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Instruments and methods of investigation


Application of micro- and nanoprobes to the analysis of small-sized 3D materials, nanosystems, and nanoobjects

 a, b,  a,  c,  c
a Sumy State University, ul. Rimskogo-Korsakova 2, Sumy, 244007, Ukraine
b Sumy Institute for Surface Modification, prosp. Shevchenko 17, PO Box 163, Sumy, 244034, Ukraine
c Kurdyumov Institute for Metal Physics, National Academy of Sciences of Ukraine, Vernadsky blvd. 36, Kyiv, 03680, Ukraine

The basic physics behind the interaction of ions with solid-state matter is discussed, with an emphasis on the formation of interaction products between the ions and target atoms. Processes covering modification of high-resistance materials for use in small-sized 3D structure technology are described. Current trends in and problems facing the development of the scanning nuclear microprobe (SNMP) are reviewed. The application of slow positrons to diagnosing materials is examined and the techniques of positron microscopy and microprobing are presented. The potential of near-field microwave microscopy for diagnosing superconducting ceramics and of microwave microscopy for nanotechnology applications are assessed. The examples given include the use of micro- and nanoprobes to analyze nanoobjects (such as green algae cells with 3D-distributed microelements, etc.), to develop the topological aspects of integrated microcircuits in nanoelectronics, and some other applications. The role of iron in pathogenesis of Parkinson’s disease is highlighted, the latter being the subject of research in neurochemistry.

Fulltext pdf (3.4 MB)
Fulltext is also available at DOI: 10.3367/UFNe.0182.201203d.0287
PACS: 07.78.+s, 78.70.Bj, 81.16.Ta, 81.40.−z (all)
DOI: 10.3367/UFNe.0182.201203d.0287
URL: https://ufn.ru/en/articles/2012/3/d/
000305464600003
2-s2.0-84863474680
2012PhyU...55..270P
Citation: Pogrebnjak A D, Ponomarev A G, Shpak A P, Kunitskii Yu A "Application of micro- and nanoprobes to the analysis of small-sized 3D materials, nanosystems, and nanoobjects" Phys. Usp. 55 270–300 (2012)
BibTexBibNote ® (generic)BibNote ® (RIS)MedlineRefWorks

Received: 8th, February 2011, revised: 14th, April 2011, 28th, April 2011

Оригинал: Погребняк А Д, Пономарев А Г, Шпак А П, Куницкий Ю А «Применение микро- и нанозондов для анализа малоразмерных 3D материалов, наносистем и нанообъектов» УФН 182 287–321 (2012); DOI: 10.3367/UFNr.0182.201203d.0287

References (217) ↓ Cited by (67) Similar articles (17)

  1. Vijayakumar M et al. Def. Sci. J. 39 (1) 13 (1989)
  2. Elovikov S S Sorosovskii Obrazovatel’nyi Zhurn. (2) 82 (2001)
  3. Cadel E, Fraczkiewicz A, Blavette D Annu. Rev. Mater. Res. 33 215 (2003)
  4. Chisholm M F, Pennycook S J Philos. Mag. 86 4699 (2006)
  5. Cherepin V T Ionnyi Mikrozondovyi Analiz (K.: Nauk. dumka, 1992)
