (2015)
BibTexBibNote ® (generic)BibNote ® (RIS)MedlineRefWorks

Received: 25th, August 2015, 8th, September 2015

Оригинал: Пирожков А С, Рагозин Е Н «Апериодические многослойные структуры в оптике мягкого рентгеновского излучения» УФН 185 1203–1214 (2015); DOI: 10.3367/UFNr.0185.201511e.1203

References (66) ↓ Cited by (24) Similar articles (20)

  1. Spiller E Appl. Phys. Lett. 20 365 (1972)
  2. Vinogradov A V, Zel’dovich B Ya Optika Spektroskopiya 42 709 (1977); Vinogradov A V, Zeldovich B Ya Opt. Spectrosc. 42 404 (1977)
  3. Vinogradov A V, Kozhevnikov I V Trudy FIAN 196 62 (1989)
  4. Spiller E A Proc. SPIE 1546 489 (1992)
  5. Barysheva M M i dr. Usp. Fiz. Nauk 182 727 (2012); Barysheva M M et al. Phys. Usp. 55 681 (2012)
  6. Corkum P B Phys. Rev. Lett. 71 1994 (1993)
  7. Teubner U, Gibbon P Rev. Mod. Phys. 81 445 (2009)
  8. Cingöz A et al. Nature 482 68 (2012)
  9. Jones R J et al. Phys. Rev. Lett. 94 193201 (2005)
  10. Samson J A R Techniques Of Vacuum Ultraviolet Spectroscopy (New York: Wiley, 1967)
  11. Kolachevskii N N, Pirozhkov A S, Ragozin E N Kvantovaya Elektronika 30 428 (2000); Kolachevsky N N, Pirozhkov A S, Ragozin E N Quantum Electron. 30 428 (2000)
  12. Beigman I L, Pirozhkov A S, Ragozin E N Pis’ma ZhETF 74 167 (2001); Beigman I L, Pirozhkov A S, Ragozin E N JETP Lett. 74 149 (2001)
  13. Beigman I L, Pirozhkov A S, Ragozin E N J. Opt. A Pure Appl. Opt. 4 433 (2002)
  14. Meekins J F, Cruddace R G, Gursky H Appl. Opt. 26 (6) 990 (1987)
  15. van Loevezijn P et al. Appl. Opt. 35 3614 (1996)
  16. Balakireva L L, Kozhevnikov I V J. X-Ray Sci. Technol. 6 150 (1996)
  17. Joensen K D et al. Proc. SPIE 2279 180 (1994)
  18. Kozhevnikov I V, Bukreeva I N, Ziegler E Nucl. Instrum. Meth. Phys. Res. A 460 424 (2001)
  19. Ziegler E et al. Proc. SPIE 3737 386 (1999)
  20. Morawe Ch et al. Nucl. Instrum. Meth. Phys. Res. A 493 189 (2002)
  21. Kozhevnikov I V, Montcalm C Nucl. Instrum. Meth. Phys. Res. A 624 192 (2010)
  22. Kondratenko V V Kratkie Soobshcheniya Po Fizike FIAN (7) 32 (2001)
  23. Vishnyakov E A, Shatokhin A N, Ragozin E N Kvantovaya Elektronika 45 371 (2015); Vishnyakov E A, Shatokhin A N, Ragozin E N Quantum Electron. 45 371 (2015)
  24. Ragozin E N et al. Proc. SPIE 4782 176 (2002)
  25. Vishnyakov E A i dr. Kvantovaya Elektronika 39 474 (2009); Quantum Electron. 39 474 (2009)
  26. Ragozin E N et al. Proc. SPIE 7360 73600N (2009)
  27. Kapralov V G i dr. Kvantovaya Elektronika 32 149 (2002); Kapralov V G et al. Quantum Electron. 32 149 (2002)
  28. Levashov V E et al. Radiat. Phys. Chem. 75 1819 (2006)
  29. Levashov V E i dr. Kvantovaya Elektronika 36 549 (2006); Levashov V E et al. Quantum Electron. 36 549 (2006)
  30. Beigman I L i dr. Kvantovaya Elektronika 37 1060 (2007); Beigman I L et al. Quantum Electron. 37 1060 (2007)
  31. Beigman I L i dr. Kvantovaya Elektronika 40 545 (2010); Beigman I L et al. Quantum Electron. 40 545 (2010)
  32. Louis E et al. Proc. SPIE 7361 73610I (2009)
