This paper reviews a series of studies that address the development and application of aperiodic multilayer structures (aperiodic multilayer mirrors) as soft X-ray (SXR) (λ ≈ 4—40 nm) optical elements. The paper discusses the potential of such structures for reflecting SXR radiation in a broad wavelength range, primarily at normal radiation incidence; and as polarization elements (broadband polarizer mirrors and phase shifters). The results of multiparametric optimization are presented, and experimental data for aperiodic Mo/Si (λ ⩾ 12.5 nm) multilayer mirrors are outlined. The feasibility of advancing to the λ ⩽ 12.5 nm domain due to the use of other materials is examined, and the capabilities of aperiodic structures as elements of attosecond SXR optics are discussed.

Keywords: soft X-ray/EUV optics, aperiodic multilayer structures, broadband multilayer mirrors, polarization optics, attosecond optical elements, imaging spectrometers PACS: 07.60.−j, 42.30.−d, 42.79.−e (all) DOI: 10.3367/UFNe.0185.201511e.1203 URL: https://ufn.ru/en/articles/2015/11/d/ 000369654900004 2015PhyU...58.1095P Citation: Pirozhkov A S, Ragozin E N "Aperiodic multilayer structures in soft X-ray optics" Phys. Usp. 58 1095–1105 (2015) BibTexBibNote ® (generic)BibNote ® (RIS)MedlineRefWorks Received: 25th, August 2015, accepted: 8th, September 2015 Оригинал: Пирожков А С, Рагозин Е Н «Апериодические многослойные структуры в оптике мягкого рентгеновского излучения» УФН 185 1203–1214 (2015); DOI: 10.3367/UFNr.0185.201511e.1203