  6. Reyntjens S, Puers R J. Micromech. Microeng. 11 287 (2001)
  7. Watt F, Grime G W (Eds) Principles And Applications Of High-Energy Microbeams (Bristol: A. Hilger, 1987)
  8. Maggiore C J Scanning Electron Microsc. 1 419 (1980)
  9. Breese M B H, Jamieson D N, King P J C Materials Analysis Using A Nuclear Microprobe (New York: John Wiley, 1996)
  10. Shibata H et al. Nucl. Instrum. Meth. Phys. Res. B 260 321 (2007)
  11. Raepsaet C et al. Nucl. Instrum. Meth. Phys. Res. B 267 2245 (2009)
  12. Takai M Nucl. Instrum. Meth. Phys. Res. B 113 330 (1996)
  13. Sie S H Nucl. Instrum. Meth. Phys. Res. B 130 592 (1997)
  14. Przybylowicz W J et al. Nucl. Instrum. Meth. Phys. Res. B 130 335 (1997)
  15. Vis R D The Proton Microprobe: Applications In Biomedical Field (Boca Raton, Fla.: CRC Press, 1985)
  16. Moretto Ph, Llabador Y Nucl. Instrum. Meth. Phys. Res. B 130 324 (1997)
  17. Llabador Y, Moretto Ph Applications Of Nuclear Microprobes In The Life Sciences: An Efficient Analytical Technique For Research In Biology And Medicine (Singapore: World Scientific, 1998)
  18. Demortier G Nucl. Instrum. Meth. Phys. Res. B 113 347 (1996)
  19. Malmqvist K G Nucl. Instrum. Meth. Phys. Res. B 113 336 (1996)
  20. Kertúsz Zs et al. Nucl. Instrum. Meth. Phys. Res. B 267 2236 (2009)
  21. Meijer J et al. Nucl. Instrum. Meth. Phys. Res. B 161-163 898 (2000)
  22. Röcken H et al. Nucl. Instrum. Meth. Phys. Res. B 181 274 (2001)
  23. Watt F et al. Int. J. Nanosci. 4 269 (2005)
  24. Ponomarev A G Visn. SumDU Fiz., mat., mekh. (2) 46 (2008)
  25. Watt F et al. Mater. Today 10 (6) 20 (2007)
  26. Ziegler J F, Ziegler M D, Biersack J P Nucl. Instrum. Meth. Phys. Res. B 268 1818 (2010); SRIM — The stopping and range of ionsmatter, http://www.SRIM.org/
  27. Teo E J et al. Proc. SPIE 5347 264 (2004)
  28. Legge G J F Nucl. Instrum. Meth. Phys. Res. B 130 9 (1997)
  29. Val’ter A K (Red.) Elektrostaticheskie Uskoriteli Zaryazhennykh Chastits (M.: Gosatomizdat, 1963)
  30. Teo E J et al. J. Vac. Sci. Technol. B 22 560 (2004)
  31. Udalagama C N B et al. Nucl. Instrum. Meth. Phys. Res. B 260 390 (2007)
  32. Schroeder J B, Howell C W, Norton G A Nucl. Instrum. Meth. Phys. Res. B 24-25 763 (1987)
  33. Ferry J A Nucl. Instrum. Meth. Phys. Res. A 328 28 (1993)
  34. Gol’din L L Fizika Uskoritelei (M.: Nauka, 1983)
  35. Mous D J W et al. Nucl. Instrum. Meth. Phys. Res. B 130 31 (1997)
  36. Mordyk S M et al. Rev. Sci. Instrum. 75 1922 (2004)
  37. Mordyk S M et al. Nucl. Instrum. Meth. Phys. Res. B 231 37 (2005)
  38. Miroshnichenko V et al. Nucl. Instrum. Meth. Phys. Res. B 260 39 (2007)
  39. Adamczewski J et al. Nucl. Instrum. Meth. Phys. Res. B 130 57 (1997)
  40. Kalbitzer S Nucl. Instrum. Meth. Phys. Res. B 158 53 (1999)
  41. Allan G L, Legge G J F, Zhu J Nucl. Instrum. Meth. Phys. Res. B 34 122 (1988)
