The basic physics behind the interaction of ions with solid-state matter is discussed, with an emphasis on the formation of interaction products between the ions and target atoms. Processes covering modification of high-resistance materials for use in small-sized 3D structure technology are described. Current trends in and problems facing the development of the scanning nuclear microprobe (SNMP) are reviewed. The application of slow positrons to diagnosing materials is examined and the techniques of positron microscopy and microprobing are presented. The potential of near-field microwave microscopy for diagnosing superconducting ceramics and of microwave microscopy for nanotechnology applications are assessed. The examples given include the use of micro- and nanoprobes to analyze nanoobjects (such as green algae cells with 3D-distributed microelements, etc.), to develop the topological aspects of integrated microcircuits in nanoelectronics, and some other applications. The role of iron in pathogenesis of Parkinson’s disease is highlighted, the latter being the subject of research in neurochemistry.

PACS: 07.78.+s, 78.70.Bj, 81.16.Ta, 81.40.−z (all) DOI: 10.3367/UFNe.0182.201203d.0287 URL: https://ufn.ru/en/articles/2012/3/d/ 000305464600003 2-s2.0-84863474680 2012PhyU...55..270P Citation: Pogrebnjak A D, Ponomarev A G, Shpak A P, Kunitskii Yu A "Application of micro- and nanoprobes to the analysis of small-sized 3D materials, nanosystems, and nanoobjects" Phys. Usp. 55 270–300 (2012) BibTexBibNote ® (generic)BibNote ® (RIS)MedlineRefWorks Received: 8th, February 2011, revised: 14th, April 2011, accepted: 28th, April 2011 Оригинал: Погребняк А Д, Пономарев А Г, Шпак А П, Куницкий Ю А «Применение микро- и нанозондов для анализа малоразмерных 3D материалов, наносистем и нанообъектов» УФН 182 287–321 (2012); DOI: 10.3367/UFNr.0182.201203d.0287