  33. Kando M et al. Phys. Rev. Lett. 103 235003 (2009)
  34. Pirozhkov A S et al. AIP Conf. Proc. 1153 274 (2009)
  35. Pirozhkov A S et al. Proc. SPIE 8140 81400A (2011)
  36. Henke B L, Gullikson E M, Davis J C Atom. Data Nucl. Data Tabl. 54 181 (1993)
  37. Soufli R, Gullikson E M Proc. SPIE 3113 222 (1997)
  38. Parratt L G Phys. Rev. 95 359 (1954)
  39. Zubarev E N Metallofizika Noveishie Tekhnologii 19 (8) 56 (1997)
  40. Janev R K, Presnyakov L P, Shevelko V P Physics Of Highly Charged Ions (Springer Series in Electrophysics) Vol. 13 (Berlin: Springer-Verlag, 1985) p. 151
  41. Zhivlyuk G M Nanofizika i nanoelektronika: XI Mezhdunar. simpozium, Nizhnii Novgorod, 10 - 14 marta 2007 g. Vol. 2 (N. Novgorod: In-t fiziki mikrostruktur RAN, 2007) p. 361
  42. Vishnyakov E A i dr. Kvantovaya Elektronika 42 143 (2012); Vishnyakov E A et al. Quantum Electron. 42 143 (2012)
  43. Allred D D et al. Proc. SPIE 4782 212 (2002)
  44. Sandberg R L et al. Proc. SPIE 5193 191 (2004)
  45. Artyukov I A i dr. Poverkhnost’. Rentgenovskie, Sinkhrotronnye Neitronnye Issledovaniya (5) 9 (2007)
  46. Artioukov I A et al. Nucl. Instrum. Meth. Phys. Res. A 517 372 (2004)
  47. Platonov Yu Yu, Gomez L, Broadway D Proc. SPIE 4782 152 (2002)
  48. Barysheva M M Rentgenovskaya Optika — 2008. Materialy Soveshchaniya, G. Chernogolovka, 6 - 9 Oktyabrya 2008 G. (Chernogolovka: IPTM RAN, 2008) p. 32; Barysheva M M http://purple.iptm.ru/xray/xray2008/files_files/X-ray%202008.pdf
  49. Chkhalo N I et al. Appl. Phys. Lett. 102 011602 (2013)
  50. Aquila A L et al. Opt. Express 14 10073 (2006)
  51. Wang Z et al. J. Appl. Phys. 99 056108 (2006)
  52. Wang Z et al. Appl. Phys. Lett. 89 241120 (2006); Appl. Phys. Lett. 90 031901 (2007)
  53. Wang Z et al. Chinese Opt. Lett. 8 163 (2010)
  54. Lin C, Chen S, Chen Z Opt. Commun. 326 70 (2014)
  55. Lin C, Chen S, Chen Z, Ding Y Opt. Commun. 347 98 (2015)
  56. Szipöcs R et al. Opt. Lett. 19 201 (1994)
  57. Pirozhkov A S et al. Ultrafast Phenomena XIV: Proc. 14th Intern. Conf., Niigata, Japan, July 25 - 30, 2004 (Eds T Kobayashi et al.) (Berlin: Springer, 2005) p. 85
  58. Morlens A-S et al. Opt. Lett. 30 1554 (2005)
  59. Wonisch A et al. Appl. Opt. 45 4147 (2006)
  60. Aquila A, Salmassi F, Gullikson E Opt. Lett. 33 455 (2008)
  61. Hofstetter M et al. New J. Phys. 13 063038 (2011)
  62. Guggenmos A et al. Proc. SPIE 8502 850204 (2012)
  63. Bourassin-Bouchet C et al. New J. Phys. 14 023040 (2012)
  64. Guggenmos A et al. Proc. SPIE 9207 92070L (2014)
  65. Diveki Z et al. J. Mod. Opt. 61 122 (2014)
  66. Vishnyakov E A i dr. Nanofizika i nanoelektronika: Trudy XIX Mezhdunar. simpoziuma, Nizhnii Novgorod, 10 - 14 marta 2015 g. Vol. 1 (N. Novgorod: Izd-vo Nizhegorodskogo un-ta im. N.I. Lobachevskogo, 2015) p. 326; Vishnyakov E A i dr. http://nanosymp.ru/UserFiles/Symp/2015_v1.pdf
© 1918–2024 Uspekhi Fizicheskikh Nauk
Email: ufn@ufn.ru Editorial office contacts About the journal Terms and conditions