  42. Legge G J F et al. Rev. Sci. Instrum. 67 909 (1996)
  43. Colman R A, Legge G J F Nucl. Instrum. Meth. Phys. Res. B 73 561 (1993)
  44. Vis R D et al. Nucl. Instrum. Meth. Phys. Res. B 197 179 (1982)
  45. Kurashima S et al. Nucl. Instrum. Meth. Phys. Res. B 260 65 (2007)
  46. Kurashima S et al. Nucl. Instrum. Meth. Phys. Res. B 267 2024 (2009)
  47. Pierce T B, Peck P F, Cuff D R A Nature 211 66 (1966)
  48. Mak B W, Bird J R, Sabine T M Nature 211 738 (1966)
  49. Maggiore C J Nucl. Instrum. Meth. Phys. Res. B 191 199 (1981)
  50. Meijer J et al. Nucl. Instrum. Meth. Phys. Res. B 99 423 (1995)
  51. Stephan A et al. Nucl. Instrum. Meth. Phys. Res. B 113 387 (1996)
  52. Hawkes P W Quadrupoles In Electron Lens Design (New York: Academic Press, 1970)
  53. Yavor S Ya Fokusirovka Zaryazhennykh Chastits Kvadrupol’nymi Linzami (M.: Atomizdat, 1968)
  54. Dymnikov A D, Yavor S Ya Zh. Tekh. Fiz. 33 7851 (1963)
  55. Dymnikov A D i dr. Zh. Tekh. Fiz. 35 3431 (1965)
  56. Cookson J A, Ferguson A T G, Pilling F D J. Radioanalytical Chem. 12 39 (1972)
  57. Ryabchikov A I, Puzyrevich A G Prib. Tekh. Eksp. (5) 209 (1990)
  58. Bondarenko V N, Goncharov A V, Kolot V Ya Vopr. Atom. Nauki Tekhn. Yaderno-fizicheskie issled. (4) 98 (1999)
  59. Ponomarev A G i dr. Prikladnaya Fizika (2) 28 (2008)
  60. Magilin D V et al. Nucl. Instrum. Meth. Phys. Res. B 267 2046 (2009)
  61. Rebrov V A et al. Nucl. Instrum. Meth. Phys. Res. B 260 34 (2007)
  62. Ponomarev A G et al. Nucl. Instrum. Meth. Phys. Res. B 201 637 (2003)
  63. Ponomarev A G, Miroshnichenko V I, Storizhko V E Nucl. Instrum. Meth. Phys. Res. A 506 20 (2003)
  64. Matsuyama S et al. Nucl. Instrum. Meth. Phys. Res. B 260 55 (2007)
  65. Grime G W, Watt F Beam Optics Of Quadrupole Probe-Forming Systems (Bristol: A. Hilger, 1984)
  66. Watt F et al. Nucl. Instrum. Meth. Phys. Res. B 210 14 (2003)
  67. Brazhnik V et al. Nucl. Instrum. Meth. Phys. Res. B 77 29 (1993)
  68. Brazhnik V A et al. Nucl. Instrum. Meth. Phys. Res. B 104 92 (1995)
  69. Moloney G R, Jamieson D N, Legge G J F Nucl. Instrum. Meth. Phys. Res. B 54 68 (1991)
  70. Dymnikov A D, Jamieson D N, Legge G J F Nucl. Instrum. Meth. Phys. Res. B 104 64 (1995)
  71. Butz T, Legge G J F Nucl. Instrum. Meth. Phys. Res. B 113 317 (1996)
  72. Butz T et al. Nucl. Instrum. Meth. Phys. Res. B 161-163 323 (2000)
  73. Ryan C G et al. Nucl. Instrum. Meth. Phys. Res. B 158 18 (1999)
  74. Ryan C G, Jamieson D N Nucl. Instrum. Meth. Phys. Res. B 158 97 (1999)
  75. Breese M B H et al. Nucl. Instrum. Meth. Phys. Res. B 158 48 (1999)
  76. Ryan C G et al. Nucl. Instrum. Meth. Phys. Res. B 181 12 (2001)
  77. Datzmann G et al. Nucl. Instrum. Meth. Phys. Res. B 158 74 (1999)
  78. Glass G A et al. MRS Proc. 908 0908-OO06-01 (2006)
  79. Johansson S A E, Campbell J L, Malmqist K G (Eds) Particle-Induced X-Ray Emission Spectrometry (PIXE) (New York: Wiley, 1995)
  80. Johansson S A E, Campbell J L PIXE: A Novel Technique For Elemental Analysis (Chichester: Wiley, 1988)
  81. Johansson S A E, Campbell J L Intercomparison Of PIXE Spectrometry Software Packages (IAEA-TECDOC-1342) (Vienna: IAEA, 2003)
  82. Ryan C G, van Achterbergh E, Jamieson D N Nucl. Instrum. Meth. Phys. Res. B 231 162 (2005)
  83. Ryan C G et al. Nucl. Instrum. Meth. Phys. Res. B 260 1 (2007)
  84. Ryan C G et al. Nucl. Instrum. Meth. Phys. Res. B 268 1899 (2010)
  85. Watt F et al. Nucl. Instrum. Meth. Phys. Res. B 181 431 (2001)
  86. Barapatre N et al. Nucl. Instrum. Meth. Phys. Res. B 268 2156 (2010)
  87. Andrea T et al. Nucl. Instrum. Meth. Phys. Res. B 268 1884 (2010)
  88. Shipatov E T Obratnoe Rasseyanie Bystrykh Ionov: Teoriya, Eksperiment, Praktika (Rostov-na-Donu: Izd-vo Rostovskogo un-ta, 1988)
  89. Tesmer J R, Nastasi M (Eds) Handbook Of Modern Ion Beam Materials Analysis (Pittsburgh, Pa.: Materials Research Society, 1995)
  90. Molodtsov S L, Gurbich A F, Jeynes C J. Phys. D 41 205303 (2008)
  91. Barradas N P et al. Nucl. Instrum. Meth. Phys. Res. B 266 1338 (2008)
  92. Samlenski R et al. Nucl. Instrum. Meth. Phys. Res. B 190 324 (2002)
  93. Llabador Y, Moretto Ph, Guegan H Nucl. Instrum. Meth. Phys. Res. B 77 123 (1993)
  94. Sjöland K A et al. Nucl. Instrum. Meth. Phys. Res. B 130 20 (1997)
  95. Breese M B H et al. Nucl. Instrum. Meth. Phys. Res. B 264 345 (2007)
  96. Vizkelethy G et al. Nucl. Instrum. Meth. Phys. Res. B 260 264 (2007)
  97. Colombo E et al. Nucl. Instrum. Meth. Phys. Res. B 267 2181 (2009)
  98. Vizkelethy G et al. Nucl. Instrum. Meth. Phys. Res. B 267 2185 (2009)
  99. Huddle J R et al. Nucl. Instrum. Meth. Phys. Res. B 261 475 (2007)
  100. Rossi P et al. Nucl. Instrum. Meth. Phys. Res. B 181 437 (2001)
  101. Mathis F et al. Nucl. Instrum. Meth. Phys. Res. B 268 2078 (2010)
  102. Manfredotti C et al. Nucl. Instrum. Meth. Phys. Res. B 136-138 1333 (1998)
  103. Zhdankin V Sovremen. Tekhnologii Avtomatizatsii (3) 6 (2005)
  104. Schrimpf R D et al. Nucl. Instrum. Meth. Phys. Res. B 261 1133 (2007)
  105. Fischer B E et al. Nucl. Instrum. Meth. Phys. Res. B 158 245 (1999)
  106. Cholewa M et al. Nucl. Instrum. Meth. Phys. Res. B 130 275 (1997)
  107. Kamiya T, Hirao T, Kobayashi Y Nucl. Instrum. Meth. Phys. Res. B 219-220 1010 (2004)
  108. Reed R A et al. Nucl. Instrum. Meth. Phys. Res. B 261 443 (2007)
  109. Vizkelethy G et al. Nucl. Instrum. Meth. Phys. Res. B 268 2092 (2010)
  110. Barberet Ph et al. Nucl. Instrum. Meth. Phys. Res. B 267 2003 (2009)
  111. Khodja H et al. Nucl. Instrum. Meth. Phys. Res. B 267 1999 (2009)
  112. Arteaga-Marrero N et al. Nucl. Instrum. Meth. Phys. Res. B 260 91 (2007)
  113. Kirkby K J et al. Nucl. Instrum. Meth. Phys. Res. B 260 97 (2007)
  114. Kobayashi Y et al. Nucl. Instrum. Meth. Phys. Res. B 210 308 (2003)
  115. Imaseki H et al. Nucl. Instrum. Meth. Phys. Res. B 260 81 (2007)
  116. Konishi T et al. Nucl. Instrum. Meth. Phys. Res. B 267 2171 (2009)
  117. Springham S V et al. Nucl. Instrum. Meth. Phys. Res. B 130 155 (1997)
  118. van Kan J A et al. Nucl. Instrum. Meth. Phys. Res. B 148 1085 (1999)
  119. Watt F Nucl. Instrum. Meth. Phys. Res. B 158 165 (1999)
  120. van Kan J A et al. Nucl. Instrum. Meth. Phys. Res. B 161-163 366 (2000)
  121. Chiam C Y et al. Nucl. Instrum. Meth. Phys. Res. B 260 455 (2007)
  122. van Kan J A, Bettiol A A, Watt F Appl. Phys. Lett. 83 1629 (2003)
  123. van Kan J A, Bettiol A A, Watt F Nucl. Instrum. Meth. Phys. Res. B 181 258 (2001)
  124. Menzel F et al. Nucl. Instrum. Meth. Phys. Res. B 231 372 (2005)
  125. Rajta I et al. Nucl. Instrum. Meth. Phys. Res. B 267 2292 (2009)
  126. van Kan J A et al. Nucl. Instrum. Meth. Phys. Res. B 260 460 (2007)
  127. van Kan J A, Bettiol A A, Watt F Nano Lett. 6 579 (2006)
  128. Furuta Y et al. Nucl. Instrum. Meth. Phys. Res. B 267 2285 (2009)
  129. Ansari K et al. Appl. Phys. Lett. 85 476 (2004)
  130. Ansari K et al. J. Micromech. Microeng. 16 1967 (2006)
  131. van Kan J A et al. Int. J. Nanotechnol. 1 464 (2004)
  132. Sum T C et al. Nucl. Instrum. Meth. Phys. Res. B 210 266 (2003)
  133. Krause-Rehberg R, Leipner H S Positron Annihilation In Semiconductors: Defect Studies (Berlin: Springer-Verlag, 1999)
  134. Triftshäuser W Microscopic Methods In Metals (Ed. U Gonser) (Berlin: Springer-Verlag, 1986) p. 249
  135. Pogrebnjak A D, Beresnev V M Nanocoatings, Nanosystems And Nanotechnologies (Ed. A Pogrebnjak) (New York: Bentham Science Publ., 2012) p. 290
  136. Vehanen A et al. Appl. Phys. A 32 163 (1983)
  137. Vehanen A et al. Positron Annihilation (Eds L Dorikens-Vanpraet, D Segers) (Singapore: Word Scientific, 1989) p. 39
  138. Vehanen A et al. Phys. Rev. B 35 4606 (1987)
  139. Brusa R S et al. Mater. Sci. Forum 105-110 1849 (1992)
  140. Bauer-Kugelman W et al. Mater. Sci. Forum 255-257 662 (1997)
  141. Beling C D et al. Appl. Phys. A 42 111 (1987)
  142. Fisher D A, Lynn K G, Gidley D W Phys. Rev. B 33 4479 (1986)
  143. Kögel G Appl. Phys. A 63 227 (1996)
  144. Kögel G et al. Phys. Rev. Lett. 60 1550 (1988)
  145. Akahane T et al. Appl. Phys. A 51 146 (1990)
  146. Valkealahti S, Niemien R M Appl. Phys. A 32 95 (1983)
  147. Valkealahti S, Niemien R M Appl. Phys. A 35 51 (1984)
  148. Ghosh V J Appl. Surf. Sci. 85 187 (1995)
  149. Makhov A F Fiz. Tverd. Tela 2 2164 (1960); Makhov A F Sov. Phys. Solid State 2 1934 (1961)
  150. Ghosh V J, Aers G C Phys. Rev. B 51 45 (1995)
  151. Gebauer J, Krause-Rehberg R Mater. Sci. Forum 255-257 204 (1997)
  152. Schultz P J, Lynn K G Rev. Mod. Phys. 60 701 (1988)
  153. Schödlbauer D et al. Nucl. Instrum. Meth. Phys. Res. B 34 258 (1988)
  154. Suzuki R et al. Jpn. J. Appl. Phys. 30 L532 (1991)
  155. Willutzki P et al. Meas. Sci. Technol. 5 548 (1994)
  156. Coleman P G, Baker J A, Chilton N B Mater. Sci. Forum 105-110 213 (1992)
  157. Mills A P J, Gullikson E M Appl. Phys. Lett. 49 1121 (1986)
  158. Bauer-Kugelmann W et al. Appl. Surf. Sci. 116 231 (1997)
  159. Duffy J A et al. Appl. Surf. Sci. 116 241 (1997)
  160. Pensl G, Helbig R Adv. Solid State Phys. 30 133 (1990)
  161. Muehlhoff L et al. J. Appl. Phys. 60 2842 (1986)
  162. Sonntag H, Kalbitzer S Appl. Phys. A 61 363 (1995)
  163. Brauer G et al. Phys. Rev. B 54 3084 (1996)
  164. Uhlmann K et al. Analyt. Chem. 353 594 (1995)
  165. Zecca A et al. Europhys. Lett. 29 617 (1995)
  166. Triftshäuser W et al. Nucl. Instrum. Meth. Phys. Res. B 130 264 (1997)
  167. Triftshäuser G et al. Appl. Surf. Sci. 116 45 (1997)
  168. Uhlmann K, Britton D T, Kögel G Meas. Sci. Technol. 6 932 (1995)
  169. Uhlmann K, Britton D T, Kögel G Optik 98 5 (1994)
  170. Canter K F et al. Atomic Physics With Positrons (Eds J W Humberston, E A G Armour) (New York: Plenum Press, 1987) p. 153
  171. Triftshäuser W Proc. of the Intern. Workshop on Advanced Techniques of Positron Beam Generation and Control, JAERI, Japan, 1998 p. 57
  172. Pogrebnjak A D et al. Phys. Lett. A 265 225 (2000)
  173. Pogrebnjak A D et al. Phys. Lett. A 241 357 (1998)
  174. Pogrebnyak A D i dr. Usp. Fiz. Nauk 179 35 (2009); Pogrebnjak A D et al. Phys. Usp. 52 29 (2009)
  175. Gordienko Yu E, Slipchenko N I, Petrov V V Radioelektronika Informatika (3) 19 (2007)
  176. Slipchenko N I "Fizichni osnovi blizhn’opol’ovoï NVCh diagnostiki materialiv i seredovishch" Avtoref. diss. ... dokt. fiz.-mat. nauk (Sumi, 2008)
  177. Gordienko Yu E i dr. "Algoritm rekonstruktsii izobrazhenii v blizhnepolevoi skaniruyushchei mikroskopii" Radiotekhnika Vseukr. Mezhved. Nauchn.-tekhn. Sb. (2003) p. 135
  178. Gordienko Yu G i dr. 3-ya Mizhnarod. naukovo-tekhnichna konf. "Sensorna elektronika ta mikrosistemni tekhnologii", Ukrana, Odessa, 2-6 chervnya 2008 p. 156
  179. Ryabukhin O O, Gordinko Yu O, Slipchenko N I "Integral’nii mikropolozkovii rezonatornii zond mikrokhvil’ovogo mikroskopa" Dekl. Patent №71456A vid 15.11.2004
  180. Ash E A, Nicholls G Nature 237 510 (1972)
  181. Bryant C A, Gunn J B Rev. Sci. Instrum. 36 1614 (1965)
  182. Fee M, Chu S, Hansch T W Opt. Commun. 69 219 (1989)
  183. Wei T et al. Appl. Phys. Lett. 68 3506 (1996)
  184. Golosovsky M, Davidov D Appl. Phys. Lett. 68 1579 (1996)
  185. Vlahacos C P et al. Appl. Phys. Lett. 69 3272 (1996)
  186. Booth J C et al. Rev. Sci. Instrum. 65 2082 (1994)
  187. Steinhauer D E et al. Appl. Phys. Lett. 71 1736 (1997)
  188. Anlage S M et al. IEEE Trans. Appl. Supercond. 7 3686 (1997)
  189. Stranick S J, Weiss P S Rev. Sci. Instrum. 64 1232 (1993)
  190. Stranick S J, Weiss P S Rev. Sci. Instrum. 65 918 (1994)
  191. Van der Weide D W, Neuzil P J. Vac. Sci. Technol. B 14 4144 (1996)
  192. Steinhauer D E et al. Appl. Phys. Lett. 72 861 (1998)
  193. Vlahacos C P et al. Appl. Phys. Lett. 72 1778 (1998)
  194. Feenstra B J et al. IEEE MTT-S Int. Microwave Symp. Digest 965 (1998)
  195. Pogrebnyak A D, Tyurin Yu N Usp. Fiz. Nauk 175 515 (2005); Pogrebnjak A D, Tyurin Yu N Phys. Usp. 48 487 (2005)
  196. Boiko V I, Valyaev A N, Pogrebnyak A D Usp. Fiz. Nauk 169 1243 (1999); Boiko V I, Valyaev A N, Pogrebnyak A D Phys. Usp. 42 1139 (1999)
  197. Pogrebnyak A D i dr. Struktura i Svoistva Nanokompozitnykh Gibridnykh i Polimernykh Pokrytii (M.: URSS, 2011)
  198. Grafutin V I, Prokop’ev E P Usp. Fiz. Nauk 172 67 (2002); Grafutin V I, Prokop’ev E P Phys. Usp. 45 59 (2002)
  199. Lavrent’ev V I, Pogrebnyak A D, Shandrik R Pis’ma ZhETF 65 618 (1997); Lavrent’ev V I, Pogrebnyak A D, Sandrik R JETP Lett. 65 651 (1997)
  200. Pogrebnjak A D, Shpak A P, Beresnev V M New Nanotechniqies (Eds A Malik, R J Rawat) (New York: Nova Science Publ., 2009) p. 687
  201. Haaks M CIRP Ann. Manufact. Technol. 57 537 (2008)
  202. Lavrent’ev V I i dr. Pis’ma ZhTF 24 (9) 13 (1998); Lavrent’ev V I et al. Tech. Phys. Lett. 24 334 (1998)
  203. Lavrent’ev V I, Pogrebnyak A D, Shandrik R Pis’ma ZhETF 24 91 (1997); Lavrent’ev V I, Pogrebnyak A D, Sandririk R JETP Lett. 65 91 (1997)
  204. Shpak A D, Kunitskii Yu A, Karbovskii V L Klasternye i Nanostrukturnye Materialy (K.: Akademperiodika, 2001)
  205. Shpak A D, Kunitskii Yu A, Smik S Yu Diagnostika Nanosistem (K.: Akademperiodika, 2003), Gl. 1,2
  206. Gomza Yu P i dr. Nanosist. Nanomater. Nanotekhnol. 7 (2) 411 (2009)
  207. Azarenkov N A i dr. Fizicheskaya Inzheneriya Poverkhnosti 3 (1 - 2) 127 (2005)
  208. Gorbachev L A, Pogrebnyak A D Metallofiz. Noveishie Tekhnol. 32 (1) 121 (2010)
  209. Cherenda N et al. Plasma Proces. Polymers 6 178 (2009)
  210. Pogrebnyak A D i dr. Pis’ma ZhTF 35 (19) 103 (2009); Pogrebnyak A D et al. Tech. Phys. Lett. 35 925 (2009)
  211. Pogrebnyak A D i dr. Izv. Vuzov. Fizika (12) 61 (2009); Pogrebnyak A D et al. Russ. Phys. J. 52 1317 (2009)
  212. Volopilkin E A, Parafin A E, Reznik A N Zh. Tekh. Fiz. 70 (2) 74 (2000); Volopilkin E A, ParafA E, Reznik A N Tech. Phys. 45 214 (2000)
  213. Semenov A A i dr. Zh. Tekh. Fiz. 71 (10) 13 (2001); Semenov A A et al. Tech. Phys. 46 1218 (2001)
  214. Reznik A N, Yuracova N V Zh. Tekh. Fiz. 74 (4) 108 (2004); Peznik A N, Yurasova N V Tech. Phys. 49 485 (2004)
  215. Tabib-Arat M, Katz J V, LeClair S R IEEE Trans. Instrum. Meas. 48 1111 (1999)
  216. Steinhauer D E, Anlage S M J. Appl. Phys. 89 2314 (2001)
  217. Lee S-C, Anlage S M Appl. Phys. Lett. 82 1893 (2003)
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